Material Safety Data Sheet
BOE庐 Etchants
1. PRODUCT AND COMPANY IDENTIFICATION
BOE Etchants (various grades)
PRODUCT NAME:
Buffered Oxide Etchants
OTHER/GENERIC NAMES:
Aqueous Solution of Hydrofluoric Acid and Ammonium Fluoride
Semi-conductor etching.
PRODUCT USE:
General Chemical Corporation
MANUFACTURER:
90 East Halsey Road
Parsippany, NJ 07054
973-515-1840 800-631-8050
FOR MORE INFORMATION CALL: IN CASE OF EMERGENCY CALL:
(Monday-Friday, 9:00am-4:30pm) (24 Hours/Day, 7 Days/Week)
2. COMPOSITION/INFORMATION ON INGREDIENTS
INGREDIENT NAME CAS NUMBER WEIGHT %
Hydrofluoric acid 7664-39-3 1-11
Ammonium fluoride 12125-01-8 31-40
Proprietary surfactant Proprietary 0 - <1
Water 7732-18-5 Balance
Trace impurities and additional material names not listed above may also appear in Section 15 towards the end of the
MSDS. These materials may be listed for local "Right-To-Know" compliance and for other reasons.
This product is considered hazardous under the OSHA Hazard
OSHA Hazard Communication Standard:
Communication Standard.
3. HAZARDS IDENTIFICATION
EMERGENCY OVERVIEW: A colorless liquid with a sharp, penetrating odor. Causes
severe burns to skin and eyes. May be fatal if inhaled or swallowed. Not flammable.
POTENTIAL HEALTH HAZARDS
SKIN: Causes severe burns. Specific medical treatment is required to treat hydrofluoric acid burns. The effects
may be delayed several hours if initial first aid measures are inadequate. Severe scarring may result.
Penetration effects may not be immediately painful or visible. Large burns (over 25 square inches) may
also cause hypocalcemia which, in rare instances, has been fatal. Solutions as dilute as 2% hydrofluoric
acid can cause burns. Also, solutions with 1% hydrofluoric acid (nominally) and with HF content
augmented by ammonium fluoride (which partially hydrolyzes) would be estimated to be capable of
causing burns.
Causes severe burns. Severe exposure may cause blindness. Solutions as dilute as 2% hydrofluoric
EYES:
acid can cause burns. Also, solutions with 1% hydrofluoric acid (nominally) and with HF content
augmented by ammonium fluoride (which partially hydrolyzes) would be estimated to be capable of
causing burns.
MSDS Number: GC-4004 Page 1 of 8
Current Issue Date: January, 2002
MATERIAL SAFETY DATA SHEET
BOE庐 Etchants
If liquid is heated, hydrogen fluoride gas is extremely irritating and injurious. Mist attacks teeth,
INHALATION:
and ultimately gums and jaw. Symptoms may be delayed. Excessive exposure to hydrofluoric
acid may cause hypocalcemia or severe pulmonary edema, which may be fatal 鈥? particularly if
first aid or medical treatment are delayed.
Unless medical treatment is promptly initiated, ingestion is likely to cause profound and
INGESTION:
possibly fatal hypocalcemia (calcium deficiency in the blood). Liquid is corrosive to the mouth,
throat, esophagus and digestive tract.
DELAYED EFFECTS: Excessive exposure may produce osseous fluorosis (increased radiographic density of
the bones.
Ingredients found on one of the three OSHA designated carcinogen lists are listed below.
INGREDIENT NAME NTP STATUS IARC STATUS OSHA LIST
No ingredients listed in this section.
4. FIRST AID MEASURES
1. Remove the victim from the contaminated area and immediately place victim under a safety shower or
SKIN:
wash victim with a water hose, whichever is available. Remove all contaminated clothing. Keep washing
victim with large amounts of water for a minimum of 15-20 minutes. Pay particular attention to skin
under the fingernails.
2. Have someone make arrangements for medical attention while you continue flushing the affected area
with water.
3. If available, after thorough washing, the burned area should be immersed in a solution of 0.2% iced
aqueous Hyamine庐 1622 or 0.13% iced aqueous Zephiran Chloride庐. If immersion is not practical,
towels should be soaked with one of the above solutions and used as compresses for the burned area.
Ideally compresses should be changed every 2 minutes. At our plants, we generally keep 10-15 liters of
solution made up available for use. Solutions are replaced annually if not used.*
4. An alternative treatment to #3 is for the physician to inject sterile 10% aqueous calcium gluconate
solution subcutaneously beneath, around, and in the burned area. Initially use no more than 0.5cc per
square centimeter and do not distort appearance of the skin. If pain is not completely relieved, additional
treatment is indicated.
