MATERIAL SAFETY DATA SHEET
***** IDENTIFICATION *****
NAME: VM652 SYNONYMS: SEMICONDUCTOR MATERIAL.
CHEM.FAMILY: Mixture. FORMULA: Proprietary.
MANUFACTURER: INFORMATION & EMERGENCY TELEPHONE NOS:
HD MicroSystems [TM] INFORMATION: Product: (800)441-7515
Cheesequake Road EMERGENCIES: Medical: (800)441-3637
Parlin, NJ 08859 Transport (CHEMTREC): (800)424-9300
All Ingredients in This Product are TSCA Listed/Reported.
***** PHYSICAL DATA *****
FORM: Viscous Liquid. ODOR: Alcohol.
APPEARANCE: Colorless to Amber. SOLUBILITY IN WATER: Complete.
***** COMPONENTS *****
Material(s): CAS# V.P. mm Hg @ 20C Weight %
1-Methoxy-2-Propanol. 107-98-2 11.829 > 60%
2-Methoxy-1-Propanol. 1589-47-5 .1 - 1%
09/24/02
VM652/AH1 Page 1
***** HAZARDOUS REACTIVITY *****
INSTABILITY:
The product is normally stable.
INCOMPATIBILITY:
Avoid contact with: Oxidizable materials; Strong bases; Strong acids; Strong
oxidizers.
DECOMPOSITION:
Decomposition products: Carbon Dioxide (CO2); Carbon Monoxide (CO); Water.
POLYMERIZATION:
The product does not normally polymerize significantly.
***** FIRE & EXPLOSION DATA *****
FLASHPOINT: 93 F Closed cup
FIRE & EXPLOSION HAZARDS:
KEEP AWAY FROM SPARKS AND OPEN FLAMES. Do not smoke in area with open
product; If the product may be heated above its flashpoint during processing,
remove sources of ignition such as open sparks, flames or static discharge to
prevent vapor ignition.
EXTINGUISHING MEDIA:
Sand, dry chemical, or carbon dioxide.
SPECIAL FIREFIGHTING INFORMATION:
Toxic decomposition products may form under fire conditions. (See
Decomposition Section.); Wear full protective clothing and a full facepiece,
positive pressure, self-contained breathing apparatus (SCBA); Decontaminate
contaminated clothing and equipment with soap and water. Dispose of residues
per federal, state, and local regulation. (See Waste Disposal Section.).
***** HEALTH HAZARD INFORMATION *****
OVERVIEW: The most likely routes of worker overexposure to this product are
skin contact and inhalation. Skin irritation and / or other effects of skin
contact are easily avoided by: using proper gloves, reading "Protection
Information" section below; not touching exposed skin (like your neck or
face) or clothing with contaminated gloves; using proper glove removal
techniques; washing affected areas immediately if skin contact occurs;
washing hands before leaving the work area. Inhalation exposure would occur
by breathing the product's volatile components, which begin to evaporate at
room temperature when product container is opened. Volatile solvents
continue to evaporate during room temperature use of the product, such as
pouring from the jar to the dispensing machine and spin coating. Mist and
solvent vapors will evolve if a spray application is used. During the wafer
or substrate drying (125 - 150 deg C) and the final curing (300 - 450 deg C)
any remaining solvent shall volatilize. Consideration should be given to
avoiding overexposure to chemicals used in related processes. For example,
avoid over exposure to chemicals used as "product thinners", solvents used to
clean process equipment, and other chemicals used in the operation such as
wafer etchants and parts cleaners. Personnel performing maintenance and
VM652/AH1 Page 2
repairs on dispensing equipment (e.g. spin coaters) may need personnel
protective equipment such as respirators, gloves, goggles, and protective
clothing to prevent exposure to accumulated materials. Well-designed area
and personal air sampling /analysis can show whether exposures are within the
required / recommended limits. Properly designed engineering controls such as
local ventilation and process enclosures are effective ways to reduce the
environmental concentrations to permissible limits. Respirators should be
used when engineering and work practice controls are not technically
feasible, or when such controls are in the process of being installed, or
when the engineering controls fail and need to be supplemented. (See the
"Exposure Limits" table below for more information). Process controls and
procedures must comply with all applicable Federal, State (or Provincial)
and Local safety, health and environmental laws, regulations and ordinances.
In addition, it is always prudent to use all the practical means to limit
worker exposure to chemicals. Significant differences in overall exposure
can be made by using practical measures such as:
Inhalation - Minimize exposure by keeping containers of product, solvents,
solvent-dampened clean wipes, etc, covered;
Skin - Avoid contact by selecting proper gloves, and know how to them
properly;
Eye - Wear chemical safety glasses when handling the product,
solvents and waste materials, and where there is potential for
splashing wear chemical goggles and face shield;
Ingestion - Avoid inadvertent ingestion by washing the hands before eating,
drinking, or smoking, and restrict these activities to
locations outside of the work area.
