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MSDS 
:
 Trichlorosilane, 99%
CAS 
:
 10025-78-2
SYNONYMS 
:
 Trichloorsilaan; Silicochloroform.
**** SECTION 2 - COMPOSITION, INFORMATION ON INGREDIENTS ****

+----------------+--------------------------------------+----------+-----------+
| CAS# | Chemical Name | % | EINECS# |
|----------------|--------------------------------------|----------|-----------|
| 10025-78-2 |Trichlorosilane | 99% | 233-042-5 |
+----------------+--------------------------------------+----------+-----------+
Hazard Symbols: F+ C
Risk Phrases: 12 14 17 20/22 29 35

**** SECTION 3 - HAZARDS IDENTIFICATION ****

EMERGENCY OVERVIEW
Extremely flammable. Reacts violently with water. Spontaneously
flammable in air. Harmful by inhalation and if swallowed. Contact
with water liberates toxic gas. Causes severe burns.Highly
flammable.Lachrymator (substance which increases the flow of tears).

Potential Health Effects
Eye:
Produces irritation, characterized by a burning sensation, redness,
tearing, inflammation, and possible corneal injury. Lachrymator
(substance which increases the flow of tears). May cause chemical
conjunctivitis and corneal damage.
Skin:
Contact with skin causes irritation and possible burns, especially
if the skin is wet or moist. May cause cyanosis of the extremities.
Ingestion:
May cause gastrointestinal irritation with nausea, vomiting and
diarrhea. May cause kidney damage. May cause cardiac disturbances.
May be harmful if swallowed. Ingestion of large amounts may cause CNS
depression.
Inhalation:
May cause kidney damage. Aspiration may lead to pulmonary edema.
Vapors may cause dizziness or suffocation. May cause cardiac
abnormalities. Inhalation at high concentrations may cause CNS
depression and asphixiation. May cause burning sensation in the
chest.
Chronic:
Effects may be delayed. May cause kidney damage.

**** SECTION 4 - FIRST AID MEASURES ****

Eyes:
Immediately flush eyes with plenty of water for at least 15 minutes,
occasionally lifting the upper and lower eyelids. Get medical aid
immediately. Do NOT allow victim to rub eyes or keep eyes closed.
Skin:
Get medical aid immediately. Flush skin with plenty of water for at
least 15 minutes while removing contaminated clothing and shoes. If
water-reactive products are embedded in the skin, no water should be
applied. The embedded products should be covered with a light oil.
Ingestion:
Get medical aid immediately. Do NOT induce vomiting. If conscious
and alert, rinse mouth and drink 2-4 cupfuls of milk or water.
Inhalation:
Get medical aid immediately. Remove from exposure and move to fresh
air immediately. If breathing is difficult, give oxygen. Do NOT use
mouth-to-mouth resuscitation. If breathing has ceased apply
artificial respiration using oxygen and a suitable mechanical device
such as a bag and a mask.
Notes to Physician:

**** SECTION 5 - FIRE FIGHTING MEASURES ****

General Information:
As in any fire, wear a self-contained breathing apparatus in
pressure-demand, MSHA/NIOSH (approved or equivalent), and full
protective gear. Reacts violently with water giving off flammable
gas which may explode. Vapors may form an explosive mixture with
air. Vapors can travel to a source of ignition and flash back. During
a fire, irritating and highly toxic gases may be generated by thermal
decomposition or combustion. Water Reactive. Material will react with
water and may release a flammable and/or toxic gas. Use water spray
to keep fire-exposed containers cool. May ignite or explode on
contact with steam or moist air. Will be easily ignited by heat,
sparks or flame. May re-ignite after fire is extinguished. Containers
may explode if exposed to fire.
Extinguishing Media:
Use dry sand or earth to smother fire. Do NOT use water directly on
fire. Use foam, dry chemical, or carbon dioxide. If water is the
only media available, use in flooding amounts. DO NOT USE WATER! Do
NOT get water inside containers. Do NOT use straight streams of
water. Contact professional fire-fighters immediately. Cool
containers with flooding quantities of water until well after fire is
out.

**** SECTION 6 - ACCIDENTAL RELEASE MEASURES ****

General Information: Use proper personal protective equipment as indicated
in Section 8.
Spills/Leaks:
Absorb spill with inert material (e.g. vermiculite, sand or earth),
then place in suitable container. Avoid runoff into storm sewers and
ditches which lead to waterways. Clean up spills immediately,
observing precautions in the Protective Equipment section. Remove all
sources of ignition. Use a spark-proof tool. Do not expose spill to
water. Do not get water inside containers. A vapor suppressing foam
may be used to reduce vapors.

**** SECTION 7 - HANDLING and STORAGE ****

Handling:
Wash thoroughly after handling. Remove contaminated clothing and
wash before reuse. Do not allow water to get into the container
because of violent reaction. Ground and bond containers when
transferring material. Use spark-proof tools and explosion proof
equipment. Avoid contact with eyes, skin, and clothing. Empty
containers retain product residue, (liquid and/or vapor), and can be
dangerous. Keep away from heat, sparks and flame. Avoid ingestion
and inhalation. Do not allow contact with water. Do not pressurize,
cut, weld, braze, solder, drill, grind, or expose empty containers
to heat, sparks or open flames. Keep from contact with moist air and
steam.
Storage:
Keep away from sources of ignition. Keep away from water.
Flammables-area. Refrigerator/flammables. Keep refrigerated. (Store
below 4C/39F.) Store protected from moisture.

