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MSDS Material Safety Data Sheet
CAS

7783-82-6

File Name: airgas_com---001080.asp
                                                                                                                       NFPA RATING
FLAMMABILITY



0


MATERIAL SAFETY DATA SHEET 2
4
HEALTH REACTIVITY


to U.S. OSHA, CMA, ANSI and Canadian WHMIS Standards
Prepared W
OTHER




PART I What is the material and what do I need to know in an emergency?

1. PRODUCT IDENTIFICATION
CHEMICAL NAME; CLASS: TUNGSTEN HEXAFLUORIDE - F6W (FW6)
Document Number: 001080
PRODUCT USE: For general analytical/synthetic chemical uses.

SUPPLIER/MANUFACTURER'S NAME: AIRGAS INC.
ADDRESS: 259 N. Radnor-Chester Road
Suite 100
Radnor, PA 19087-5283
BUSINESS PHONE: 1-610-687-5253
EMERGENCY PHONE: CHEMTREC: 1-800-424-9300
International: 703-527-3887 (Call Collect)
DATE OF PREPARATION: May 17, 1998

2. COMPOSITION and INFORMATION ON INGREDIENTS

CHEMICAL NAME CAS # mole % EXPOSURE LIMITS IN AIR
ACGIH OSHA
OTHER
TLV STEL PEL STEL IDLH
ppm ppm ppm ppm ppm
Tungsten Hexafluoride 7783-82-6 > 99% For F: 2.5, For W: For F: NE NIOSH REL:
3 2.5 For F:
A4
3
TWA = 2.5 mg/m
The following (Not
For W: 1 For W: 3
exposure limits are for Classifiable For W:
(Vacated
fluorides (as F) and for as a Human (Vacated TWA = 1
1989
tungsten, soluble Carcinogen) 1989 PEL) STEL = 3
PEL)
compounds (as W)
DFG MAK:
For W: 1
For F:
3
TWA = 2.5 mg/m
Maximum Impurities < 1% None of the trace impurities in this product contribute significantly to the hazards
associated with the product. All hazard information pertinent to this product has been
provided in this Material Safety Data Sheet, per the requirements of the OSHA Hazard
Standard (29 CFR 1910.1200) and State equivalents standards.

NE = Not Established See Section 16 for Definitions of Terms Used.
NOTE: All WHMIS required information is included. It is located in appropriate sections based on the ANSI Z400.1-1993 format.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 1 OF 10
3. HAZARD IDENTIFICATION

EMERGENCY OVERVIEW: Tungsten Hexafluoride is an extremely toxic, corrosive, water-reactive, colorless,
odorless, non-flammable gas, or pale-yellow liquid. Tungsten Hexafluoride is a powerful, corrosive irritant to skin, eyes
and mucous membranes. Contact by all routes of exposure can lead to burns. The on-set of over-exposure symptoms
may be delayed. Inhalation over-exposure to Tungsten Hexafluoride can lead to potentially fatal lung disorders. If
involved in a fire Tungsten Hexafluoride will decompose to produce toxic fumes of fluorides. Tungsten Hexafluoride
hydrolyzes very rapidly and violently, yielding hydrofluoric acid and tungsten oxyfluorides. Persons who respond to
releases of this product must protect themselves from inhalation of the Tungsten Hexafluoride gas and mists, especially
in areas which are downwind of the release. Extreme caution must be used when responding to releases.

SYMPTOMS OF OVEREXPOSURE BY ROUTE OF EXPOSURE:
HAZARDOUS MATERIAL INFORMATION SYSTEM
Tungsten Hexafluoride is toxic by all routes of over-exposure. Symptoms
of exposure by all routes of exposure may be delayed.
INHALATION: Inhalation of Tungsten Hexafluoride can cause severe
HEALTH (BLUE) 4
health effects, even at relatively low concentrations. This gas causes
severe irritation of the nose and throat. Other symptoms of over-
exposure to Tungsten Hexafluoride gas include coughing, excessive
salivary and sputum formation, labored breathing, and sore throat. In
FLAMMABILITY
some instances, unconsciousness and potentially fatal lung disorders (RED) 0
(e.g., chemical pneumonitis and pulmonary edema) may occur.
Symptoms of pulmonary edema can be delayed. Severe inhalation
over-exposures can lead to hypocalcemia, a life-threatening lowering
of serum calcium in the body, due to the formation of fluorides upon
REACTIVITY (YELLOW) 2
contact with the moisture in the lungs. Inhalation of this gas may be
fatal.
Repeated Tungsten Hexafluoride overexposures by inhalation can
X
PROTECTIVE EQUIPMENT
result in emphysema and erosion of teeth and a condition known as
fluorosis.
CONTACT WITH SKIN or EYES: Contact with the skin is corrosive and EYES HANDS BODY
RESPIRATORY

very irritating, possibly causing burns, due to the formation of
hydrofluoric acid upon contact with moisture in the skin. Direct exposure
SEE SECTION 8
to the skin from the gas or liquid can cause severe burns in seconds. SEE SECTION 8

