MATERIAL SAFETY DATA SHEET
PRODUCT NAME: SILANE IN HYDROGEN (5 PPM TO 15%)
1. Chemical Product and Company Identification
BOC Gases, BOC Gases
Division of Division of
The BOC Group, Inc. BOC Canada Limited
575 Mountain Avenue 5975 Falbourne Street, Unit 2
Murray Hill, NJ 07974 Mississauga, Ontario L5R 3W6
TELEPHONE NUMBER: (905) 501-1700
TELEPHONE NUMBER: (908) 464-8100
24-HOUR EMERGENCY TELEPHONE NUMBER: 24-HOUR EMERGENCY TELEPHONE NUMBER:
CHEMTREC (800) 424-9300 (905) 501-0802
EMERGENCY RESPONSE PLAN NO: 20101
PRODUCT NAME: SILANE IN HYDROGEN (5 PPM TO 15%)
CHEMICAL NAME: Silicon Tetrahydride in Hydrogen
COMMON NAMES/SYNONYMS: Silicon Tetrahydride in Hydrogen (5 ppm to 15%)
TDG (Canada) CLASSIFICATION: 2.1
WHMIS CLASSIFICATION: A, D2B, B6
PREPARED BY: Loss Control (908)464-8100/(905)501-1700
PREPARATION DATE: 6/1/95
REVIEW DATES: 6/11/96
2. Composition, Information on Ingredients
PEL-OSHA1 TLV-ACGIH2
INGREDIENT % VOLUME LD50 or LC50
Route/Species
Silicon Tetrahydride 0.0005 to 15.0 Not Available 5 ppm TWA LC50
FORMULA: SiH4 9600 ppm/4H
CAS: 7803-62-5 (rat)
RTECS #: VV1400000
Hydrogen Balance Simple Asphyxiant Simple Asphyxiant Not Available
FORMULA: H2
CAS: 1333-74-0
RTECS #: MW8900000
1
As stated in 29 CFR 1910, Subpart Z (revised July 1, 1993)
2
As stated in the ACGIH 1994-95 Threshold Limit Values for Chemical Substances and Physical Agents
3. Hazards Identification
EMERGENCY OVERVIEW
Irritating to the eyes, skin and mucous membranes. Hydrolysis of Silane inside of body tissues may
produce Silicic acid. Flammable. This product may spontaneously combust in air.
MSDS: G-198
Revised: 6/11/96 Page 1 of 17
PRODUCT NAME: SILANE IN HYDROGEN (5 PPM TO 15%)
ROUTE OF ENTRY:
Skin Contact Skin Absorption Eye Contact Inhalation Ingestion
Yes No Yes Yes No
HEALTH EFFECTS:
Exposure Limits Irritant Sensitization
Yes Yes No
Teratogen Reproductive Hazard Mutagen
No No No
Synergistic Effects
None reported
Carcinogenicity: -- NTP: No IARC: No OSHA: No
EYE EFFECTS:
Contact may form silicic acid with resultant irritation.
SKIN EFFECTS:
Skin burns from ignited silane are similar to other thermal burns. Contact may cause irritation.
INGESTION EFFECTS:
Since product is a gas at room temperature, ingestion is unlikely. Consult a physician for treatment. Contact
may form silicic acid causing irritation..
INHALATION EFFECTS:
Symptoms of inhalation are not well defined. It has been reported that breathing this gas may cause headache or
nausea. The hydrolysis of silane in the body tissues would form silicic acid or hydrated silica.
Hydrogen is a simple asphyxiant. Maintain oxygen levels above 18% by volume. Helium narcosis only may
occur under pressure of 1200 torr for most persons. Effects of oxygen deficiency resulting from simple
asphyxiants may include: rapid breathing, diminished mental alertness, impaired muscular coordination, faulty
judgement, depression of all sensations, emotional instability, and fatigue. As asphyxiation progresses, nausea,
vomiting, prostration, and loss of consciousness may result, eventually leading to convulsions, coma, and death.
Oxygen deficiency during pregnancy has produced developmental abnormalities in humans and experimental
animals.
