BUFFERED OXIDE ETCH WITH SURFACTANT http://www.jtbaker.com/msds/B5634.htm
BUFFERED OXIDE ETCH WITH SURFACTANT
MSDS Number: B5634 --- Effective Date: 10/08/01
1. Product Identification
Synonyms: Aqueous NH4-HF Etchant Solutions
CAS No.: Not applicable to mixtures.
Molecular Weight: Not applicable to mixtures.
Chemical Formula: Not applicable to mixtures.
5332, 5334, 5419, 5439, 5568, 5569, 9289, 9291, 9293
2. Composition/Information on Ingredients
Ingredient CAS No Percent Hazardous
--------------------------------------- ------------ ------------ ---------
Ammonium Fluoride 12125-01-8 30 - 50% Yes
Hydrogen Fluoride 7664-39-3 0.5 - 10% Yes
Water 7732-18-5 40 - 70% No
Surfactant, N/A 0.1 - 0.3% No
TSRN004314011-5043
3. Hazards Identification
Emergency Overview
--------------------------
POISON! DANGER! CORROSIVE. EXTREMELY HAZARDOUS LIQUID AND
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VAPOR. CAUSES SEVERE BURNS WHICH MAY NOT BE IMMEDIATELY
PAINFUL OR VISIBLE. MAY BE FATAL IF SWALLOWED OR INHALED. LIQUID
AND VAPOR CAN BURN SKIN, EYES AND RESPIRATORY TRACT. CAUSES
BONE DAMAGE. AFFECTS RESPIRATORY SYSTEM, HEART, CIRCULATORY
SYSTEM, CENTRAL NERVOUS SYSTEM AND KIDNEYS. HARMFUL IF
ABSORBED THROUGH SKIN. REACTION WITH CERTAIN METALS
GENERATES FLAMMABLE AND POTENTIALLY EXPLOSIVE HYDROGEN GAS.
J.T. Baker SAF-T-DATA(tm) Ratings (Provided here for your convenience)
-----------------------------------------------------------------------------------------------------------
Health Rating: 4 - Extreme (Poison)
Flammability Rating: 0 - None
Reactivity Rating: 2 - Moderate
Contact Rating: 4 - Extreme (Corrosive)
Lab Protective Equip: GOGGLES & SHIELD; LAB COAT & APRON; VENT HOOD;
PROPER GLOVES
Storage Color Code: White (Corrosive)
-----------------------------------------------------------------------------------------------------------
Potential Health Effects
----------------------------------
Exposure to hydrofluoric acid can produce harmful health effects that may not be immediately
apparent. If inhaled or swallowed, this compound can cause fluoride poisoning. Early symptoms
include nausea, vomiting, diarrhea, and weakness. Later effects include central nervous system
effects, cardiovascular effects and death.
Inhalation:
Severely corrosive to the respiratory tract. May cause sore throat, coughing, labored breathing and
lung congestion/inflammation. May be absorbed through inhalation of vapors. Symptoms parallel
those following ingestion exposure.
Ingestion:
Corrosive. May cause sore throat, abdominal pain, diarrhea, vomiting, severe burns of the digestive
tract, kidney dysfunction and brain damage. Affects the heart and circulatory system.
Skin Contact:
Corrosive to the skin. Skin contact causes serious skin burns which may not be immediately
apparent or painful. Symptoms may be delayed 8 hours or longer. The fluoride ion readily
penetrates the skin causing destruction of deep tissue layers and even bone.
Eye Contact:
Corrosive to the eyes. Symptoms of redness, pain, blurred vision, and permanent eye damage may
occur.
Chronic Exposure:
Intake of more than 6 mg of fluorine per day may result in fluorosis, bone and joint damage.
Hypocalcemia and hypomagnesemia can occur from absorption of fluoride ion into blood stream.
Aggravation of Pre-existing Conditions:
Persons with pre-existing skin disorders, eye problems, or impaired kidney or respiratory function
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may be more susceptible to the effects of this substance.
4. First Aid Measures
For any route of contact: Detailed First Aid procedure should be planned before beginning work
with HF.
Inhalation:
Get medical help immediately. If patient is unconscious, give artificial respiration or use inhalator.
Keep patient warm and resting, and send to hospital after first aid is complete.
Ingestion:
If swallowed, DO NOT INDUCE VOMITING. Give large quantities of water. Never give
anything by mouth to an unconscious person. Get medical attention immediately.
