MATERIAL SAFETY DATA SHEET
PRODUCT NAME: DICHLOROSILANE
1. Chemical Product and Company Identification
BOC Gases, BOC Gases
Division of Division of
The BOC Group, Inc. BOC Canada Limited
575 Mountain Avenue 5975 Falbourne Street, Unit 2
Murray Hill, NJ 07974 Mississauga, Ontario L5R 3W6
TELEPHONE NUMBER: (908) 464-8100 TELEPHONE NUMBER: (905) 501-1700
24-HOUR EMERGENCY TELEPHONE NUMBER: 24-HOUR EMERGENCY TELEPHONE NUMBER:
CHEMTREC (800) 424-9300 (905) 501-0802
EMERGENCY RESPONSE PLAN NO: 20101
PRODUCT NAME: DICHLOROSILANE
CHEMICAL NAME: Dichlorosilane
COMMON NAMES/SYNONYMS: Not Available
TDG (Canada) CLASSIFICATION: 2.3 (2.1)
WHMIS CLASSIFICATION: A, D1A, E, F, B6
PREPARED BY: Loss Control (908)464-8100/(905)501-1700
PREPARATION DATE: 6/1/95
REVIEW DATES: 6/7/96
2. Composition, Information on Ingredients
PEL-OSHA1 TLV-ACGIH2
INGREDIENT % VOLUME LD50 or LC50
Route/Species
Dichlorosilane > 98 Not Available Not Available Not Available
FORMULA: SiH2Cl2
CAS: 4109-96-0
RTECS #: Not Available
1
As stated in 29 CFR 1910, Subpart Z (revised July 1, 1993)
2
As stated in the ACGIH 1994-95 Threshold Limit Values for Chemical Substances and Physical Agents
3. Hazards Identification
EMERGENCY OVERVIEW
Corrosive and irritating to the eyes, skin, and mucous membranes. Inhalation may result in chemical
pneumonitis and pulmonary edema. Highly flammable.
ROUTE OF ENTRY:
Skin Contact Skin Absorption Eye Contact Inhalation Ingestion
Yes No Yes Yes Yes
MSDS: G-27
Revised: 6/7/96 Page 1 of 6
PRODUCT NAME: DICHLOROSILANE
HEALTH EFFECTS:
Exposure Limits Irritant Sensitization
No Yes No
Teratogen Reproductive Hazard Mutagen
No No No
Synergistic Effects
None Reported
Carcinogenicity: -- NTP: No IARC: No OSHA: No
EYE EFFECTS:
Dichlorosilane is irritating and corrosive to all living tissue. It hydrolyzes very rapidly in water or with the
moisture in the air yielding hydrochloric acid. Contact with the eyes may result in burns and mucosal irritation
like that from exposure to hydrochloric acid. Burns to the eyes result in lesions and possible loss of vision.
PERSONS WITH POTENTIAL EXPOSURE SHOULD NOT WEAR CONTACT LENSES.
SKIN EFFECTS:
Dichlorosilane is irritating and corrosive to all living tissue. Skin burns and mucosal irritation are like that from
exposure to hydrochloric acid. Hydrochloric acid burns exhibit severe pain, redness, possible swelling and early
necrosis.
INGESTION EFFECTS:
None known. Ingestion is unlikely.
INHALATION EFFECTS:
Corrosive and irritating to the upper and lower respiratory tracts. It hydrolyzes very rapidly in water or with
moisture in air, yielding hydrogen chloride. Symptoms include lacrymation, cough, labored breathing and
excessive salivary and sputum formation. Excessive irritation of the lungs causes acute pneumonitis and
pulmonary edema which could be fatal.
NFPA HAZARD CODES HMIS HAZARD CODES RATINGS SYSTEM
Health: 3 Health: 3 0 = No Hazard
Flammability: 4 Flammability: 4 1 = Slight Hazard
Reactivity: 2 Reactivity: 2 2 = Moderate Hazard
WATER REACTIVE 3 = Serious Hazard
4 = Severe Hazard
4. First Aid Measures
EYES:
Flush contaminated eye(s) with copious quantities of water. Part eyelids to assure complete flushing. Continue
for a minimum of 30 minutes. Seek immediate medical attention.
SKIN:
Flush affected area with copious quantities of water. Remove affected clothing as rapidly as possible. Seek
immediate medical attention.