NFPA HAZARD CODES HMIS HAZARD CODES RATINGS SYSTEM
Health: 1 Health: 1 0 = No Hazard
Flammability: 4 Flammability: 4 1 = Slight Hazard
Reactivity: 2 (3, as silane) Reactivity: 2 (3, as silane) 2 = Moderate Hazard
3 = Serious Hazard
4 = Severe Hazard
MSDS: G-198
Revised: 6/11/96 Page 2 of 17
PRODUCT NAME: SILANE IN HYDROGEN (5 PPM TO 15%)
4. First Aid Measures
EYES:
Flush eyes with water or sterile saline for at least 15 minutes. See physician for follow up.
SKIN:
Dermal burns from ignited silane should be treated as with any thermal burn. Wash affected area with water. If
irritation persists see physician. Normal contact or frostbite: remove contaminated clothing and flush affected
area.
INGESTION:
DO NOT INDUCE VOMITING! CALL POISON CONTROL CENTER FOR ADVICE.
INHALATION:
PROMPT MEDICAL ATTENTION IS MANDATORY IN ALL CASES OF OVEREXPOSURE. RESCUE
PERSONNEL SHOULD BE EQUIPPED WITH SELF CONTAINED BREATHING APPARATUS AND BE
AWARE OF EXTREME FIRE AND EXPLOSION HAZARD. Conscious persons should be assisted to an
uncontaminated area and inhale fresh air. Quick removal from the contaminated area is most important.
Unconscious persons should be moved to an uncontaminated area, given artificial resuscitation and supplemental
oxygen. Medical assistance should be sought immediately. Treatment should be symptomatic and supportive.
5. Fire Fighting Measures
Conditions of Flammability: Spontaneously combustible at room temperature in air
Flash point: Method: Autoignition
Temperature: 1085oF (585oC)
Not Available Not Applicable
LEL(%): 4 (Hydrogen) UEL(%): 74.5 (Hydrogen)
Hazardous combustion products: Silicon compounds
Sensitivity to mechanical shock: Not Available
Sensitivity to static discharge: Not Available
FIRE AND EXPLOSION HAZARDS:
Spontaneously combustible (pyrophoric). Although silane is pyrophoric, low concentrations (in mixtures) may
be released without burning. Releases of higher concentrations may result in the potential for a subsequent fire
or explosion hazard.
Hydrogen is very flammable. Eliminate all sources of ignition. Hydrogen gas is very light and rises very rapidly
in air. Increase ventilation to prevent an explosion hazard, particularly in the upper portions of buildings or
sheds where the gas might collect. Keep apparatus away from areas where flammable gas may accumulate.
EXTINGUISHING MEDIA:
Use water spray to cool surrounding containers. Inerting the atmosphere to reduce oxygen levels may extinguish
flame, allowing capping of leaking container. Do not attempt this unless specifically trained.
MSDS: G-198
Revised: 6/11/96 Page 3 of 17
PRODUCT NAME: SILANE IN HYDROGEN (5 PPM TO 15%)
FIRE FIGHTING INSTRUCTIONS:
If possible, stop the flow of gas. Use water spray to cool surrounding containers. Reduce the rate of flow and
inject an inert gas, if possible, before completely stopping the hydrogen flow (to help prevent a flashback). Do
not extinguish the fire until the supply is shut off as otherwise an explosion re-ignition may occur.
Never enter a flammable atmosphere! Cool surrounding containers with water spray. Hydrogen burns with an
almost invisible, almost silent, flame of relatively low thermal radiation. Caution should be used when
determining if the flame has been extinguished. Do not detect leaks with hands or open flame.
Should the fire be extinguished and the flow of gas continue, increased ventilation must be used to prevent a
buildup of hydrogen gas, thus creating an explosion hazard. Keep non-essential personnel away from the
immediate area. Use only spark proof tools to close open valves.
Keep all apparatus upwind and away from areas where concentrations of flammable gas may accumulate. A
water fog may be used to create ventilation. Ventilation fans must be explosion proof.
Personnel may need approach type protective suits and positive pressure self-contained breathing apparatus.