Skin Contact:
1) Remove the victim from the contaminated area and immediately place him under a safety shower
or wash him with a water hose, whichever is available. 2) Remove all contaminated clothing. Handle
all HF-contaminated material with gloves made of appropriate material, such as PVC or neoprene.
3) Keep washing with large amounts of water for a minimum of 15 minutes. 4) Have someone make
arrangements for medical attention while you continue flushing the affected area with water. 5) If the
following materials are available, limit the washing to five minutes and immerse the burned area in a
solution of 0.2% iced aqueous Hyamine 1622 or 0.13% iced aqueous Zephiran Chloride. If
immersion is not practical, towels should be soaked with one of the above solutions and used as
compresses for the burn area. Ideally compresses should be changed every 2 minutes. Alternately,
2.5% calcium gluconate gel should be massaged into the affected area. 6) Seek medical attention as
soon as possible for all burns regardless of how minor they may appear initially. Hyamine 1622 is a
trade name for tetracaine benzethonium chloride, Merck Index Monograph 1078, a quaternary
ammonium compound sold by Rohm & Haas, Philadelphia. Zephiran Chloride is a trade name for
benzalkonium chloride, Merck Index Monograph 1059, also a quaternary ammonium compound,
sold by Sanofi-Synthelabo Inc., New York, NY.
Eye Contact:
1) Irrigate eyes for at least 30 minutes with copious quantities of water, keeping the eyelids apart
and away from eyeballs during irrigation. 2) Get competent medical attention immediately,
preferably an eye specialist. 3) If a physician is not immediately available, apply one or two drops of
ophthalmic anesthetic, (e.g., 0.5% Pontocaine Hydrochloride solution). 4) Do not use oily drops,
ointment or HF skin burn treatments. Place ice pack on eyes until reaching emergency room.
Note to Physician:
General: For burns of moderate areas, (greater than 8 square inches), ingestion and significant
inhalation exposure, severe systemic effects may occur, and admission to a critical care unit should
be considered. Monitor and correct for hypocalcemia, cardiac arrhythmias, hypomagnesemia and
hyperkalemia. In some cases renal dialysis may be indicated. Inhalation: Treat as chemical
pneumonia. Monitor for hypocalcemia, 2.5% calcium gluconate in normal saline by nebulizer or by
IPPB with 100% oxygen may decrease pulmonary damage. Bronchodilators may also be
administered. Skin: For deep skin burns or contact with concentrated HF (over 50%) solution,
consider infiltration about the affected area with 5% calcium gluconate [equal parts of 10% calcium
gluconate and sterile saline for injection]. Burns beneath the nail may require splitting the nail and
application of calcium gluconate to the exposed nail bed. For certain burns, especially of the digits,
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use of intra-arterial calcium gluconate may be indicated. Eyes: Irrigation may be facilitated by use of
Morgan lens or similar ocular irrigator, using 1% aqueous calcium gluconate solution [50ml of
calcium gluconate 10% in 500 ml normal saline]. AN ALTERNATIVE FIRST AID
PROCEDURE: The effect of HF, i.e. onset of pain, particularly in dilute solutions, may not be felt
for up to 24 hours. It is important, therefore, that persons using HF have immediate access to an
effective antidote even when they are away from their work place in order that first aid treatment
can be commenced immediately. We recommend that any person in contact with HF should carry,
or have access to a tube of HF Antidote Gel at all times; ideally with one tube at the work place,
one on the person and one at home. It is imperative that any person who has been contaminated by
HF should seek medical advice when the treatment by HF Antidote Gel has been applied.
REFERENCES: 1. Browno, T.D. Treatment of Hydrofluoric Acid Burns 2. Sprout, W.L. et al
Treatment of Severe Hydrofluoric Acid Exposures (Journal of American Occupational Medicine
25:12, 1993) 3. Bracken, W.M. et al Comparative Effectiveness of Topical Treatments for
Hydrofluoric Acid Burns, University of Kansas (Journal of Occupational Medicine 27:10:1985) 4.
Burke, W.J. , et al Systemic Fluoride Poisoning Resulting from A Fluoride Skin Burn (Journal of
Occupational Medicine (5,39:1973) HF ANTIDOTE GEL: Distributed by Pharmascience Inc.
8400 Darnley Rd. Montreal, Canada. H4T 1M4 Phone: ( 514 ) 340 - 1114 Fax: ( 514 ) 342 -
7764 U.S. (Buffalo, NY) distributor: 1-800-207-4477
5. Fire Fighting Measures
Fire:
Not considered to be a fire hazard. If involved in a fire, can emit toxic fumes and irritating and
corrosive gases.