PRINCIPAL HEALTH EFFECTS:
>>>1-Methoxy-2-Propanol
****Toxic effects described in animals include: BY SKIN CONTACT: Central
nervous system effects; BY INHALATION: Central nervous system effects; Lung
effects; Liver effects. Toxic effects of repeated or prolonged animal
exposures include: BY SKIN CONTACT: Kidney damage; Narcosis; BY EYE CONTACT:
May cause conjunctivitis; BY INHALATION: Lower weight gain; Kidney effects;
BY INGESTION: Central nervous system effects; Weight loss; Liver effects;
Kidney effects; ****Additional animal tests have shown: Developmental
toxicity at dosage levels showing maternal toxicity; Reproductive toxicity at
dose levels showing other toxic effects; No mutagenic toxicity in bacterial
or mammalian cell cultures, but untested in animals; No animal data available
to define carcinogenicity. ****Human health effects of overexposure may
include: BY SKIN CONTACT: Skin irritation with discomfort or rash; BY EYE
CONTACT: Eye irritation with discomfort, tearing, or blurring of vision; BY
INHALATION: Irritation of the upper respiratory passages with coughing and
discomfort; BY INGESTION: Temporary nervous system depression with
anaesthetic effects, e.g., dizziness, headache, confusion, incoordination,
and loss of consciousness. ****Human effects of higher level acute, repeated
or chronic overexposure may include: BY SKIN CONTACT: Skin permeation may
occur in amounts capable of producing the effects of systemic toxicity; BY
CONTACT, INHALATION, OR INGESTION: No acceptable information to confidently
predict effects of chronic human exposure.
>>>2-Methoxy-1-Propanol
****Toxic effects described in animals include: BY INHALATION: Central
nervous system effects. Toxic effects of repeated or prolonged animal
exposures include: BY SKIN CONTACT: Increased kidney weight; Anaesthetic
VM652/AH1 Page 3
effects; BY INHALATION: Liver effects; Lung effects; BY INGESTION: Central
nervous system effects; Kidney effects; ****Additional animal tests have
shown: BY CONTACT, INHALATION, OR INGESTION: No animal data available to
define the carcinogenicity, developmental, reproductive or mutagenic hazards
of this material. ****Human health effects of overexposure may include: BY
EYE CONTACT: Tearing; Irritation; BY INHALATION: Drowsiness; Headache;
Nausea; Irritation; Intoxication; BY INGESTION: Drowsiness; Difficulty in
breathing; Liver enlargement; Intoxication. ****Human effects of higher
level acute, repeated or chronic overexposure may include: BY INHALATION: May
cause lung damage; BY CONTACT OR INGESTION: No acceptable information to
confidently predict effects of chronic human exposure.
Individuals may have increased susceptibility to the hazards of overexposure
to ingredient(s) of this product if they have preexisting diseases of the:
Skin; Central nervous system; Kidneys; Gastrointestinal tract; Reproductive
organs; Liver.
ANIMAL DATA:
>>>1-Methoxy-2-Propanol
Skin LD50 [Rabbits]: 14,000 mg/kg
13,000 mg/kg
Inhalation LD50 4 hr [Rats]: 15,000 ppm
Oral LD50 [Rats]: 5,200 mg/kg
7,200 mg/kg.
>>>2-Methoxy-1-Propanol
No information available.
CARCINOGENICITY LISTING:
No ingredients of this product are designated by IARC, NTP, OSHA, ACGIH or
Dupont as potential carcinogens.
EXPOSURE LIMITS:
Workplace exposures should be kept below the following limits:
. AIHA ACGIH OSHA
Name/Units 8hr 15min 8hr 15min 8hr 15min
PROPYLENE GLYCOL MONOMETHYL ETHER
Units: ppm 100 150
NOTES ON EXPOSURE LIMITS:
PELs - OSHA Permissible Exposure Limits - 29 CFR 1910.1000, Subpart Z, or
specific substance standards; TLVs - ACGIH Threshold Limit Values - published
by American Conference of Governmental Industrial Hygienists, 6500 Glenway
Avenue, Cincinnati, OH 45211; WEELs- AIHA Workplace Environmental Exposure
Limits - published by the American Industrial Hygiene Association, 2700
Prosperity Avenue, Suite 250, Fairfax, VA 22031; AELs - Dupont Acceptable
Exposure Limit. Where governmentally imposed occupational exposure limits are
lower than AEL in effect, government limits shall take precedence; (C) =
"ceiling", limit not to be exceeded for any time period; (S) = "skin" , skin
absorption may contribute significantly to the ingredient's internal
toxicity.