Burns may not be immediately painful or visible. Depending on the
nature of the exposure, the effects can be immediate or delayed. Burns For routine applications.
caused by hydrofluoric acid can affect subcutaneous tissues, causing
tissues to become blanched and bloodless. Gangrene of affected areas See Section 16 for Definition of Ratings
may follow. Minor contact with the eyes will cause tearing and irritation
as Tungsten Hexafluoride is a lachrymator. Severe over-exposure to
the eyes will cause burns, resulting in blindness.
SKIN ABSORPTION: Tungsten Hexafluoride can decompose upon contact with moisture to form hydrofluoric acid, which
can penetrate the skin, causing destruction of the deep tissue layers, including bone tissue. This damage to the body鈥檚
tissues may continue for days, as the fluoride ion reacts with the calcium in the skin and bone. Severe skin-contact
exposures (especially when the skin contamination exceeds 160 cm2) can lead to hypocalcemia, a life-threatening
lowering of serum calcium in the body.
INGESTION: While ingestion is highly unlikely, ingestion of Tungsten Hexafluoride can damage the tissues of the
mouth, throat, esophagus, and other tissues of the digestive system. Ingestion of Tungsten Hexafluoride can be fatal.
Additionally, aspiration by inhalation is possible, causing chemical pneumonia or death.
HEALTH EFFECTS OR RISKS FROM EXPOSURE: An Explanation in Lay Terms. Overexposure to Tungsten
Hexafluoride may cause the following health effects:
ACUTE: Tungsten Hexafluoride in gas or liquid form is extremely corrosive, and can burn and damage eyes, skin, mucous
membranes, and any other exposed tissue. If inhaled, irritation of the respiratory system may occur, with coughing, and
breathing difficulty. Over-exposure to this gas may cause the extremely dangerous condition of pulmonary edema (an
accumulation of fluid in the lungs) and may be fatal. Though unlikely to occur during occupational use, ingestion of large
quantities may be fatal. Severe exposure to Tungsten Hexafluoride can result in hypocalcemia, which can be fatal unless
treated. Hypocalcemia is possible in all instances of inhalation or ingestion or whenever exposure has caused large areas
of burns.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 2 OF 10
3. HAZARD IDENTIFICATION (Continued)
CHRONIC: Persistent irritation may result from repeated exposures to this gas. Repeated Tungsten Hexafluoride
overexposures by inhalation can result in emphysema and erosion of tooth enamel. Though not anticipated to be a
significant hazard associated with routine use of this gas, chronic ingestion of high concentrations of fluoride
compounds in water supply can cause mottled enamel of teeth and osteosclerosis. Repeated over-exposure can lead
to the condition fluorosis, which is a weakening and degeneration of bone structure. Damage may also occur to the
heart, central nervous system and gastrointestinal system.
TARGET ORGANS: Respiratory system, skin, eyes, skeletal structure, cardiac and central nervous systems..

PART II What should I do if a hazardous situation occurs?
4. FIRST-AID MEASURES
RESCUERS SHOULD NOT ATTEMPT TO RETRIEVE VICTIMS OF EXPOSURE TO TUNGSTEN
HEXAFLUORIDE WITHOUT ADEQUATE PERSONAL PROTECTIVE EQUIPMENT. At a minimum,
Self-Contained Breathing Apparatus and Chemical Resistant Personal Protective equipment
should be worn.
Remove victim(s) to fresh air as quickly as possible. 100% oxygen should be administered to victims of exposure to
Tungsten Hexafluoride as soon as possible. Only trained personnel should administer supplemental oxygen and/or cardio-
pulmonary resuscitation, if necessary.
SKIN EXPOSURE: If Tungsten Hexafluoride gas or liquid contaminates the skin, immediately begin decontamination with
running water. Minimum flushing is for 15 minutes. Calcium gluconate gel should be applied to affected areas. Remove
exposed or contaminated clothing, taking care not to contaminate eyes. Victim must seek immediate medical attention.
EYE EXPOSURE: If liquid is splashed into eyes, or if irritation of the eye develops after exposure to liquid or gas, open
victim's eyes while under gentle running water. Use sufficient force to open eyelids. Have victim "roll" eyes. Minimum
flushing is for 15 minutes. Administer anesthetic eye drops after one minute of flushing if victim suffers from spasms to the
eyes, in order to facilitate irrigation. Ice compresses should be applied when this is not irritating to the victim. An
ophthalmologist should be sought as soon as possible.
Because of the special hazard of fluoride compounds, special treatment procedures are administered to victims of
exposure to Tungsten Hexafluoride. Physicians should refer to Section 11 (Toxicological Information) for specific
recommendations to physicians.
Victim(s) must be taken for medical attention. Rescuers should be taken for medical attention, if necessary. Take copy of
label and MSDS to physician or other health professional with victim(s).

