MATERIAL SAFETY DATA SHEET
PRODUCT NAME: PHOSPHINE IN SILANE AND ARGON
1. Chemical Product and Company Identification
BOC Gases, BOC Gases,
Division of Division of
The BOC Group, Inc. BOC Canada Limited
575 Mountain Avenue 5975 Falbourne St., Unit 2
Murray Hill, NJ 07974 Mississauga, Ontario L5R 3W6
TELEPHONE NUMBER: (908)464-8100 TELEPHONE NUMBER: (905)501-1700
24-HOUR EMERGENCY TELEPHONE NUMBER: 24-HOUR EMERGENCY TELEPHONE NUMBER:
CHEMTREC (800)424-9300 (905)501-0802
EMERGENCY RESPONSE PLAN NO: 20101
PRODUCT NAME: PHOSPHINE IN SILANE AND ARGON
CHEMICAL NAME: Phosphine in Silane and Argon
COMMON NAMES/SYNONYMS: Not Applicable
TDG CLASSIFICATION: 2.3 (2.1)
WHMIS CLASSIFICATION: A, D1A, D2B, B6
PREPARED BY: Loss Control (908)464-8100/(905)501-1700
PREPARATION DATE: 6/1/95
REVIEW DATES: 6/12/96
2. Composition, Information on Ingredients
PEL-OSHA1 TLV-ACGIH2
INGREDIENT % VOLUME LD50 or LC50
Route/Species
Phosphine 1 to 10 0.3 ppm TWA 0.3 ppm TWA LC50
FORMULA: PH3 1 ppm STEL 11 ppm/4H
CAS: 7803-51-2 (rat)
RTECS #: SY7525000
Silane 21 Not Available 5 ppm TWA LC50
FORMULA: SiH4 9600 ppm/4H
CAS: 7803-62-5 (rat)
RTECS #: VV1400000
Argon Balance Simple Asphyxiant Simple Asphyxiant Not Available
FORMULA: Ar
CAS: 7440-37-1
RTECS #: CF2300000
3. Hazards Identification
EMERGENCY OVERVIEW
Poison. Flammable. Irritating to the eyes, skin and mucous membranes. Inhalation may result in
pulmonary edema. Phosphine is a central nervous system depressant and toxic to the kidneys.
Hydrolysis of silane inside of body tissues may produce silicic acid. This product may spontaneously
combust in air.
ROUTE OF ENTRY:
Skin Contact Skin Absorption Eye Contact Inhalation Ingestion
Yes No Yes Yes No
MSDS: G-202
Revised: 6/12/96 Page 1 of 7
PRODUCT NAME: PHOSPHINE IN SILANE AND ARGON
HEALTH EFFECTS:
Exposure Limits Irritant Sensitization
Yes Yes No
Teratogen Reproductive Hazard Mutagen
No No No
Synergistic Effects
Other agents that may irritate the respiratory system or depress the central nervous system
Carcinogenicity: -- NTP: No IARC: No OSHA: No
EYE EFFECTS:
Contact may form silicic acid and cause irritation.
SKIN EFFECTS:
Contact may cause irritation, pain, and burning.
INGESTION EFFECTS:
Since product is a gas at room temperature, ingestion is unlikely. Consult a physician for treatment. Contact
may form silicic acid causing irritation.
INHALATION EFFECTS:
Symptoms of silane inhalation are not well defined. It has been reported that breathing this gas may cause
headache or nausea. The hydrolysis of silane in the body tissues would form silicic acid or hydrated silica.
Inhalation of low concentrations (less than 1 molar percent) of silane so that spontaneous ignition does not occur
could react with basic solutions in the body liberating silicates and hydrogen.
Inhalation of phosphine may cause coughing, shortness of breath, wheezing, increased bronchial secretions,
pulmonary edema, weakness, fatigue, headache, dizziness, fainting, drowsiness, tremors, disturbances of gait,
convulsions, and coma. Abdominal pain, thirst, nausea, and vomiting may also occur. Severe exposures may be
lethal.
NFPA HAZARD CODES HMIS HAZARD CODES RATINGS SYSTEM
Health: 4 Health: 4 0 = No Hazard
Flammability: 4 Flammability: 4 1 = Slight Hazard
Reactivity: 2 Reactivity: 2 2 = Moderate Hazard
3 = Serious Hazard
4 = Severe Hazard
4. First Aid Measures
EYES:
In case of eye contact, immediately flush with low pressure, cool water for at least 15 minutes, opening eyelids
to ensure flushing. Get immediate medical attention.
MSDS: G-202
Revised: 6/12/96 Page 2 of 7
PRODUCT NAME: PHOSPHINE IN SILANE AND ARGON
SKIN:
Flush affected areas immediately with large quantities of water. Then wash thoroughly with soap and water.
Consult a physician if irritation develops.
INGESTION:
Rinse affected area with water. Give water by mouth to dilute. Never give anything by mouth to an unconscious
person. Call your local poison control center for advice, giving identity of chemical. DO NOT INDUCE
VOMITING! CALL POISON CONTROL CENTER FOR ADVICE.