5. Seek medical attention as soon as possible for all burns, regardless of how minor they may appear
initially.
*Hyamine庐 1622 is a tradename for benzethonium chloride, Merck Index monograph 1072, a quaternary ammonium compound sold
by Rohm and Haas, Philadelphia, PA. Zephiran Chloride庐 is a tradename for benzalkonium chloride, Merck Index monograph 1055,
also a quaternary ammonium compound, sold by Winthrop Laboratories, NYC.
1. Flush the eyes immediately for 15-20 minutes with large amounts of water. Hold the eyelids open to
EYES:
allow thorough flushing of the eyes (use water only).
2. Get medical attention immediately, preferably an eye specialist.
3. If a physician is not immediately available, apply 1-2 drops of 0.5% Pontocaine Hydrochloride solution
followed by a second irrigation for 15 minutes. Do not use any of the solutions described for skin
treatment. Use no oils or greases unless instructed to do so by a physician.*
*Pontocaine Hydrochloride is a tradename for Tetracaine Hydrochloride, Merck Index monograph 8904, sold by Winthrop
Laboratories, NYC.
MSDS Number: GC-4004 Page 2 of 8
Current Issue Date: January, 2002
MATERIAL SAFETY DATA SHEET
BOE庐 Etchants
1. Remove victim immediately to fresh air. Keep patient lying down, quiet and warm.
INHALATION:
2. Get immediate medical attention.
3. If breathing has stopped, apply artificial respiration.
4. Use oxygen if a qualified operator is present.
5. Do not give stimulants unless instructed to do so by a physician.
6. Do not permit victim to become active for at least 24 hours. Victim should be examined by a
physician and held under observation for at least this 24-hour period.
1. Drink large amounts of water to dilute. Do not induce vomiting.
INGESTION:
2. Several glasses of milk or several ounces of milk of magnesia may be given for their soothing
effect.
3. Get medical attention immediately.
Severe systemic effects may occur from large skin burns, significant inhalation or
ADVICE TO PHYSICIAN:
ingestion. Monitor for hypocalcemia. Treat inhalation exposures as chemical
pneumonia.
5. FIRE FIGHTING MEASURES
FLAMMABLE PROPERTIES
Not flammable
FLASH POINT:
Not applicable
FLASH POINT METHOD:
Not applicable
AUTOIGNITION TEMPERATURE:
Not applicable
UPPER FLAME LIMIT (volume % in air):
Not applicable
LOWER FLAME LIMIT (volume % in air):
Not applicable
FLAME PROPAGATION RATE (solids):
Not applicable
OSHA FLAMMABILITY CLASS:
EXTINGUISHING MEDIA:
If involved in a fire, water spray is recommended. Avoid using a solid water stream as this may splash acid onto
personnel.
UNUSUAL FIRE AND EXPLOSION HAZARDS:
Material is difficult to contain, as it corrodes most substances except lead, wax, polyethylene, polypropylene,
platinum and fluorocarbon plastics (unfilled). Contact with some metals may generate hydrogen, a fire, explosive
and reactive hazard.
SPECIAL FIRE FIGHTING PRECAUTIONS/INSTRUCTIONS:
Wear NIOSH-approved, self-contained breathing apparatus and full protective clothing. Use water spray to keep
non-leaking, fire-exposed containers cool. Care should be exercised so as not to splash this material onto
personnel.
6. ACCIDENTAL RELEASE MEASURES
IN CASE OF SPILL OR OTHER RELEASE: (See section 8 for recommended personal protective equipment.)
Flush small spills immediately with water; avoid splashing personnel. Neutralize carefully with soda ash or lime and
flush again with water. Provide adequate ventilation to remove carbon dioxide resulting from neutralization step, if
present. For large spills: dike up with soda ash and proceed cautiously with neutralization step. Attempt to keep
MSDS Number: GC-4004 Page 3 of 8
Current Issue Date: January, 2002
MATERIAL SAFETY DATA SHEET
BOE庐 Etchants
out of sewer. Any release to the environment of these products may be subject to Federal and/or State reporting
requirements. Check with appropriate agencies.
Spills and releases may have to be reported to Federal and/or local authorities. See Section 15 regarding
reporting requirements.
7. HANDLING AND STORAGE
NORMAL HANDLING: (See section 8 for recommended personal protective equipment.)