5. FIRE-FIGHTING MEASURES
FLASH POINT: Not applicable. NFPA RATING
AUTOIGNITION TEMPERATURE: Not applicable.
FLAMMABILITY
FLAMMABLE LIMITS (in air by volume, %):
Lower (LEL): Not applicable.
Upper (UEL): Not applicable. 0
FIRE EXTINGUISHING MATERIALS: Use extinguishing agent appropriate
for surrounding materials in a fire. Use water spray to keep fire-exposed 2
4
HEALTH REACTIVITY
containers cool.
UNUSUAL FIRE AND EXPLOSION HAZARDS: Tungsten Hexafluoride is W
very toxic via inhalation and skin contact, and will decompose upon contact
with water to form hydrofluoric acid; therefore, this gas presents an extreme
hazard to fire-fighters. In the event of fire, cool containers of this product
OTHER
with water to prevent failure. Do not direct water directly onto the Tungsten
Hexafluoride release, in order to avoid hazardous decomposition products
when in contact with water. When heated to decomposition, Tungsten
See Section 16 for
Hexafluoride emits toxic fluoride compounds.
Definition of Ratings
Explosion Sensitivity to Mechanical Impact: Not Sensitive.
Explosion Sensitivity to Static Discharge: Not Sensitive.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 3 OF 10
5. FIRE-FIGHTING MEASURES (Continued)
SPECIAL FIRE-FIGHTING PROCEDURES: Incipient fire responders should wear eye protection. Structural fire fighters
must wear Self-Contained Breathing Apparatus and full protective equipment. Chemically-resistant clothing may be
necessary. Move fire-exposed containers if it can be done without risk to firefighters. Decontaminate all equipment used in
fire-response with an appropriate, acid-neutralizing agent. If this product is involved in a fire, run-off water should be
contained to prevent possible environmental damage.

6. ACCIDENTAL RELEASE MEASURES
SPILL AND LEAK RESPONSE: Uncontrolled releases should be responded to by trained personnel using pre-planned
procedures. Proper protective equipment should be used. In case of a large spill, clear the affected area, protect people,
and respond with trained personnel.
Minimum Personal Protective Equipment should be Level A: triple-gloves (rubber gloves and nitrile gloves, over latex
gloves), fully-encapsulating chemically resistant suit and boots, hard-hat, and Self Contained Breathing
Apparatus. Small releases of Tungsten Hexafluoride leaks can be detected by means of an atomizer or squeeze bottle
filled with aqueous ammonia. A white cloud will show the location of the leak. Monitor the surrounding area for
Tungsten Hexafluoride and oxygen levels.
The atmosphere must have at least less than the PEL (PEL = 2.5 mg/m3) of Tungsten Hexafluoride and greater than
19.5 percent oxygen before personnel can be allowed in the area without Self-Contained Breathing Apparatus. Attempt
to close the main source valve prior to entering the area. If this does not stop the release (or it is not possible to reach
the valve), allow the gas to release in place or remove it to a safe area and allow the gas to be released there. If
necessary neutralize areas and items contaminated with hydrofluoric acid mist with sodium bicarbonate or another
neutralizer appropriate for acids. DO NOT USE SAND, CLAY OR OTHER SILICATE-BASED CLEAN-UP MATERIALS.
Decontaminate all equipment used in the response thoroughly.
THIS IS AN EXTREMELY TOXIC, CORROSIVE, WATER-REACTIVE GAS. Protection of all personnel and the area
must be maintained. All responders must be adequately protected from exposure.

PART III How can I prevent hazardous situations from occurring?
7. HANDLING and STORAGE
WORK PRACTICES AND HYGIENE PRACTICES: All areas where Tungsten Hexafluoride is used should be monitored
with very sensitive gas detection instruments. Detection of concentrations below 50% of the PEL (PEL = 2.5 mg/m3)
should trigger immediate response and corrective action. Detection of higher levels should initiate an alarm calling for
evacuation of all personnel with the potential to be exposed. Due to the extreme corrosivity and toxicity of Tungsten
Hexafluoride and hydrofluoric acid which can be generated from this gas, all contaminated clothing should be removed and
placed in a sealed container for proper disposal.
Avoid all contact with this gas. All employees who handle this material should be trained to handle it safely. It is highly
suggested that persons work with Tungsten Hexafluoride in pairs within sight and sound of each other, but in different
areas. Avoid breathing the gas or sprays or mists generated by Tungsten Hexafluoride. Wash hands after handling
chemicals. Do not eat or drink while handling chemicals. All work practices should minimize the release of Tungsten
Hexafluoride.
鈥? Workers who handle Tungsten Hexafluoride should wear protective clothing, as listed in Section 8 (Exposure Controls
and Personal Protection).
鈥? Instant-acting showers should be available in the event of an emergency.
鈥? Special eye-wash fountains or similar equipment should be available for eye irrigation.
鈥? Proper respiratory protection equipment must be provided and workers using such equipment must be carefully trained
in its operation and limitations.
鈥? Precautions must always be taken to prevent suck-back of foreign materials into the cylinder by using a check-valve, or
vacuum break, since suckback may cause dangerous pressure changes within the cylinder.
STORAGE AND HANDLING PRACTICES: Cylinders should be stored in dry, well-ventilated areas away from sources of
heat. Compressed gases can present significant safety hazards. Store containers away from heavily trafficked areas and
emergency exits. Post 鈥淣o Smoking or Open Flames鈥? signs in storage or use areas. Cylinders of Tungsten Hexafluoride
should be stored away from organic or combustible materials. Personnel using Tungsten Hexafluoride should be protected
by a gas cabinet enclosure or barricade and remote control valves, operated from outside the barrier or enclosure.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 4 OF 10
7. HANDLING and STORAGE (Continued)
SPECIAL PRECAUTIONS FOR HANDLING GAS CYLINDERS: Protect cylinders against physical damage. Store in cool,
dry, well-ventilated, fireproof area, away from flammable materials and corrosive atmospheres. Store away from heat and
ignition sources and out of direct sunlight. Do not store near elevators, corridors or loading docks. Do not allow area
where cylinders are stored to exceed 52掳C (125掳F). Avoid storing products by incompatible chemicals. Do not store
containers where they can come into contact with moisture. Cylinders should be stored upright and be firmly secured to
prevent falling or being knocked over. Cylinders can be stored in the open, but in such cases, should be protected against
extremes of weather and from the dampness of the ground to prevent rusting. Never tamper with pressure relief devices in
valves and cylinders. The following rules are applicable to situations in which cylinders are being used:
Before Use: Move cylinders with a suitable hand-truck. Do not drag, slide or roll cylinders. Do not drop cylinders or permit
them to strike each other. Secure cylinders firmly. Leave the valve protection cap in-place until cylinder is ready for use.
During Use: Use designated CGA fittings and other support equipment. Do not use adapters. Do not heat cylinder by
any means to increase the discharge rate of the product from the cylinder. Use check valve or trap in discharge line to
prevent hazardous backflow into the cylinder. Do not use oils or grease on gas-handling fittings or equipment.
After Use: Close main cylinder valve. Replace valve protection cap. Mark empty cylinders 鈥淓MPTY鈥?.
NOTE: Use only DOT or ASME Code containers. Earth-ground and bond all lines and equipment associated with this
product. Close valve after each use and when empty. Cylinders must not be recharged except by or with the consent of
owner. For additional information refer to the Compressed Gas Association Pamphlet P-1, Safe Handling of Compressed
Gases in Containers. Additionally, refer to CGA Bulletin SB-2 鈥淥xygen Deficient Atmospheres鈥?.
PROTECTIVE PRACTICES DURING MAINTENANCE OF CONTAMINATED EQUIPMENT: Follow practices indicated in
Section 6 (Accidental Release Measures). Make certain application equipment is locked and tagged-out safely. Always
use product in areas where adequate ventilation is provided.