Regular fire fighters turnout gear may not be adequate.
6. Accidental Release Measures
Evacuate all personnel from affected area. Use appropriate protective equipment. If leak is in user鈥檚 equipment,
be certain to purge piping with inert gas prior to attempting repairs. If leak is in container or container valve,
contact the appropriate emergency telephone number listed in Section 1 or call your closest BOC location.
7. Handling and Storage
Earth ground and bond all lines and equipment associated with the system. Electrical equipment should be non-
sparking or explosion-proof.
Pure silane is noncorrosive and may be handled in most common structural containers. Carbon steel, stainless
steel, copper, brass, Monel庐 & Hasteloy C are the most commonly used materials. It is also compatible with
ordinary glass, Pyrex庐, and quartz. For gasket materials, Viton庐, Nylon, Teflon庐, and Kel-F庐 are all
satisfactory. Most all silane leaks will ignite in air producing silicon dioxide. Occasionally the silicon dioxide
will slow or stop the leak. These leaks are recognizable by the presence of the silicon dioxide and permanent
repairs to the leak should be made.
For additional storage recommendations, consult Compressed Gas Association Pamphlets P-1, P-14, and safety
bulletin SB-2.
Use only in well-ventilated areas. Stationary customer site vessels should be operated in accordance with the
manufacturer鈥檚 and BOC instructions. Do not attempt to repair, adjust or in any other way modify the operation
of these vessels. If there is a malfunction or other type of operations problem with the vessel, contact the closest
BOC location immediately for assistance.
Protect cylinders from physical damage. Store in cool, dry, well-ventilated area away from heavily trafficked
areas and emergency exits. DO NOT allow the temperature where cylinders are stored to exceed 125oF (52oC).
Cylinders should be stored upright and firmly secured to prevent falling or being knocked over. Full and empty
cylinders should be segregated. Use a "first in- first out" inventory system to prevent full cylinders from being
stored for excessive periods of time.
Valve protection caps must remain in place unless container is secured with valve outlet piping to use point.
Close valve after each use and when the container is empty. Do not drag, slide or roll cylinders on their sides.
Use a suitable hand truck for container movement. Use a pressure reducing regulator when connecting container
MSDS: G-198
Revised: 6/11/96 Page 4 of 17
PRODUCT NAME: SILANE IN HYDROGEN (5 PPM TO 15%)
to piping or systems. Do not use gas directly from container. Do not heat container by any means to increase
the discharge rate of product from the container.
Never carry a compressed gas cylinder or a container of a gas in cryogenic liquid form in an enclosed space such
as a car trunk, van or station wagon. A leak can result in a fire, explosion, asphyxiation or a toxic exposure.
8. Exposure Controls, Personal Protection
EXPOSURE LIMITS1:
2 3
INGREDIENT % VOLUME LD50 or LC50
PEL-OSHA TLV-ACGIH
Route/Species
Silicon Tetrahydride 0.0005 to 15.0 Not Available 5 ppm TWA LC50
FORMULA: SiH4 9600 ppm/4H
CAS: 7803-62-5 (rat)
RTECS #: VV1400000
Hydrogen Balance Simple Asphyxiant Simple Asphyxiant Not Available
FORMULA: H2
CAS: 1333-74-0
RTECS #: MW8900000
1
Refer to individual state of provincial regulations, as applicable, for limits which may be more stringent than
those listed here.
2
As stated in 29 CFR 1910, Subpart Z (revised July 1, 1993)
3
As stated in the ACGIH 1994-1995 Threshold Limit Values for Chemical Substances and Physical Agents.
ENGINEERING CONTROLS:
Use local exhaust ventilation to reduce concentrations to within current exposure limits. A laboratory type hood
is suitable for handling small or limited quantities. Use general area ventilation to maintain oxygen levels above
19.5% by volume minimum.
EYE/FACE PROTECTION:
Safety goggles or glasses.
SKIN PROTECTION:
Protective gloves: neoprene, butyl rubber, PVC, polyethylene. Protective gloves made of any suitable material.