INGESTION:
None normally required.
INHALATION:
MSDS: G-27
Revised: 6/7/96 Page 2 of 6
PRODUCT NAME: DICHLOROSILANE
PROMPT MEDICAL ATTENTION IS MANDATORY IN ALL CASES OF OVEREXPOSURE. RESCUE
PERSONNEL SHOULD BE EQUIPPED WITH SELF-CONTAINED BREATHING APPARATUS AND BE
COGNIZANT OF EXTREME FIRE AND EXPLOSION HAZARD. Conscious person should be assisted to an
uncontaminated area and inhale fresh air. Unconscious persons should be moved to an uncontaminated area and
given mouth-to-mouth resuscitation and supplemental oxygen. Keep the victim warm and quiet. Assure that
mucous or vomited material does not obstruct the airway by positional drainage. Delayed pulmonary edema
may occur. Keep patient under medical observation for at least 24 hours.
5. Fire Fighting Measures
Conditions of Flammability: Flammable Liquid or Vapor
Flash point: Method: Autoignition:
0 oF (-18 oC) Temperature: 212 oF (100 oC)
Closed Cup
LEL(%): 4.1 UEL(%): 98.8
Hazardous combustion products: Silicon and Chlorine Compounds
Sensitivity to mechanical shock: Not Available
Sensitivity to static discharge: Not Available
FIRE AND EXPLOSION HAZARDS:
Recognize the potential for ground (water) contamination with hydrochloric acid following a dichlorosilane fire
which has been "extinguished" with water. Dichlorosilane may generate toxic vapors in moist air.
EXTINGUISHING MEDIA:
Carbon dioxide or dry chemical for small fires. Coarse water spray on large fires.
FIRE FIGHTING INSTRUCTIONS:
A coarse water spray should be used on large fires since the hydrolysis reaction to HCl is more rapid than the
combustion reaction.
6. Accidental Release Measures
Evacuate all personnel from affected area. Use appropriate protective equipment. If leak is in user鈥檚 equipment,
be certain to purge piping with inert gas prior to attempting repairs. If leak is in container or container valve,
contact the appropriate emergency telephone number listed in Section 1 or call your closest BOC location.
7. Handling and Storage
Electrical Classification:
Not specified.
Earth-ground and bond on all lines and equipment associated with the system. Electrical equipment should be
non-sparking or explosion proof. Compressed electrical equipment should be non-sparking or explosion proof.
Any materials suitable for use with anhydrous hydrogen chloride may be used. Systems and equipment must be
scrupulously dry.
Use only in well-ventilated areas. Valve protection caps must remain in place unless container is secured with
valve protection outlet piped to use point. Do not drag, slide or roll cylinders. Use a suitable hand truck for
cylinder movement. Use a pressure reducing regulator when connecting cylinder to lower pressure (< 150 psig)
MSDS: G-27
Revised: 6/7/96 Page 3 of 6
PRODUCT NAME: DICHLOROSILANE
piping or systems. Do not heat cylinder by any means to increase the discharge rate of product from the
cylinder. Use a check valve or trap in the discharge line to prevent hazardous back flow into the cylinder.
Protect cylinders from physical damage. Store in cool, dry, well-ventilated area of non-combustible construction
away from heavily trafficked areas and emergency exits. Do not allow the temperature where cylinders are
stored to exceed 125oF (52oC). Cylinders should be stored upright and firmly secured to prevent falling or being
knocked over. Use a "first in-first out" inventory system to prevent full cylinders being stored for excessive
periods of time. Post "NO SMOKING OR OPEN FLAMES" signs in the storage area or use area. There should
be no sources of ignition in the storage of use area.
Never carry a compressed gas cylinder or a container of a gas in cryogenic liquid form in an enclosed space
such as a car trunk, van or station wagon. A leak can result in a fire, explosion, asphyxiation or a toxic
exposure.
8. Exposure Controls, Personal Protection
EXPOSURE LIMITS1:
PEL-OSHA2 TLV-ACGIH3
INGREDIENT % VOLUME LD50 or LC50
Route/Species
Dichlorosilane > 98 Not Available Not Available Not Available
FORMULA: SiH2Cl2
CAS: 4109-96-0
RTECS #: Not Available
1
Refer to individual state of provincial regulations, as applicable, for limits which may be more stringent than
those listed here.