8. EXPOSURE CONTROLS - PERSONAL PROTECTION
VENTILATION AND ENGINEERING CONTROLS: Use with adequate ventilation. A hood with forced ventilation is
preferable. Because of the high hazard associated with Tungsten Hexafluoride, stringent control measures such as a gas
cabinet enclosure or isolation may be necessary. Ductwork should be constructed of non-metallic material, or should be
lined to resist corrosion. If appropriate, install automatic monitoring equipment to detect the level of Tungsten Hexafluoride.
RESPIRATORY PROTECTION: Maintain exposure levels of Tungsten Hexafluoride below the levels listed in Section 2
(Composition and Information on Ingredients) and oxygen levels above 19.5% in the workplace. Use supplied air
respiratory protection if Tungsten Hexafluoride levels exceed exposure limits or during emergency response to a release of
this product. If respiratory protection is required, follow the requirements of the Federal OSHA Respiratory Protection
Standard (29 CFR 1910.134), equivalent U.S. State standards, or those of Canada and its Provinces. The following
NIOSH respiratory protection recommendations are for Fluorides.
CONCENTRATION RESPIRATORY EQUIPMENT
Up to 1 ppm: Supplied Air Respirator (SAR)
Up to 2.5 ppm: Supplied Air Respirator operated in continuous-flow mode.
Up to 5 ppm: Full-facepiece SCBA, or full-facepiece Supplied Air Respirator.
Up to 25 ppm: Positive-pressure, full-facepiece Supplied Air Respirator.
Emergency or Planned Entry into Unknown Concentration or IDLH Conditions: Positive-pressure, full facepiece SCBA or
positive pressure, full-facepiece SAR with an auxiliary positive pressure SCBA.
Escape Gas mask or mouth-piece respirator with Tungsten Hexafluoride cartridges or escape-type
SCBA should be used.
The IDLH concentration for fluoride is 25 ppm.
EYE PROTECTION: Splash goggles or safety glasses and face shield.
HAND PROTECTION: Wear mechanically-resistant gloves when handling cylinders of Tungsten Hexafluoride. Wear
chemical resistant gloves appropriate for use with Tungsten Hexafluoride for industrial use. Use triple gloves for spill
response (see Section 6, Accidental Release Measures).
BODY PROTECTION: Use body protection appropriate for task. An apron or other impermeable body protection is
suggested. Full-body chemical protective clothing is recommended for emergency response procedures.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 5 OF 10
9. PHYSICAL and CHEMICAL PROPERTIES
VAPOR DENSITY: Not established.
LIQUID DENSITY @ boiling point: 215 lb/ft3 (3430 kg/ m3)
SPECIFIC VOLUME (ft3/lb): Not established. EVAPORATION RATE (nBuAc = 1): Not applicable.
SPECIFIC GRAVITY, LIQUID @ boiling point: 3.43 FREEZING POINT: 2.3掳C (36掳F)
SOLUBILITY IN WATER: Hydrolyzes violently BOILING POINT @ 1 atm: 17.5掳C (63.5掳F)
VAPOR PRESSURE: 2 psig. ODOR THRESHOLD: Not applicable.
COEFFICIENT WATER/OIL DISTRIBUTION: Not available. EXPANSION RATIO: Not applicable.
pH: Not applicable to the gas. Hydrofluoric acid mist, which can be generated from this product, is corrosive and is formed
by the gas on contact with moisture.
APPEARANCE AND COLOR: Tungsten Hexafluoride is an odorless, colorless, gas, or pale-yellow liquid.
HOW TO DETECT THIS SUBSTANCE (warning properties): Lacrymation may act as a distinctive warning property
associated with this product. Monitoring systems must be used for detection of this gas. Small leaks may be detected by
holding a small, open bottle of concentrated ammonium hydroxide solution near the site of the leak and observing the
formation of a small dense white cloud of fumes. Wet blue litmus paper will turn pink upon exposure to a leak of Tungsten
Hexafluoride.