RESPIRATORY PROTECTION:
Level C respiratory protection with full-face piece equipped with an escape bottle or a self contained breathing
apparatus should be available for emergency use. Operate this equipment in the positive pressure demand mode.
Air purifying respirators must be equipped with suitable cartridges. Do not exceed maximum use
concentrations. Do not use air purifying respirators in an oxygen deficient/immediately dangerous to life and
health (IDLH) atmosphere. Consult manufacturer鈥檚 instructions before use.
OTHER/GENERAL PROTECTION:
Safety shoes, safety shower and eyewash.
MSDS: G-198
Revised: 6/11/96 Page 5 of 17
PRODUCT NAME: SILANE IN HYDROGEN (5 PPM TO 15%)
9. Physical and Chemical Properties
PARAMETER VALUE UNITS
Physical state (gas, liquid, solid) : Gas
Vapor pressure : supercritical*
Vapor density at 0 oC(Air = 1) : 0.07*
Evaporation point : Not Available
o
Boiling point : -432.2* F
o
: -252.8* C
o
Freezing point : -434.8* F
o
: -259.2* C
pH : Not Available
Specific gravity) : Not Available
Oil/water partition coefficient : Not Available
Solubility (H20) : Slight
Odor threshold : Not Available
Odor and appearance : Colorless gas with repulsive odor
*Values are for Hydrogen
10. Stability and Reactivity
STABILITY:
Stable
INCOMPATIBLE MATERIALS:
Concentrations greater than 3 molar percent are spontaneously combustible in air. Reacts with bases, halogens
and other oxidizing agents. Lithium metal will burn in hydrogen atmosphere. Hydrogen reacts violently with
fluorine.
HAZARDOUS DECOMPOSITION PRODUCTS:
Silicon and hydrogen at 788oF (420oC).
HAZARDOUS POLYMERIZATION:
Will not occur.
11. Toxicological Information
Inhalation of low concentrations (less than 1 molar percent) of silane so that spontaneous ignition does not occur
could react with basic solutions in the body liberating silicates and hydrogen.
12. Ecological Information
No data given.
MSDS: G-198
Revised: 6/11/96 Page 6 of 17
PRODUCT NAME: SILANE IN HYDROGEN (5 PPM TO 15%)
13. Disposal Considerations
Do not attempt to dispose of residual waste or unused quantities. Return in the shipping container PROPERLY
LABELED, WITH ANY VALVE OUTLET PLUGS OR CAPS SECURED AND VALVE PROTECTION CAP
IN PLACE to BOC Gases or authorized distributor for proper disposal.
14. Transport Information
PARAMETER United States DOT Canada TDG
Compressed gases, flammable, n.o.s. Compressed gases, flammable, n.o.s.
PROPER SHIPPING NAME:
(Silane in Hydrogen) (Silane in Hydrogen)
2.1 2.1
HAZARD CLASS:
UN 1954 UN 1954
IDENTIFICATION NUMBER:
FLAMMABLE GAS FLAMMABLE GAS
SHIPPING LABEL:
15. Regulatory Information
Silane and hydrogen are listed under the accident prevention provisions of section 112(r) of the Clean Air Act
(CAA) with a threshold quantity(TQ) of 10,000 pounds.
SARA TITLE III NOTIFICATIONS AND INFORMATION
SARA TITLE III - HAZARD CLASSES:
Acute Health Hazard
Fire Hazard
Sudden Release of Pressure Hazard
Reactivity Hazard
16. Other Information
Compressed gas cylinders shall not be refilled without the express written permission of the owner. Shipment of
a compressed gas cylinder which has not been filled by the owner or with his/her (written) consent is a violation
of transportation regulations.
DISCLAIMER OF EXPRESSED AND IMPLIED WARRANTIES:
Although reasonable care has been taken in the preparation of this document, we extend no warranties and make
no representations as to the accuracy or completeness of the information contained herein, and assume no
responsibility regarding the suitability of this information for the user鈥檚 intended purposes or for the
consequences of its use. Each individual should make a determination as to the suitability of the information for
their particular purpose(s).
MSDS: G-198
Revised: 6/11/96 Page 7 of 17
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