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MSDS 
:
 1,1,1,3,3,3-Hexamethyldisilazane, 98%
CAS 
:
 999-97-3
SYNONYMS 
:
 Bis(trimethylsilyl)amine; HMDS;     1,1,1-Trimethyl-N-(trimethylsilyl)silanamine.
**** SECTION 2 - COMPOSITION, INFORMATION ON INGREDIENTS ****

+----------------+--------------------------------------+----------+-----------+
| CAS# | Chemical Name | % | EINECS# |
|----------------|--------------------------------------|----------|-----------|
| 999-97-3 |1,1,1,3,3,3-HEXAMETHYLDISILAZANE | 98% | 213-668-5 |
+----------------+--------------------------------------+----------+-----------+
Hazard Symbols: F C
Risk Phrases: 11 18 36/37/38

**** SECTION 3 - HAZARDS IDENTIFICATION ****

EMERGENCY OVERVIEW
Highly flammable. In use, may form flammable/explosive vapour-air
mixture. Irritating to eyes, respiratory system and skin.Moisture
sensitive.Corrosive.

Potential Health Effects
Eye:
Causes eye burns.
Skin:
Harmful if absorbed through the skin. Causes skin burns.
Ingestion:
May cause severe gastrointestinal tract irritation with nausea,
vomiting and possible burns. May be harmful if swallowed.
Inhalation:
May cause irritation of the respiratory tract with burning pain in
the nose and throat, coughing, wheezing, shortness of breath and
pulmonary edema. Inhalation may be fatal as a result of spasm,
inflammation, edema of the larynx and bronchi, chemical pneumonitis
and pulmonary edema.
Chronic:
No information found.

**** SECTION 4 - FIRST AID MEASURES ****

Eyes:
Immediately flush eyes with plenty of water for at least 15 minutes,
occasionally lifting the upper and lower eyelids. Get medical aid
immediately.
Skin:
Get medical aid. Immediately flush skin with plenty of water for at
least 15 minutes while removing contaminated clothing and shoes.
Wash clothing before reuse.
Ingestion:
Do not induce vomiting. If victim is conscious and alert, give 2-4
cupfuls of milk or water. Never give anything by mouth to an
unconscious person. Get medical aid immediately.
Inhalation:
Get medical aid immediately. Remove from exposure and move to fresh
air immediately. If not breathing, give artificial respiration. If
breathing is difficult, give oxygen.
Notes to Physician:
Treat symptomatically and supportively.

**** SECTION 5 - FIRE FIGHTING MEASURES ****

General Information:
As in any fire, wear a self-contained breathing apparatus in
pressure-demand, MSHA/NIOSH (approved or equivalent), and full
protective gear. Vapors can travel to a source of ignition and flash
back. Flammable liquid and vapor.
Extinguishing Media:
Do NOT use water directly on fire. Use foam, dry chemical, or carbon
dioxide.

**** SECTION 6 - ACCIDENTAL RELEASE MEASURES ****

General Information: Use proper personal protective equipment as indicated
in Section 8.
Spills/Leaks:
Absorb spill with inert material (e.g. vermiculite, sand or earth),
then place in suitable container. Clean up spills immediately,
observing precautions in the Protective Equipment section. Scoop up
with a nonsparking tool, then place into a suitable container for
disposal. Remove all sources of ignition.

**** SECTION 7 - HANDLING and STORAGE ****

Handling:
Wash thoroughly after handling. Remove contaminated clothing and
wash before reuse. Use only in a well-ventilated area. Use
spark-proof tools and explosion proof equipment. Avoid breathing
dust, vapor, mist, or gas. Do not get in eyes, on skin, or on
clothing. Empty containers retain product residue, (liquid and/or
vapor), and can be dangerous. Take precautionary measures against
static discharges. Keep away from heat, sparks and flame. Do not
ingest or inhale. Use only in a chemical fume hood. Do not
pressurize, cut, weld, braze, solder, drill, grind, or expose empty
containers to heat, sparks or open flames.
Storage:
Keep away from heat, sparks, and flame. Keep away from sources of
ignition. Store in a cool, dry place. Keep container closed when not
in use. Store in a tightly closed container. Flammables-area.

**** SECTION 8 - EXPOSURE CONTROLS, PERSONAL PROTECTION ****

Engineering Controls:
Use process enclosure, local exhaust ventilation, or other
engineering controls to control airborne levels below recommended
exposure limits.
Exposure Limits
CAS# 999-97-3:

Russia: 2 mg/m3 TWA

Personal Protective Equipment

Eyes:
Wear appropriate protective eyeglasses or chemical
safety goggles as described by OSHA's eye and face
protection regulations in 29 CFR 1910.133 or European
Standard EN166.
Skin:
Wear appropriate protective gloves to prevent skin
exposure.
Clothing:
Wear appropriate protective clothing to prevent skin
exposure.
Respirators:
Follow the OSHA respirator regulations found in 29
CFR 1910.134 or European Standard EN 149. Use a
NIOSH/MSHA or European Standard EN 149 approved
respirator if exposure limits are exceeded or if
irritation or other symptoms are experienced.