10. STABILITY and REACTIVITY
STABILITY: Normally stable. Tungsten Hexafluoride hydrolyzes very readily and violently in the presence of water.
DECOMPOSITION PRODUCTS: When heated, Tungsten Hexafluoride emits hydrogen fluoride. When exposed to water
or moisture, Tungsten Hexafluoride decomposes to hydrofluoric acid and tungsten oxyfluorides.
MATERIALS WITH WHICH SUBSTANCE IS INCOMPATIBLE: Tungsten Hexafluoride reacts with water to produce
hydrofluoric acid.
HAZARDOUS POLYMERIZATION: Will not occur.
CONDITIONS TO AVOID: Avoid exposing cylinders to extremely high temperatures, which could cause the cylinders to
rupture. Avoiding exposing this product to incompatible chemicals and moisture.

PART IV Is there any other useful information about this material?
11. TOXICOLOGICAL INFORMATION
TOXICITY DATA: Currently, no toxicological data are available for Tungsten Hexafluoride.
SUSPECTED CANCER AGENT: Tungsten Hexafluoride is not found on the following lists: FEDERAL OSHA Z LIST,
IARC, NTP, and CAL/OSHA and therefore is neither considered to be nor suspected to be a cancer-causing agent by these
agencies.
IRRITANCY OF PRODUCT: Tungsten Hexafluoride is severely irritating to contaminated tissue.
SENSITIZATION OF PRODUCT: Tungsten Hexafluoride is not known to be a sensitizer to humans upon prolonged or
repeated contact.
REPRODUCTIVE TOXICITY INFORMATION: Listed below is information concerning the effects of Tungsten Hexafluoride
on the human reproductive system.
Mutagenicity: No human mutagenic effects have been described for Tungsten Hexafluoride.
Embryotoxcity: No human embryotoxic effects have been described for Tungsten Hexafluoride.
Teratogenicity: No human teratogenic effects have been described for Tungsten Hexafluoride.
Reproductive Toxicity: No human reproductive effects have been described for Tungsten Hexafluoride.
A mutagen is a chemical which causes permanent changes to genetic material (DNA) such that the changes will propagate
through generation lines. An embryotoxin is a chemical which causes damage to a developing embryo (i.e. within the first
eight weeks of pregnancy in humans), but the damage does not propagate across generational lines. A teratogen is a
chemical which causes damage to a developing fetus, but the damage does not propagate across generational lines. A
reproductive toxin is any substance which interferes in any way with the reproductive process.
MEDICAL CONDITIONS AGGRAVATED BY EXPOSURE: Pre-existing dermatitis, other skin conditions, and respiratory
disorders may be aggravated by over-exposure to Tungsten Hexafluoride. Additionally, over-exposures may aggravate
dental problems, heart conditions, bone disorders, and eye problems, as well as disorders involving the 鈥淭arget Organs鈥?, as
listed in Section 3 (Hazard Information), may be aggravated by overexposure to Hydrogen Fluoride.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 6 OF 10
11. TOXICOLOGICAL INFORMATION (Continued)
RECOMMENDATIONS TO PHYSICIANS: The following information is to assist physicians in the treatment of exposure to
fluoride compounds.
For Inhalation Exposure: Administer 100% oxygen at half-hour intervals for three to four hours for victims of minor
inhalation exposure. For serious inhalation exposure, 100% oxygen administration should begin immediately, under
positive pressure (<4 cm) for half-hour periods for at least six hours until breathing is easy and the color of the skin and
mucous membranes is normal.
For Skin Contact: For skin contamination, all areas of exposure should be flushed with copious quantities of water,
followed by an iced aqueous or alcoholic solution of 0.13% benzalkonium chloride, iced 70% alcohol, or an ice-cold
saturated solution of magnesium sulfate. If the area of burn cannot be drenched or immersed in solution, apply cold
compresses containing the materials of the solution. After the iced solution treatment, application of a paste of powdered
magnesium oxide and glycerin should be administered. The paste should be applied daily for several days. The
prevention of serious burns can be prevented by infiltration of the skin and subcutaneous tissues with a 10% calcium
gluconate solution, along with a local anesthetic. Care should be taken to see that all medical personnel providing
treatment wear chemical impervious gloves. In cases of severe overexposure (more than 160 cm2), there is a potential for
hypocalcemia. Therefore, systemic administration of calcium gluconate may be necessary. Frequent monitoring of serum
calcium, cardiac, renal, and hepatic functions is necessary.
For Eye Contact: Exposed eyes should be flushed for 15 minutes and the following additional treatment should be
provided: Treat with a continuous drip of 1 percent calcium gluconate in normal, sterile saline. No oils or ointments should
be used.
ACGIH BIOLOGICAL EXPOSURE INDICES (BEIs): Biological Exposure Indices (BEIs) are applicable for Fluorides, as
follows.