VM652/AH1 Page 4
***** FIRST AID INSTRUCTIONS *****
Skin Contact: For skin contact, immediately wash skin with soap and water.
Wash contaminated clothing before reuse.
Eye Contact: For eye contact, immediately flush eyes with plenty of water
for at least 15 minutes. Call a physician.
Inhalation: If inhaled, remove to fresh air. If not breathing, give
artificial respiration. If breathing is difficult, give
oxygen. Call a physician.
Ingestion: If swallowed, do not induce vomiting. Immediately give two
glasses of water. Never give anything by mouth to an
unconscious person. Call a physician.
NOTES TO PHYSICIAN: Activated charcoal slurry may be administered. To prepare
activated charcoal slurry, suspend 50 grams activated charcoal in 400ml water
and mix thoroughly. Administer 5ml/kg, or 350ml for an average adult.
***** PROTECTION INFORMATION *****
Respiratory Protection:
If respirators are needed to meet applicable limits, a respiratory protection
program up to the level of OSHA Standard 29 CFR 1910.134 is mandatory. This
includes air monitoring, selection, medical approval, training, fit testing,
inspection, maintenance, cleaning, storage, etc.. Selection of a suitable
respirator will depend on the properties of the contaminant(s) and their
actual or expected air concentration(s) versus applicable limits. Consult
ANSI Standard Z88.2 for decision logic to select appropriate NIOSH/MESA
approved respitators;
Gloves:
Gloves should be used when the possibility of skin contact exists; The
suitability of a particular glove and glove material should be determined as
part of an overall glove program. Considerations may include chemical
breakthrough time; permeation rate; abrasion, cut and puncture resistance;
flexibility; duration of contact; etc.
Recommended glove materials:
Any material impervious to fine dusts;
Other Protection Practices:
Appropriate eye protection such as chemical splash goggles should be used if
the possibility of eye contact exists; Protective outer clothing should be
used where the possibility of body contact exists. Contaminated work clothing
should not be allowed out of the workplace; Do not smoke, consume or store
food or drinks in areas where the product is handled or stored. After
handling the product, wash hands thoroughly before leaving the work area;
Additional engineering controls, work practices and training may be required
depending on exposure levels. These are discussed in the OSHA Respiratory
Protection Standard (29 CFR 1910.134) and OSHA Hazard Commmunication Standard
(29 CFR 1910.1200); Do not breath dust. Avoid contact with eyes, skin, or
clothing. Wash thoroughly after handling.
VM652/AH1 Page 5
***** DISPOSAL INFORMATION *****
Spill, Leak or Release:
FOR SMALL SPILLS, absorb on rags, sand or other absorbant material; FOR LARGE
SPILLS, get workers out of affected area. If flammable liquids or vapors may
be present, turn off electrical devices or other sources of sparks or flames.
WEAR PROTECTIVE EQUIPMENT. Use supplied-air respiratory protection if vapor
concentrations are not known; Contain spill at source by diking or absorbing
with sand. Do not allow spill to spread to or intentionally flush to sewer or
ground. Wash area thoroughly. Adequately ventilate area; Spill residue,
cleaning rags and absorbant may be considered hazardous. (See Waste Disposal
Section.).
Waste Disposal:
Components of this product may be considered hazardous; Consult applicable
Federal, State, and local regulations for allowable disposal methods.
***** PRODUCT INFORMATION *****
Contaminated Items:
Empty product containers, contaminated clothing and cleaning materials, etc.
should be considered hazardous until decontaminated or properly disposed of.
(See Waste Disposal Section.).
***** ADDITIONAL INFORMATION *****
SPECIAL NOTES:
No ingredients of this product are subject to the reporting requirements of
section 313 of Title III of the Superfund Amendment and Reauthorization Act
of 1986 and 40 CFR part 372.
CALIFORNIA PROPOSITION 65: WARNING: This product does not contain chemical
known to the state of California to cause cancer, birth defects, or other
reproductive harm.
This product is a physical mixture. The health effects information about this
product is based on the individual ingredients; The data in this Material
Safety Data Sheet relates only to the specific product designated herein and
does not relate to its use in combination with any other material or in any
process.
Date of latest MSDS revision: 09/24/02
Person Responsible for MSDS:
Safety Coordinator - MSDS
DuPont P&EM / MCM
14 Alexander Drive
Research Triangle Park, NC 27709-4425
Telephone: (800)284-3382
Outside U.S.: (919)248-5775
VM652/AH1 Page 6
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