INHALATION:
PROMPT MEDICAL ATTENTION IS MANDATORY IN ALL CASES OF OVEREXPOSURE. RESCUE
PERSONNEL SHOULD BE EQUIPPED WITH SELF-CONTAINED BREATHING APPARATUS AND BE
AWARE OF EXTREME FIRE AND EXPLOSION HAZARD. Conscious persons should be assisted to an
uncontaminated area and inhale fresh air. Quick removal from the contaminated area is most important.
Unconscious persons should be moved to an uncontaminated area, given artificial resuscitation and supplemental
oxygen. Medical assistance should be sought immediately. Treatment should be symptomatic and supportive.
5. Fire Fighting Measures
Conditions of Flammability: May spontaneously combust at room temperature in air
Flash point: Method: Autoignition
Not Available Not Applicable Temperature: Not Available
LEL(%): Not Available UEL(%): Not Available
Hazardous combustion products: Silicon and phosphorus compounds
Sensitivity to mechanical shock: Not Available
Sensitivity to static discharge: Not Available
FIRE AND EXPLOSION HAZARDS:
Spontaneously combustible (pyrophoric). Both silane and dry phosphine are spontaneously combustible at room
temperature. Although, at low concentrations silane may be released without burning. Releases of higher
concentrations may result in the potential for a subsequent fire or explosion hazard.
EXTINGUISHING MEDIA:
Use water spray to cool surrounding containers. Inerting the atmosphere to reduce oxygen levels may extinguish
flame, allowing capping of leaking container. Do not attempt this unless specifically trained.
FIRE FIGHTING INSTRUCTIONS:
If possible, shut off the source of gas if safe to do so. Fire fighters should use self-contained breathing apparatus
and full turnout gear. Use water spray to cool fire fighters.
Phosphorus pentoxide and phosphoric acid may be formed from thermal decomposition. Control water runoff to
prevent environmental contamination.
In some cases, it may be safer to allow the fire to burn itself out.
6. Accidental Release Measures
Do not attempt to dispose of residual waste or unused quantities. Return in the shipping container PROPERLY
LABELED, WITH ANY VALVE OUTLET PLUGS OR CAPS SECURED AND VALVE PROTECTION CAP
IN PLACE to BOC Gases or authorized distributor for proper disposal.
7. Handling and Storage
MSDS: G-202
Revised: 6/12/96 Page 3 of 7
PRODUCT NAME: PHOSPHINE IN SILANE AND ARGON
Earth ground and bond all lines and equipment associated with the system. Electrical equipment should be non-
sparking or explosion-proof.
For additional storage recommendations, consult Compressed Gas Association Pamphlets P-1, P-14, and Safety
Bulletin SB-2.
Use only in well-ventilated areas. Stationary customer site vessels should be operated in accordance with the
manufacturer鈥檚 and BOC instructions. Do not attempt to repair, adjust or in any other way modify the operation
of these vessels. If there is a malfunction or other type of operations problem with the vessel, contact the closest
BOC location immediately for assistance.
Protect cylinders from physical damage. Store in cool, dry, well-ventilated area away from heavily trafficked
areas and emergency exits. DO NOT allow the temperature where cylinders are stored to exceed 125oF (52oC).
Cylinders should be stored upright and firmly secured to prevent falling or being knocked over. Full and empty
cylinders should be segregated. Use a "first-in, first-out" inventory system to prevent full cylinders from being
stored for excessive periods of time. Valve protection caps must remain in place unless container is secured
with valve outlet piping to use point. Close valve after each use and when the container is empty. Do not drag,
slide or roll cylinders on their sides. Use a suitable hand truck for container movement. Use a pressure reducing
regulator when connecting container to piping or systems. Do not use gas directly from container. Do not heat
container by any means to increase the discharge rate of product from the container.
Never carry a compressed gas cylinder or a container of a gas in cryogenic liquid form in an enclosed space such
as a car trunk, van or station wagon. A leak can result in a fire, explosion, asphyxiation or a toxic exposure.
8. Exposure Controls, Personal Protection
EXPOSURE LIMITS1:
2 3
INGREDIENT % VOLUME LD50 or LC50
PEL-OSHA TLV-ACGIH
Route/Species
Phosphine 1 to 10 0.3 ppm TWA 0.3 ppm TWA LC50
FORMULA: PH3 1 ppm STEL 11 ppm/4H
CAS: 7803-51-2 (rat)
RTECS #: SY7525000
Silane 21 Not Available 5 ppm TWA LC50
FORMULA: SiH4 9600 ppm/4H
CAS: 7803-62-5 (rat)
RTECS #: VV1400000
Argon Balance Simple Asphyxiant Simple Asphyxiant Not Available
FORMULA: Ar
CAS: 7440-37-1
RTECS #: CF2300000
1
Refer to individual state of provincial regulations, as applicable, for limits which may be more stringent than
those listed here.
2
As stated in 29 CFR 1910, Subpart Z (revised July 1, 1993)
3
As stated in the ACGIH 1994-1995 Threshold Limit Values for Chemical Substances and Physical Agents.