CHEMICAL DETERMINANT SAMPLING TIME BEI

FLUORIDES
鈥? Prior to shift 鈥?3 mg/g creatinine
鈥luorides in urine
鈥? End of shift 鈥? 10 mg/g creatinine


12. ECOLOGICAL INFORMATION
ENVIRONMENTAL STABILITY: Tungsten Hexafluoride hydrolyzes very readily and violently in the presence of water and
reacts with a wide variety of other substances. All work practices should be aimed at eliminating environmental
contamination.
EFFECT OF MATERIAL ON PLANTS or ANIMALS: Due to the corrosive nature of this product, animals exposed to this
product will experience tissue damage, burns, and may be killed. Plants contaminated with this product may be adversely
affected or destroyed.
EFFECT OF CHEMICAL ON AQUATIC LIFE: Tungsten Hexafluoride will form hydrofluoric acid in water, and even low
concentrations in water will be detrimental to aquatic life. If a release this product occurs near a river or other body of
water, the release has the potential to kill fish and other aquatic life.

13. DISPOSAL CONSIDERATIONS
PREPARING WASTES FOR DISPOSAL: Waste disposal must be in accordance with appropriate U.S. Federal, State, and
local regulations or with regulations of Canada and its Provinces. Return cylinders with residual product to Airgas, Inc. Do
not dispose of locally.

14. TRANSPORTATION INFORMATION
THIS MATERIAL IS HAZARDOUS AS DEFINED BY 49 CFR 172.101 BY THE U.S. DEPARTMENT OF
TRANSPORTATION.
PROPER SHIPPING NAME: Tungsten hexafluoride
HAZARD CLASS NUMBER and DESCRIPTION: 2.3 (Poison Gas)
UN IDENTIFICATION NUMBER: UN 2196
PACKING GROUP: Not applicable.
DOT LABEL(S) REQUIRED: Poison Gas, Corrosive
NORTH AMERICAN EMERGENCY RESPONSE GUIDEBOOK NUMBER (1996): 125
SPECIAL PROVISION: Tungsten Hexafluoride is poisonous by inhalation. Shipments must be properly described as
鈥淧oison Inhalation Hazard - ZONE B鈥?.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 7 OF 10
14. TRANSPORTATION INFORMATION (Continued)
MARINE POLLUTANT: Hydrogen Fluoride is not classified by the DOT as a Marine Pollutant (as defined by 49 CFR
172.101, Appendix B).
TRANSPORT CANADA TRANSPORTATION OF DANGEROUS GOODS REGULATIONS: THIS MATERIAL IS
CONSIDERED AS DANGEROUS GOODS. Use the above information for the preparation of Canadian Shipments.
NOTE: 102 (Poison-Inhalation Hazard).

15. REGULATORY INFORMATION
ADDITIONAL U.S. REGULATIONS:
U.S. SARA REPORTING REQUIREMENTS: Tungsten Hexafluoride is not subject to the reporting requirements of
Sections 302, 304 and 313 of Title III of the Superfund Amendments and Reauthorization Act.
U.S. SARA THRESHOLD PLANNING QUANTITY: Not applicable.
U.S. CERCLA REPORTABLE QUANTITY (RQ): Not applicable.
U.S. TSCA INVENTORY STATUS: Tungsten Hexafluoride is listed on the TSCA Inventory.
OTHER U.S. FEDERAL REGULATIONS: Tungsten Hexafluoride is not subject to the reporting requirements of CFR 29
1910.1000. Information is provided for Fluorides and Tungsten (soluble compounds). Depending on specific operations
involving the use of Tungsten Hexafluoride, the regulations of the Process Safety Management of Highly Hazardous
Chemicals may be applicable (29 CFR 1910.119). Tungsten Hexafluoride is not listed in Appendix A of this regulation;
however, it is recommended that the guidelines of the OSHA Technical Bulletin, 鈥淲ater-Reactive Chemicals, Hazardous
Materials not Covered Under 29 CFR 1910.119鈥?, be followed. The bulletin states that a process safety analysis should be
done for all materials with catastrophic potential, even if they are not covered by the Process Safety Standard.
U.S. STATE REGULATORY INFORMATION: Tungsten Hexafluoride is covered under specific State regulations, as
denoted below:
Alaska - Designated Toxic and Hazardous Massachusetts - Substance List: No. Pennsylvania - Hazardous Substance List:
No.
Substances: Fluoride, as F. Michigan - Critical Materials Register: No.
Rhode Island - Hazardous Substance List:
California - Permissible Exposure Limits Minnesota - List of Hazardous Substances:
Fluoride, as F.
Fluoride, as F
for Chemical Contaminants: No
Texas - Hazardous Substance List: No.
Missouri - Employer Information/Toxic
Florida - Substance List: No.
West Virginia - Hazardous Substance List:
Substance List: Tungsten Hexafluoride.
Illinois - Toxic Substance List: Fluorides
No.
and Inorganic Fluoride Compounds. New Jersey - Right to Know Hazardous
Wisconsin - Toxic and Hazardous
Kansas - Section 302/313 List: No. Substance List: Tungsten Hexafluoride.
Substances: No.
North Dakota - List of Hazardous
Chemicals, Reportable Quantities: No.