Explosion:
Violent exothermic reaction occurs with water. Sufficient heat may be produced to ignite
combustible materials. Reacts with metals forming flammable Hydrogen gas.
Fire Extinguishing Media:
Keep upwind of fire. Use water or carbon dioxide on fires in which Hydrofluoric Acid is involved.
Halon or foam may also be used. In case of fire, the sealed containers can be kept cool by spraying
with water.
Special Information:
In the event of a fire, wear full protective clothing and NIOSH-approved self-contained breathing
apparatus with full facepiece operated in the pressure demand or other positive pressure mode.
Avoid getting water in tanks or drums; water can cause generation of heat and spattering. In contact
with air, the acid gives off corrosive fumes which are heavier than air.
6. Accidental Release Measures
Notify safety personnel, provide adequate ventilation, and remove ignition sources since hydrogen
may be generated by reactions with metals. Wear appropriate personal protective equipment as
specified in Section 8. Do not flush to sewers or waterways. Spills: Evacuate the danger area.
Apply magnesium sulfate (dry) to the spill area. Follow up with inert absorbent and add soda ash or
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magnesium oxide and slaked lime. Collect in appropriate plastic containers and save for disposal.
Wash spill site with soda ash solution. NOTE: Porous materials (concrete, wood, plastic, etc.) will
absorb HF and become a hazard for an indefinite time. Such spills should be cleaned and
neutralized immediately. US Regulations (CERCLA) require reporting spills and releases to soil,
water and air in excess of reportable quantities. The toll free number for the US Coast Guard
National Response Center is (800) 424-8802.
J. T. Baker TEAM庐 'Low Na+' acid neutralizer is recommended for spills of this product.
7. Handling and Storage
Keep in tightly closed polyethylene containers. Store in a cool, dry place with adequate ventilation
separated from other chemicals. Protect from physical damage. Storage facilities should be
constructed for containment and neutralization of spills. Handling and storage of HF requires special
materials and technology for containers, pipes, valves, etc., which is available from suppliers.
Containers of this material may be hazardous when empty since they retain product residues
(vapors, liquid); observe all warnings and precautions listed for the product.
8. Exposure Controls/Personal Protection
Airborne Exposure Limits:
Hydrogen fluoride:
- OSHA Permissible Exposure Limit (PEL):
3 ppm (TWA)
- ACGIH Threshold Limit Value (TLV):
3 ppm Ceiling as F.
Ventilation System:
A system of local and/or general exhaust is recommended to keep employee exposures below the
Airborne Exposure Limits. Local exhaust ventilation is generally preferred because it can control the
emissions of the contaminant at its source, preventing dispersion of it into the general work area.
Please refer to the ACGIH document, Industrial Ventilation, A Manual of Recommended
Practices, most recent edition, for details.
Personal Respirators (NIOSH Approved):
If the exposure limit is exceeded, a full facepiece respirator with an acid gas cartridge may be worn
up to 50 times the exposure limit or the maximum use concentration specified by the appropriate
regulatory agency or respirator supplier, whichever is lowest. For emergencies or instances where
the exposure levels are not known, use a full-facepiece positive-pressure, air-supplied respirator.
WARNING: Air purifying respirators do not protect workers in oxygen-deficient atmospheres.
Since the IDLH is low (30 ppm), the above cartridge system is not specifically approved for HF.
(3M Respirator Selection Guide)
Skin Protection:
Wear protective clothing, including boots or safety shoes with polyvinyl chloride (PVC) or
neoprene. Use chemical goggles and/or a full face shield. Wear coveralls with long sleeves, gauntlets
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and gloves of PVC or neoprene. A high degree of protection is obtained with an air-inflated suit
with mask and safety belt. Use protection suitable for conditions.
Eye Protection:
Use chemical safety goggles and/or full face shield where splashing is possible. Maintain eye wash
fountain and quick drench facilities in work area.
9. Physical and Chemical Properties
Appearance:
Colorless liquid.
Odor:
No information found.
Solubility:
Soluble in water.
Specific Gravity:
1.10
pH:
1.0 (0.10M HF)
% Volatiles by volume @ 21C (70F):
80
Boiling Point:
No information found.
Melting Point:
18C (64F)
Vapor Density (Air=1):
No information found.
Vapor Pressure (mm Hg):
No information found.
Evaporation Rate (BuAc=1):
No information found.
10. Stability and Reactivity
Stability:
Stable at room temperature (68F) when stored and used under proper conditions.