IDLH (Phosphine): 200 ppm
ENGINEERING CONTROLS:
Use local exhaust ventilation to reduce concentrations to within current exposure limits. A laboratory type hood
is suitable for handling small or limited quantities.
EYE/FACE PROTECTION:
Safety goggles or glasses.
SKIN PROTECTION:
MSDS: G-202
Revised: 6/12/96 Page 4 of 7
PRODUCT NAME: PHOSPHINE IN SILANE AND ARGON
Protective gloves: neoprene, butyl rubber, PVC, polyethylene.
RESPIRATORY PROTECTION:
An airline respirator with full face piece equipped with an escape bottle or a self-contained breathing apparatus
should be available for emergency use.
OTHER/GENERAL PROTECTION:
Safety shoes, safety shower and eyewash.
9. Physical and Chemical Properties
PARAMETER* VALUE UNITS
Physical state (gas, liquid, solid) : Gas
Vapor pressure : Not Available
Vapor density (Air = 1) : Not Available
Evaporation point : Not Available
o
Boiling point : -170 F
o
C
: -112
o
Freezing point : -301 F
o
: -185 C
pH : Not Applicable
Specific gravity at STP : 1.1
Oil/water partition coefficient : Not Available
Solubility (H20) : Negligible
Odor threshold : Not Available
Odor and appearance : Colorless gas with a repulsive odor. Smell may
resemble rotten fish.
*Note: The above data are for Silane
10. Stability and Reactivity
STABILITY:
Stable
INCOMPATIBLE MATERIALS:
Air, bases, halogens, oxygen, nitric acid, chromium oxychloride, silver nitrate, mercuric nitrate, nitrogen
trichloride and other oxidizing agents.
HAZARDOUS DECOMPOSITION PRODUCTS:
Silicon, phosphorus, and hydrogen at high temperatures.
HAZARDOUS POLYMERIZATION:
Will not occur.
11. Toxicological Information
MUTAGENIC:
Unspecified effects reported in human cell culture assay (RTECs).
MSDS: G-202
Revised: 6/12/96 Page 5 of 7
PRODUCT NAME: PHOSPHINE IN SILANE AND ARGON
OTHER:
Phosphine is toxic to the kidneys. Exposure may result in albuminuria and hematuria. Chronic phosphine
exposure may result in disturbances of sight, speech and motor funtions. Other manifestations of phophorus
poisoning may occur, including skeletal injury.
12. Ecological Information
OTHER ENVIRONMENTAL INFORMATION This product does NOT contain any ingredients which are
regulated on the U.S. EPA List of Toxic Chemicals (40 CFR 372), and is therefore not subject to release
reporting under Section 313 of EPCRA/SARA Title III.
13. Disposal Considerations
Do not attempt to dispose of residual waste or unused quantities. Return in the shipping container PROPERLY
LABELED, WITH ANY VALVE OUTLET PLUGS OR CAPS SECURED AND VALVE PROTECTION CAP
IN PLACE to BOC Gases or authorized distributor for proper disposal.
14. Transport Information
PARAMETER United States DOT Canada TDG
Compressed gases, flammable , toxic, n.o.s. Compressed gases, flammable , toxic, n.o.s
PROPER SHIPPING NAME:
(Silane, Phosphine, Argon) .(Silane, Phosphine, Argon)
2.3 2.3 (2.1)
HAZARD CLASS:
UN 1953 UN 1953
IDENTIFICATION NUMBER:
POISON GAS, FLAMMABLE GAS POISON GAS, FLAMMABLE GAS
SHIPPING LABEL:
Additional Marking Requirement: 鈥淚nhalation Hazard鈥?
Additional Shipping Paper Description Requirement: 鈥淧oison Inhalation Hazard, Zone A, B or C鈥?
depending on concentration of phosphine as follows:
Zone A (Phosphine > 10%),
Zone B (10% > Phosphine > 2%),
Zone C (2% > Phosphine > 6700 ppm)
15. Regulatory Information
SARA TITLE III NOTIFICATIONS AND INFORMATION
SARA TITLE III - HAZARD CLASSES:
Acute Health Hazard
Chronic Health Hazard
Fire Hazard
Sudden Release of Pressure Hazard
Reactivity Hazard
16. Other Information
Compressed gas cylinders shall not be refilled without the express written permission of the owner. Shipment of
a compressed gas cylinder which has not been filled by the owner or with his/her (written) consent is a
violation of transportation regulations.
MSDS: G-202
Revised: 6/12/96 Page 6 of 7
PRODUCT NAME: PHOSPHINE IN SILANE AND ARGON
DISCLAIMER OF EXPRESSED AND IMPLIED WARRANTIES:
Although reasonable care has been taken in the preparation of this document, we extend no warranties and make
no representations as to the accuracy or completeness of the information contained herein, and assume no
responsibility regarding the suitability of this information for the user鈥檚 intended purposes or for the
consequences of its use. Each individual should make a determination as to the suitability of the information for
their particular purpose(s).
MSDS: G-202
Revised: 6/12/96 Page 7 of 7
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