CALIFORNIA SAFE DRINKING WATER AND TOXIC ENFORCEMENT ACT (PROPOSITION 65): Tungsten Hexafluoride
is not on the California Proposition 65 lists.

CGA LABELING (For Compressed Gas):
DANGER: POISONOUS, CORROSIVE, WATER-REACTIVE, HIGH PRESSURE GAS.
CAN CAUSE EYE, SKIN BURNS, AND RESPIRATORY TRACT BURNS.
CAN CAUSE KIDNEY DAMAGE.
Do not breath gas.
Store and use with adequate ventilation, and use in closed systems.
Do not get in eyes, on skin or clothing.
Close valve after each use and when empty.
Use with equipment cleaned of compatible materials of construction and rated for cylinder pressure.
Use in accordance with the Material Safety Data Sheet.


POISON
CALL A PHYSICIAN




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 8 OF 10
15. REGULATORY INFORMATION (Continued)
FIRST-AID: IF INHALED, remove to fresh air. If not breathing, give artificial respiration. (Rescuer may
receive chemical burns as a result of giving mouth-to-mouth). If breathing is difficult, give
oxygen. Call a physician.

IN CASE OF CONTACT, immediately flush eyes or skin with water for at least 15 minutes
while removing contaminated clothing and shoes. Call a physician. Wash clothing before
reuse. (Discard contaminated shoes).
DO NOT REMOVE THIS PRODUCT LABEL.
ADDITIONAL CANADIAN REGULATIONS:
CANADIAN DSL INVENTORY: Tungsten Hexafluoride is listed on the DSL Inventory.
OTHER CANADIAN REGULATIONS: Not applicable.
CANADIAN ENVIRONMENTAL PROTECTION ACT (CEPA) PRIORITIES SUBSTANCES LISTS: Tungsten Hexafluoride
is on the CEPA First Priorities Substances List (鈥淭oxic鈥? Category, as an Inorganic Fluoride).
CANADIAN WHMIS SYMBOLS: Class A: Compressed Gas
Class D1A: Material Causing Serious and Immediate Effects
Class E: Corrosive
Class F: Dangerously Reactive Material