Hazardous Decomposition Products:
On heating to decomposition, could yield toxic fumes of fluorides, nitric oxides, and ammonia. On
contact with metals, liberates hydrogen gas. Attacks glass and other silicon containing compounds.
Reacts with silica to produce silicon tetrafluoride, a hazardous colorless gas.
Hazardous Polymerization:
Will not occur.
Incompatibilities:
Hydrofluoric acid is incompatible with arsenic trioxide, phosphorus pentoxide, ammonia, calcium
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oxide, sodium hydroxide, sulfuric acid, vinyl acetate, ethylenediamine, acetic anhydride, alkalis,
organic materials, most common metals, rubber, leather, water, strong bases, carbonates, sulfides,
cyanides, oxides of silicon, especially glass, concrete, silica, fluorine. Will also react with steam or
water to produce toxic fumes. Ammonium fluoride reacts with strong acids to produce hazardous
hydrogen fluoride gas or hydrofluoric acid. Reacts with strong bases to yield ammonia. Avoid
strong oxidizing agents.
Conditions to Avoid:
Heat, moisture, incompatibles.
11. Toxicological Information
Hydrofluoric acid: Inhalation rat LC50: 1276 ppm/1H; Investigated as a mutagen, reproductive
effector.
--------\Cancer Lists\------------------------------------------------------
---NTP Carcinogen---
Ingredient Known Anticipated IARC Category
------------------------------------ ----- ----------- -------------
Ammonium Fluoride (12125-01-8) No No None
Hydrogen Fluoride (7664-39-3) No No None
Water (7732-18-5) No No None
Surfactant, No No None
TSRN004314011-5043
12. Ecological Information
Environmental Fate:
If the pH is > 6.5, soil can bind fluorides tightly. High calcium content will immobilize fluorides,
which can be damaging to plants when present in acid soils.
Environmental Toxicity:
This material is expected to be slightly toxic to aquatic life.
13. Disposal Considerations
Whatever cannot be saved for recovery or recycling should be handled as hazardous waste and
sent to a RCRA approved incinerator or disposed in a RCRA approved waste facility. Processing,
use or contamination of this product may change the waste management options. State and local
disposal regulations may differ from federal disposal regulations. Dispose of container and unused
contents in accordance with federal, state and local requirements.
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14. Transport Information
Domestic (Land, D.O.T.)
-----------------------
Proper Shipping Name: CORROSIVE LIQUID, TOXIC, N.O.S. (CONTAINS
HYDROFLUORIC ACID, AMMONIUM FLUORIDE)
Hazard Class: 8, 6.1
UN/NA: UN2922
Packing Group: II
Information reported for product/size: 9LB
International (Water, I.M.O.)
-----------------------------
Proper Shipping Name: CORROSIVE LIQUID, TOXIC, N.O.S. (CONTAINS
HYDROFLUORIC ACID, AMMONIUM FLUORIDE)
Hazard Class: 8, 6.1
UN/NA: UN2922
Packing Group: II
Information reported for product/size: 9LB
International (Air, I.C.A.O.)
-----------------------------
Proper Shipping Name: CORROSIVE LIQUID, TOXIC, N.O.S. (CONTAINS
HYDROFLUORIC ACID, AMMONIUM FLUORIDE)
Hazard Class: 8, 6.1
UN/NA: UN2922
Packing Group: II
Information reported for product/size: 9LB
15. Regulatory Information
--------\Chemical Inventory Status - Part 1\---------------------------------
Ingredient TSCA EC Japan Australia
----------------------------------------------- ---- --- ----- ---------
Ammonium Fluoride (12125-01-8) Yes Yes Yes Yes
Hydrogen Fluoride (7664-39-3) Yes Yes Yes Yes
Water (7732-18-5) Yes Yes Yes Yes
Surfactant, Yes Yes Yes Yes
TSRN004314011-5043
--------\Chemical Inventory Status - Part 2\---------------------------------
--Canada--
Ingredient Korea DSL NDSL Phil.
----------------------------------------------- ----- --- ---- -----
Ammonium Fluoride (12125-01-8) Yes Yes No Yes
Hydrogen Fluoride (7664-39-3) Yes Yes No Yes
Water (7732-18-5) Yes Yes No Yes
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Surfactant, No Yes No No
TSRN004314011-5043
--------\Federal, State & International Regulations - Part 1\----------------
-SARA 302- ------SARA 313------
Ingredient RQ TPQ List Chemical Catg.