**** SECTION 9 - PHYSICAL AND CHEMICAL PROPERTIES ****

Physical State: Liquid
Color: clear, colorless
Odor: None reported.
pH: Not available.
Vapor Pressure: 20 mm Hg @ 20 C
Viscosity: Not available.
Boiling Point: 125 deg C
Freezing/Melting Point: Not available.
Autoignition Temperature: 379 deg C ( 714.20 deg F)
Flash Point: 8 deg C ( 46.40 deg F)
Explosion Limits, lower: 0.8
Explosion Limits, upper: 16.3
Decomposition Temperature: Not available.
Solubility in water: Insoluble in water.
Specific Gravity/Density: 0.77
Molecular Formula: C6H19NSi2
Molecular Weight: 161.3107

**** SECTION 10 - STABILITY AND REACTIVITY ****

Chemical Stability:
Stable under normal temperatures and pressures.
Conditions to Avoid:
Mechanical shock, incompatible materials, ignition sources,
temperatures above 150C, exposure to moist air or water.
Incompatibilities with Other Materials:
Strong oxidants and strong acids. May decompose upon exposure to
moist air or water. When heated to temperatures above 150 C in the
presence of air, hexamethyldisilazane can form formaldehyde vapors.
Hazardous Decomposition Products:
Nitrogen oxides, carbon monoxide, carbon dioxide, silicon dioxide,
formaldehyde.
Hazardous Polymerization: Has not been reported.

**** SECTION 11 - TOXICOLOGICAL INFORMATION ****

RTECS#:
CAS# 999-97-3: JM9230000
LD50/LC50:
CAS# 999-97-3: Dermal, guinea pig: LD50 = 1 mL/kg; Draize test,
rabbit, skin: 500 uL Severe; Inhalation, mouse: LC50 = 12 gm/m3/2H;
Inhalation, rat: LC50 = 8700 mg/m3/4H; Oral, mouse: LD50 = 850
mg/kg; Oral, rabbit: LD50 = 1100 mg/kg; Oral, rat: LD50 = 850 mg/kg;
Skin, rabbit: LD50 = 710 uL/kg.
Carcinogenicity:
1,1,1,3,3,3-HEXAMETHYLDISILAZANE -
Not listed by ACGIH, IARC, or NTP.
Other:
See actual entry in RTECS for complete information.

**** SECTION 12 - ECOLOGICAL INFORMATION ****



**** SECTION 13 - DISPOSAL CONSIDERATIONS ****

Dispose of in a manner consistent with federal, state, and local regulations.

**** SECTION 14 - TRANSPORT INFORMATION ****

IATA
Shipping Name: FLAMMABLE LIQUID, N.O.S.*
Hazard Class: 3
UN Number: 1993
Packing Group: II
IMO
Shipping Name: FLAMMABLE LIQUID, N.O.S.
Hazard Class: 3.2
UN Number: 1993
Packing Group: II
RID/ADR
Shipping Name: FLAMMABLE LIQUID, N.O.S.
Hazard Class: 3
UN Number: 1993
Packing group: II

**** SECTION 15 - REGULATORY INFORMATION ****

European/International Regulations
European Labeling in Accordance with EC Directives
Hazard Symbols: F C
Risk Phrases:
R 11 Highly flammable.
R 18 In use, may form flammable/explosive vapour-air
mixture.
R 36/37/38 Irritating to eyes, respiratory system
and skin.
Safety Phrases:
S 7/8 Keep container tightly closed and dry.
S 9 Keep container in a well-ventilated place.
S 16 Keep away from sources of ignition - No
smoking.
S 26 In case of contact with eyes, rinse immediately
with plenty of water and seek medical advice.
S 29 Do not empty into drains.
S 36/39 Wear suitable protective clothing and
eye/face protection.
S 37/39 Wear suitable gloves and eye/face
protection.
WGK (Water Danger/Protection)
CAS# 999-97-3: 1
Canada
CAS# 999-97-3 is listed on Canada's DSL List.
CAS# 999-97-3 is not listed on Canada's Ingredient Disclosure List.
US FEDERAL
TSCA
CAS# 999-97-3 is listed on the TSCA inventory.

**** SECTION 16 - ADDITIONAL INFORMATION ****

MSDS Creation Date: 11/18/1997 Revision #2 Date: 3/18/2003

The information above is believed to be accurate and represents the best
information currently available to us. However, we make no warranty of
merchantability or any other warranty, express or implied, with respect to
such information, and we assume no liability resulting from its use. Users
should make their own investigations to determine the suitability of the
information for their particular purposes. In no way shall the company be
liable for any claims, losses, or damages of any third party or for lost
profits or any special, indirect, incidental, consequential or exemplary
damages, howsoever arising, even if the company has been advised of
the possibility of such damages.
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