16. OTHER INFORMATION
PREPARED BY: CHEMICAL SAFETY ASSOCIATES, Inc.
9163 Chesapeake Drive, San Diego, CA 92123-1002
619/565-0302
The information contained herein is based on data considered accurate. However, no warranty is expressed or implied regarding the
accuracy of these data or the results to be obtained from the use thereof. AIRGAS, Inc. assumes no responsibility for injury to the vendee or
third persons proximately caused by the material if reasonable safety procedures are not adhered to as stipulated in the data sheet.
Additionally, AIRGAS, Inc. assumes no responsibility for injury to vendee or third persons proximately caused by abnormal use of the material
even if reasonable safety procedures are followed. Furthermore, vendee assumes the risk in his use of the material.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 9 OF 10
DEFINITIONS OF TERMS
A large number of abbreviations and acronyms appear on a MSDS. Some of these which are commonly used include the following:
CAS #: This is the Chemical Abstract Service Number which uniquely identifies each constituent. It is used for computer-related searching.
EXPOSURE LIMITS IN AIR: FLAMMABILITY LIMITS IN AIR:
Much of the information related to fire and explosion is derived from the
ACGIH - American Conference of Governmental Industrial Hygienists, a
National Fire Protection Association (NFPA). Flash Point - Minimum
professional association which establishes exposure limits. TLV -
temperature at which a liquid gives off sufficient vapors to form an ignitable
Threshold Limit Value - an airborne concentration of a substance which
mixture with air. Autoignition Temperature: The minimum temperature
represents conditions under which it is generally believed that nearly all
required to initiate combustion in air with no other source of ignition. LEL -
workers may be repeatedly exposed without adverse effect. The duration
the lowest percent of vapor in air, by volume, that will explode or ignite in
must be considered, including the 8-hour Time Weighted Average (TWA),
the presence of an ignition source. UEL - the highest percent of vapor in air,
the 15-minute Short Term Exposure Limit, and the instantaneous Ceiling
by volume, that will explode or ignite in the presence of an ignition source.
Level (C). Skin absorption effects must also be considered.
OSHA - U.S. Occupational Safety and Health Administration.
TOXICOLOGICAL INFORMATION:
PEL - Permissible Exposure Limit - This exposure value means exactly the
Human and Animal Toxicology: Possible health hazards as derived from
same as a TLV, except that it is enforceable by OSHA. The OSHA
human data, animal studies, or from the results of studies with similar
Permissible Exposure Limits are based in the 1989 PELs and the June,
compounds are presented. Definitions of some terms used in this section
1993 Air Contaminants Rule (Federal Register: 58: 35338-35351 and 58:
are: LD50 - Lethal Dose (solids & liquids) which kills 50% of the exposed
40191). Both the current PELs and the vacated PELs are indicated. The
animals; LC50 - Lethal Concentration (gases) which kills 50% of the
phrase, 鈥淰acated 1989 PEL,鈥? is placed next to the PEL which was vacated
exposed animals; ppm concentration expressed in parts of material per
by Court Order. IDLH - Immediately Dangerous to Life and Health - This
million parts of air or water; mg/m3 concentration expressed in weight of
level represents a concentration from which one can escape within 30-
substance per volume of air; mg/kg quantity of material, by weight,
minutes without suffering escape-preventing or permanent injury. The DFG
administered to a test subject, based on their body weight in kg. Other
- MAK is the Republic of Germany鈥檚 Maximum Exposure Level, similar to
measures of toxicity include TDLo, the lowest dose to cause a symptom
the U.S. PEL. NIOSH is the National Institute of Occupational Safety and
and TCLo the lowest concentration to cause a symptom; TDo, LDLo, and
Health, which is the research arm of the U.S. Occupational Safety and
LDo, or TC, TCo, LCLo, and LCo, the lowest dose (or concentration) to
Health Administration (OSHA). NIOSH issues exposure guidelines called
cause lethal or toxic effects. Cancer Information: The sources are: IARC
Recommended Exposure Levels (RELs). When no exposure guidelines
- the International Agency for Research on Cancer; NTP - the National
are established, an entry of NE is made for reference.
Toxicology Program, RTECS - the Registry of Toxic Effects of Chemical
HAZARD RATINGS: Substances, OSHA and CAL/OSHA. IARC and NTP rate chemicals on a
HAZARDOUS MATERIALS IDENTIFICATION SYSTEM: Health Hazard: 0 scale of decreasing potential to cause human cancer with rankings from 1
(minimal acute or chronic exposure hazard); 1 (slight acute or chronic to 4. Subrankings (2A, 2B, etc.) are also used. Other Information: BEI -
ACGIH Biological Exposure Indices, represent the levels of determinants
exposure hazard); 2 (moderate acute or significant chronic exposure
which are most likely to be observed in specimens collected from a healthy
hazard); 3 (severe acute exposure hazard; onetime overexposure can result
worker who has been exposed to chemicals to the same extent as a worker
in permanent injury and may be fatal); 4 (extreme acute exposure hazard;
with inhalation exposure to the TLV. Ecological Information: EC is the
onetime overexposure can be fatal). Flammability Hazard: 0 (minimal
effect concentration in water. BCF = Bioconcentration Factor, which is used
hazard); 1 (materials that require substantial pre-heating before burning); 2
to determine if a substance will concentrate in lifeforms which consume
(combustible liquid or solids; liquids with a flash point of 38-93掳C [100-
contaminated plant or animal matter. Tlm = median threshold limit;
200掳F]); 3 (Class IB and IC flammable liquids with flash points below 38掳C
Coefficient of Oil/Water Distribution is represented by log Kow or log Koc
[100掳F]); 4 (Class IA flammable liquids with flash points below 23掳C [73掳F]
and is used to assess a substance鈥檚 behavior in the environment.
and boiling points below 38掳C [100掳F]. Reactivity Hazard: 0 (normally
REGULATORY INFORMATION:
stable); 1 (material that can become unstable at elevated temperatures or
This section explains the impact of various laws and regulations on the
which can react slightly with water); 2 (materials that are unstable but do not
material. U.S.: EPA is the U.S. Environmental Protection Agency. DOT is
detonate or which can react violently with water); 3 (materials that can
the U.S. Department of Transportation. SARA is the Superfund
detonate when initiated or which can react explosively with water); 4
Amendments and Reauthorization Act. TSCA is the U.S. Toxic Substance
(materials that can detonate at normal temperatures or pressures).
Control Act. CERCLA (or Superfund) refers to the Comprehensive
NATIONAL FIRE PROTECTION ASSOCIATION: Health Hazard: 0
Environmental Response, Compensation, and Liability Act. Labeling is per
(material that on exposure under fire conditions would offer no hazard
the American National Standards Institute (ANSI Z129.1). CANADA:
beyond that of ordinary combustible materials); 1 (materials that on
CEPA is the Canadian Environmental Protection Act. WHMIS is the
exposure under fire conditions could cause irritation or minor residual
Canadian Workplace Hazardous Materials Information System. TC is
injury); 2 (materials that on intense or continued exposure under fire
Transport Canada. DSL/NDSL are the Canadian Domestic/Non-Domestic
conditions could cause temporary incapacitation or possible residual injury);
Substances Lists.
3 (materials that can on short exposure could cause serious temporary or
residual injury); 4 (materials that under very short exposure causes death
or major residual injury). Flammability Hazard and Reactivity Hazard: Refer
to definitions for 鈥淗azardous Materials Identification System鈥?.




TUNGSTEN HEXAFLUORIDE - F6W (FW6) MSDS (DOCUMENT # 001080) PAGE 10 OF 10

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