----------------------------------------- --- ----- ---- --------------
Ammonium Fluoride (12125-01-8) No No No No
Hydrogen Fluoride (7664-39-3) 100 100 Yes No
Water (7732-18-5) No No No No
Surfactant, No No No No
TSRN004314011-5043
--------\Federal, State & International Regulations - Part 2\----------------
-RCRA- -TSCA-
Ingredient CERCLA 261.33 8(d)
----------------------------------------- ------ ------ ------
Ammonium Fluoride (12125-01-8) 100 No No
Hydrogen Fluoride (7664-39-3) 100 U134 No
Water (7732-18-5) No No No
Surfactant, No No No
TSRN004314011-5043
Chemical Weapons Convention: No TSCA 12(b): No CDTA: No
SARA 311/312: Acute: Yes Chronic: Yes Fire: No Pressure: No
Reactivity: No (Mixture / Liquid)
Australian Hazchem Code: 2X
Poison Schedule: No information found.
WHMIS:
This MSDS has been prepared according to the hazard criteria of the Controlled Products
Regulations (CPR) and the MSDS contains all of the information required by the CPR.
16. Other Information
NFPA Ratings: Health: 4 Flammability: 0 Reactivity: 1
Label Hazard Warning:
POISON! DANGER! CORROSIVE. EXTREMELY HAZARDOUS LIQUID AND VAPOR.
CAUSES SEVERE BURNS WHICH MAY NOT BE IMMEDIATELY PAINFUL OR
VISIBLE. MAY BE FATAL IF SWALLOWED OR INHALED. LIQUID AND VAPOR CAN
BURN SKIN, EYES AND RESPIRATORY TRACT. CAUSES BONE DAMAGE. AFFECTS
RESPIRATORY SYSTEM, HEART, CIRCULATORY SYSTEM, CENTRAL NERVOUS
SYSTEM AND KIDNEYS. HARMFUL IF ABSORBED THROUGH SKIN. REACTION
WITH CERTAIN METALS GENERATES FLAMMABLE AND POTENTIALLY
EXPLOSIVE HYDROGEN GAS.
Label Precautions:
Do not get in eyes, on skin, or on clothing.
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Do not breathe vapor.
Keep container closed.
Cool before opening.
Use only with adequate ventilation.
Wash thoroughly after handling.
Store in a tightly closed container.
Label First Aid:
IN ALL CASES, CALL PHYSICIAN IMMEDIATELY. First Aid procedures should be
pre-planned for HF emergencies. A supply of 50:50 water/magnesium sulfate paste or 2 1/2%
Calcium Gluconate paste should be available where first aid medications are administered. If
ingested, DO NOT INDUCE VOMITING. If patient is conscious, give large quantities of milk or
water and send to hospital. If inhaled and patient is unconscious, give artificial respiration or use
inhalator and send to hospital. In case of eye contact, wash open eyes with large but gentle stream
of water for 15 minutes. Place ice pack on eyes until reaching emergency room. In case of skin
contact, remove contaminated clothing and wash burn area with plenty of water to remove acid.
Cover burn area with a poultice of 50:50 water/magnesium sulfate paste or 2 1/2% calcium
gluconate paste. Leave in place until medical help arrives or patient is transferred to hospital.
Product Use:
Laboratory Reagent.
Revision Information:
MSDS Section(s) changed since last revision of document include: 4.
Disclaimer:
*****************************************************************************************
Mallinckrodt Baker, Inc. provides the information contained herein in good faith but
makes no representation as to its comprehensiveness or accuracy. This document is
intended only as a guide to the appropriate precautionary handling of the material by a
properly trained person using this product. Individuals receiving the information must
exercise their independent judgment in determining its appropriateness for a particular
purpose. MALLINCKRODT BAKER, INC. MAKES NO REPRESENTATIONS OR
WARRANTIES, EITHER EXPRESS OR IMPLIED, INCLUDING WITHOUT
LIMITATION ANY WARRANTIES OF MERCHANTABILITY, FITNESS FOR A
PARTICULAR PURPOSE WITH RESPECT TO THE INFORMATION SET FORTH
HEREIN OR THE PRODUCT TO WHICH THE INFORMATION REFERS.
ACCORDINGLY, MALLINCKRODT BAKER, INC. WILL NOT BE RESPONSIBLE
FOR DAMAGES RESULTING FROM USE OF OR RELIANCE UPON THIS
INFORMATION.
*****************************************************************************************
Prepared by: Environmental Health & Safety
Phone Number: (314) 654-1600 (U.S.A.)
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