Do not get in eyes, on skin or on clothing. Avoid breathing vapor or mist. Use only with adequate ventilation. Keep
container closed. Follow good housekeeping and personal hygiene practices. Wash thoroughly after handling.
STORAGE RECOMMENDATIONS:
Store only in approved containers, avoiding glass and most metals. Store below 125潞F, preferably below 100潞F, in
a well-ventilated, properly drained area. Take precautions to avoid crystallization of solutions in cool temperatures.
Prohibit smoking in storage areas.
8. EXPOSURE CONTROLS/PERSONAL PROTECTION
ENGINEERING CONTROLS:
Handle in a complete closed ventilated enclosure (e.g. exhausted hood), which is standard practice in the
semiconductor industry. Hood and duct material should be resistant to acid (particularly to hydrofluoric acid).
PERSONAL PROTECTIVE EQUIPMENT
Wear protective gloves (gauntlet-type preferred for heavy work) made preferably of
SKIN PROTECTION:
neoprene, PVC or equivalent and full protective clothing, if there is any possibility of
contact with solutions.
For material handled normally in a hood, safety glasses with non-perforated side
EYE PROTECTION:
shields. When pouring liquid, add a full face shield. For spill, leak or other
emergency, wear chemical safety goggles. Do not wear contact lenses.
None required when normally handled in a hood. For spills or emergencies with
RESPIRATORY
exposure of <20 ppm vapor, use a chemical cartridge respirator with cartridge
PROTECTION:
specified for HF and half facepiece (allowing for full-face plastic shield). For >20
ppm, use a full face respirator with air-supply or self-contained breathing apparatus
with full facepiece.
Provide eyewash stations and quick-drench shower facilities convenient to the work
ADDITIONAL
area. Maintain adequate neutralization equipment and supplies for spill
RECOMMENDATIONS:
emergencies.
MSDS Number: GC-4004 Page 4 of 8
Current Issue Date: January, 2002
MATERIAL SAFETY DATA SHEET
BOE庐 Etchants
EXPOSURE GUIDELINES
INGREDIENT NAME ACGIH TLV OSHA PEL OTHER LIMIT
Hydrofluoric acid 3 ppm Ceiling (as F) 3 ppm TWA (as F) mg (F)/liter of urine
7 (post-shift)
4 (pre-shift)
Ammonium fluoride 3 ppm Ceiling (as F) 3 ppm TWA (as F) mg (F)/liter of urine
7 (post-shift)
4 (pre-shift)
1
= Limit established by General Chemical Corporation.
2
= Workplace Environmental Exposure Level (AIHA).
3
= Biological Exposure Index (ACGIH).
OTHER EXPOSURE LIMITS FOR POTENTIAL DECOMPOSITION PRODUCTS:
None
9. PHYSICAL AND CHEMICAL PROPERTIES
Colorless liquid
APPEARANCE:
Liquid
PHYSICAL STATE:
Mixture
MOLECULAR WEIGHT:
Mixture
CHEMICAL FORMULA:
Sharp, penetrating odor.
ODOR:
1.1 - 1.2
SPECIFIC GRAVITY (water = 1.0):
100
SOLUBILITY IN WATER (weight %):
Not determined, but strongly acidic.
pH:
230C
BOILING POINT:
<0C
MELTING POINT:
Estimated 0.4 (maximum)
VAPOR PRESSURE:
0.7 (HF gas)
VAPOR DENSITY (air = 1.0):
Not determined.
EVAPORATION RATE: COMPARED TO:
Varies with product mix
% VOLATILES:
Not flammable.
FLASH POINT:
(Flash point method and additional flammability data are found in Section 5.)
10. STABILITY AND REACTIVITY
NORMALLY STABLE? (CONDITIONS TO AVOID):
Stable under normal conditions. Corrosive to glass and some metals.
INCOMPATIBILITIES:
Glass, concrete and other silicon-bearing materials: yields silicon tetrafluoride gas. Pressure build-up from this
process has been known to blow up glass containers.
Carbonates, sulfides, and cyanides: yields toxic gases: carbon dioxide, hydrogen sulfide, and hydrogen cyanide.
Alkalis, some oxides, fluorine and other water-reactive materials: causes strong exothermic reactions that can be
violent.
Common metals: yields hydrogen gas, a fire and explosive hazard and a reactive hazard.
MSDS Number: GC-4004 Page 5 of 8
Current Issue Date: January, 2002
MATERIAL SAFETY DATA SHEET
BOE庐 Etchants
HAZARDOUS DECOMPOSITION PRODUCTS:
If boiled to dryness and heated further, evaporation residue (ammonium fluoride) decomposes, yielding ammonia
gas and hydrogen fluoride. Both are toxic and ammonia gas can burn.
