MSDS PAGE: CAS 07803-62-5 MSDS iosh_gov

217!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!
217!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!
!! !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!! 2 05

(Silicon hydride)
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(Silicon hydride)
(SILANE SILICON TETRAHYDRIDE Monosilane)
CAS No. 07803-62-5
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2.1

1. 2.
3. 4.

,
15
–�??

C

1.
1.
2.
3.
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5.
( )

1. 2.
3.
1. 2. 3.
1.
2.
3.
4. ;

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5. 6
, 7. 8. ,
9. 10.
11.
1. , 2.
40 3. 4. 5. "
" 6. " " ,
7.

BEIs

TWA STEL CEILING
5 ppm 10 ppm –�?? –�??

50 ppm
250 ppm
IDLH
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/
1.
2. 3. 4.

pH –�?? / -117
–�??

–�?? 1.4 ~96
>760 mmHg 1.11
–�??

1. 2.

H2 SiO2

1. 2. ,
, ,
1.
LD50( )
LC50( ) 9,600 ppm/4H
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2. ,

1.DOT 49 CFR 2.1
2.IATA/ICAO 2.1
3.IMDG 2.1
2203
1. 84
2.
3.

1.CHEMINFO CCINFO 99-2
2.RTECS TOMES PLUS Vol.41 1999
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89.3.31
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ALL Chemical Property And Toxicity Analysis PAGES IN THIS GROUP

NAME	CAS
iosh_gov_tw---msds0076.asp	N/A
iosh_gov_tw---msds0077.asp	00078-83-1
iosh_gov_tw---msds0079.asp	N/A
iosh_gov_tw---msds0080.asp	67-63-0
iosh_gov_tw---msds0085.asp	N/A
iosh_gov_tw---msds0087.asp	N/A
iosh_gov_tw---msds0088.asp	N/A
iosh_gov_tw---msds0089.asp	N/A
iosh_gov_tw---msds0090.asp	N/A
iosh_gov_tw---msds0091.asp	N/A
iosh_gov_tw---msds0092.asp	00134-32-7
iosh_gov_tw---msds0094.asp	07697-37-2
iosh_gov_tw---msds0095.asp	7727-37-9
iosh_gov_tw---msds0096.asp	N/A
iosh_gov_tw---msds0097.asp	N/A
iosh_gov_tw---msds0099.asp	N/A
iosh_gov_tw---msds0103.asp	00074-98-6
iosh_gov_tw---msds0104.asp	115-07-1
iosh_gov_tw---msds0105.asp	00110-86-1
iosh_gov_tw---msds0106.asp	07803-62-5
iosh_gov_tw---msds0108.asp	01310-73-2
iosh_gov_tw---msds0109.asp	08052-41-3
iosh_gov_tw---msds0110.asp	00100-42-5
iosh_gov_tw---msds0111.asp	07446-09-5
iosh_gov_tw---msds0112.asp	7664-93-9
iosh_gov_tw---msds0114.asp	N/A
iosh_gov_tw---msds0115.asp	00109-99-9
iosh_gov_tw---msds0117.asp	108-88-3
iosh_gov_tw---msds0118.asp	N/A
iosh_gov_tw---msds0120.asp	1330-20-7
iosh_gov_tw---msds0123.asp	00074-86-2
iosh_gov_tw---msds0127.asp	00107-05-1
iosh_gov_tw---msds0128.asp	00106-92-3
iosh_gov_tw---msds0140.asp	N/A
iosh_gov_tw---msds0142.asp	00504-29-0
iosh_gov_tw---msds0146.asp	N/A
iosh_gov_tw---msds0151.asp	N/A
iosh_gov_tw---msds0152.asp	N/A
iosh_gov_tw---msds0153.asp	N/A
iosh_gov_tw---msds0154.asp	07440-37-1
iosh_gov_tw---msds0155.asp	N/A
iosh_gov_tw---msds0157.asp	N/A
iosh_gov_tw---msds0159.asp	N/A
iosh_gov_tw---msds0161.asp	00100-44-7
iosh_gov_tw---msds0162.asp	N/A
iosh_gov_tw---msds0166.asp	N/A
iosh_gov_tw---msds0169.asp	00075-25-2
iosh_gov_tw---msds0172.asp	00075-63-8
iosh_gov_tw---msds0174.asp	00078-93-3
iosh_gov_tw---msds0175.asp	00105-46-4