2
As stated in 29 CFR 1910, Subpart Z (revised July 1, 1993)
3
As stated in the ACGIH 1994-1995 Threshold Limit Values for Chemical Substances and Physical Agents.
ENGINEERING CONTROLS:
Hood with forced ventilation. Local exhaust to prevent accumulation above the exposure limit.
EYE/FACE PROTECTION:
Safety goggles or glasses.
SKIN PROTECTION:
Natural rubber, PVC or polyethylene (low density).
RESPIRATORY PROTECTION:
Positive pressure air line with full-face mask and escape bottle or self-contained breathing apparatus should be
available for emergency use.
OTHER/GENERAL PROTECTION:
Safety shoes, safety shower, eyewash "fountain", face shield.
MSDS: G-27
Revised: 6/7/96 Page 4 of 6
PRODUCT NAME: DICHLOROSILANE
9. Physical and Chemical Properties
PARAMETER VALUE UNITS
Physical state (gas, liquid, solid) : Liquid
Vapor pressure @ 70 oF : 22.5 psia
Vapor density (Air = 1) : 3.48
Evaporation point : Not Available
o
Boiling point : 47.1 F
o
C
: 8.4
o
Freezing point : -188 F
o
: -122 C
pH : Not Available
Specific gravity : Not Available
Oil/water partition coefficient : Not Available
Solubility (H20) : Hydrolyzes
Odor threshold : Not Available
Odor and appearance : An acidic, irritating odor; A colorless gas shipped
as a liquid under its own pressure.
10. Stability and Reactivity
STABILITY:
Stable
INCOMPATIBLE MATERIALS:
Reacts vigorously with water or moist air yielding hydrogen chloride. It is also flammable in air over a very
wide range. Avoid contact with oxidizers.
HAZARDOUS DECOMPOSITION PRODUCTS:
Hydrogen chloride, hydrogen, chlorine and finely divided amorphous silica.
CONDITIONS TO AVOID (POLYMERIZATION):
Uncontrolled release in air will ignite.
HAZARDOUS POLYMERIZATION:
Will not occur.
11. Toxicological Information
No data given in the Registry of Toxic Effects of Chemical Substances (RTECS) or Sax, Dangerous Properties
of Industrial Materials, 7th ed.
12. Ecological Information
No data given.
13. Disposal Considerations
MSDS: G-27
Revised: 6/7/96 Page 5 of 6
PRODUCT NAME: DICHLOROSILANE
Do not attempt to dispose of residual waste or unused quantities. Return in the shipping container PROPERLY
LABELED, WITH ANY VALVE OUTLET PLUGS OR CAPS SECURED AND VALVE PROTECTION CAP
IN PLACE to BOC Gases or authorized distributor for proper disposal.
14. Transport Information
PARAMETER United States DOT Canada TDG
Dichlorosilane Dichlorosilane
PROPER SHIPPING NAME:
2.3 2.3 (2.1)
HAZARD CLASS:
UN 2189 UN 2189
IDENTIFICATION NUMBER:
POISON GAS, FLAMMABLE GAS, POISON GAS, FLAMMABLE GAS,
SHIPPING LABEL:
CORROSIVE CORROSIVE
Additional Marking Requirement: 鈥淚nhalation Hazard鈥?
Additional Shipping Paper Description Requirement: 鈥淧oison-Inhalation Hazard, Zone B鈥?
15. Regulatory Information
Dichlorosilane is listed under the accident prevention provisions of section 112(r) of the Clean Air Act (CAA)
with a Threshold Quantity (TQ) of 10,000 pounds.
SARA TITLE III - HAZARD CLASSES:
Acute Health Hazard
Fire Hazard
Reactivity Hazard
16. Other Information
Compressed gas cylinders shall not be refilled without the express written permission of the owner. Shipment of
a compressed gas cylinder which has not been filled by the owner or with his/her (written) consent is a
violation of transportation regulations.
DISCLAIMER OF EXPRESSED AND IMPLIED WARRANTIES:
Although reasonable care has been taken in the preparation of this document, we extend no warranties and make
no representations as to the accuracy or completeness of the information contained herein, and assume no
responsibility regarding the suitability of this information for the user's intended purposes or for the
consequences of its use. Each individual should make a determination as to the suitability of the information for
their particular purpose(s).
MSDS: G-27
Revised: 6/7/96 Page 6 of 6
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