HAZARDOUS POLYMERIZATION:
Will not occur
11. TOXICOLOGICAL INFORMATION
IMMEDIATE (ACUTE) EFFECTS:
Hydrofluoric acid: Ammonium fluoride:
LCLo (inhl-human): 50 ppm/30 min LD50 (intraperitoneal-rat): 31 mg/kg
LC50 (inhl-rat): 1276 ppm/1 hr
LC50 (inhl-mouse): 342 ppm/1 hr
DELAYED (SUBCHRONIC AND CHRONIC) EFFECTS:
Effects of chronic exposure include systemic fluoride toxicity, osteosclerosis, and mottling of the teeth.
Hypocalcemia, metabolic acidosis, pulmonary edema, and death can occur from high-level chronic exposure.
OTHER DATA:
None
12. ECOLOGICAL INFORMATION
Hydrofluoric acid:
60 ppm/*/fish/lethal/fresh water (* = time period not specified)
13. DISPOSAL CONSIDERATIONS
RCRA
Is the unused product a RCRA hazardous If yes, the RCRA ID number is:
D002 (corrosive)
waste if discarded? Yes
U134 (hydrofluoric acid)
OTHER DISPOSAL CONSIDERATIONS:
If permitted by regulations, material may be neutralized with alkali.
The information offered in section 13 is for the product as shipped. Use and/or alterations to the product such as
mixing with other materials may significantly change the characteristics of the material and alter the RCRA
classification and the proper disposal method.
14. TRANSPORT INFORMATION
8, PG II
US DOT HAZARD CLASS:
UN3264
US DOT ID NUMBER:
Corrosive liquid, acidic, inorganic, n.o.s. (contains hydrofluoric acid and ammonium
PROPER SHIPPING NAME:
fluoride)
MSDS Number: GC-4004 Page 6 of 8
Current Issue Date: January, 2002
MATERIAL SAFETY DATA SHEET
BOE庐 Etchants
For additional information on shipping regulations affecting this material, contact the information number found in
Section 1.
15. REGULATORY INFORMATION
TOXIC SUBSTANCES CONTROL ACT (TSCA)
All ingredients listed on the TSCA Inventory
TSCA INVENTORY STATUS:
OTHER TSCA ISSUES: None
SARA TITLE III/CERCLA
"Reportable Quantities" (RQs) and/or "Threshold Planning Quantities" (TPQs) exist for the following ingredients.
INGREDIENT NAME SARA/CERCLA RQ (lb) SARA EHS TPQ (lb)
Hydrofluoric acid 100 100
Ammonium fluoride 100 ------
Spills or releases resulting in the loss of any ingredient at or above its RQ requires immediate notification
to the National Response Center [(800) 424-8802] and to your Local Emergency Planning Committee.
Immediate
SECTION 311 HAZARD CLASS:
SARA 313 TOXIC CHEMICALS:
The following ingredients are SARA 313 "Toxic Chemicals" and may be subject to annual reporting requirements.
CAS numbers and weight percents are found in Section 2.
INGREDIENT NAME COMMENT
Hydrofluoric acid None
STATE RIGHT-TO-KNOW
In addition to the ingredients found in Section 2, the following are listed for state right-to-know purposes.
INGREDIENT NAME WEIGHT % COMMENT
No ingredients listed in this section.
ADDITIONAL REGULATORY INFORMATION:
None listed
WHMIS CLASSIFICATION (CANADA):
E, D2B.
Classified in accordance with WHMIS Controlled Product regulations.
FOREIGN CHEMICAL CONTROL INVENTORY STATUS:
All ingredients listed on EINECS and Canadian DSL.
MSDS Number: GC-4004 Page 7 of 8
Current Issue Date: January, 2002
MATERIAL SAFETY DATA SHEET
BOE庐 Etchants
16. OTHER INFORMATION
January, 2002
CURRENT ISSUE DATE:
August, 1998
PREVIOUS ISSUE DATE:
CHANGES TO MSDS FROM PREVIOUS ISSUE DATE ARE DUE TO THE FOLLOWING:
Change in format.
NOTE: A select group of BOE solutions (superwet) contain a small (<1%) amount of a
OTHER INFORMATION:
proprietary surfactant, which does not add to the hazards inherent in the standard
product, as covered in this MSDS.
MSDS Number: GC-4004 Page 8 of 8
Current Issue Date: January, 2002
|