**** SECTION 8 - EXPOSURE CONTROLS, PERSONAL PROTECTION ****

Engineering Controls:
Use explosion-proof ventilation equipment. Facilities storing or
utilizing this material should be equipped with an eyewash facility
and a safety shower.
Exposure Limits
CAS# 10025-78-2:

Russia: 1 mg/m3 TWA

Personal Protective Equipment

Eyes:
Wear appropriate protective eyeglasses or chemical
safety goggles as described by OSHA's eye and face
protection regulations in 29 CFR 1910.133 or European
Standard EN166.
Skin:
Wear appropriate protective gloves and clothing to
prevent skin exposure.
Clothing:
Wear appropriate protective clothing to minimize
contact with skin.
Respirators:
Follow the OSHA respirator regulations found in 29
CFR 1910.134 or European Standard EN 149. Use a
NIOSH/MSHA or European Standard EN 149 approved
respirator if exposure limits are exceeded or if
irritation or other symptoms are experienced.

**** SECTION 9 - PHYSICAL AND CHEMICAL PROPERTIES ****

Physical State: Liquid
Color: clear, colorless
Odor: None reported.
pH: Not available.
Vapor Pressure: 533 hPa @ 15 C
Viscosity: 0.332 cP 20.00
Boiling Point: 31 - 32 deg C @ 760.00mmHg
Freezing/Melting Point: -126.6 deg C
Autoignition Temperature: 185 deg C ( 365.00 deg F)
Flash Point: -13 deg C ( 8.60 deg F)
Explosion Limits, lower: 1.20 vol %
Explosion Limits, upper: 90.50 vol %
Decomposition Temperature:
Solubility in water: reacts
Specific Gravity/Density: 1.3420g/cm3
Molecular Formula: HCl3Si
Molecular Weight: 135.45

**** SECTION 10 - STABILITY AND REACTIVITY ****

Chemical Stability:
Stable under normal temperatures and pressures. Combines vigorously
or explosively with water.
Conditions to Avoid:
Incompatible materials, ignition sources, moisture, excess heat,
strong oxidants, exposure to moist air or water.
Incompatibilities with Other Materials:
Oxidizing agents, acids, bases, alcohols, amines, moisture, water.
Hazardous Decomposition Products:
Hydrogen chloride, carbon monoxide, irritating and toxic fumes and
gases, carbon dioxide, silicon dioxide.
Hazardous Polymerization: Has not been reported.

**** SECTION 11 - TOXICOLOGICAL INFORMATION ****

RTECS#:
CAS# 10025-78-2: VV5950000
LD50/LC50:
CAS# 10025-78-2: Inhalation, mouse: LC50 = 1500 mg/m3/2H; Oral, rat:
LD50 = 1030 mg/kg.
Carcinogenicity:
Trichlorosilane -
Not listed by ACGIH, IARC, or NTP.
Other:
See actual entry in RTECS for complete information.

**** SECTION 12 - ECOLOGICAL INFORMATION ****



**** SECTION 13 - DISPOSAL CONSIDERATIONS ****

Dispose of in a manner consistent with federal, state, and local regulations.

**** SECTION 14 - TRANSPORT INFORMATION ****

IATA
Shipping Name: TRICHLOROSILANE
Hazard Class: 4.3 (3)
UN Number: 1295
Packing Group:
IMO
Shipping Name: TRICHLOROSILANE
Hazard Class: 4.3 (3)
UN Number: 1295
Packing Group: I
RID/ADR
Shipping Name: TRICHLOROSILANE
Hazard Class: 4.3
UN Number: 1295
Packing group: I

**** SECTION 15 - REGULATORY INFORMATION ****

European/International Regulations
European Labeling in Accordance with EC Directives
Hazard Symbols: F+ C
Risk Phrases:
R 12 Extremely flammable.
R 14 Reacts violently with water.
R 17 Spontaneously flammable in air.
R 20/22 Harmful by inhalation and if swallowed.
R 29 Contact with water liberates toxic gas.
R 35 Causes severe burns.
Safety Phrases:
S 7/9 Keep container tightly closed and in a
well-ventilated place.
S 16 Keep away from sources of ignition - No
smoking.
S 26 In case of contact with eyes, rinse immediately
with plenty of water and seek medical advice.
S 36/37/39 Wear suitable protective clothing, gloves
and eye/face protection.
S 43A In case of fire, use dry chemical (never use
water).
S 45 In case of accident or if you feel unwell, seek
medical advice immediately (show the label where
possible).
WGK (Water Danger/Protection)
CAS# 10025-78-2: No information available.
Canada
CAS# 10025-78-2 is listed on Canada's DSL List.
CAS# 10025-78-2 is listed on Canada's Ingredient Disclosure List.
US FEDERAL
TSCA
CAS# 10025-78-2 is listed on the TSCA inventory.

**** SECTION 16 - ADDITIONAL INFORMATION ****

MSDS Creation Date: 9/02/1997 Revision #7 Date: 10/22/2002

The information above is believed to be accurate and represents the best
information currently available to us. However, we make no warranty of
merchantability or any other warranty, express or implied, with respect to
such information, and we assume no liability resulting from its use. Users
should make their own investigations to determine the suitability of the
information for their particular purposes. In no way shall the company be
liable for any claims, losses, or damages of any third party or for lost
profits or any special, indirect, incidental, consequential or exemplary
damages, howsoever arising, even if the company has been advised of
the possibility of such damages.
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Last modified: 05/19/2025 03:39:39