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MSDS Material Safety Data Sheet
CAS

1306-38-3

File Name: msds_dupont_com---PEN_09004a2f806d8b98.asp
 The MSDS format adheres to the standards and regulatory requirements
of the United States and may not meet regulatory requirements
in other countries.

DuPont Page 1
Material Safety Data Sheet

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MICROPLANAR STI2100F
EPM00097 Revised 30-NOV-2006
----------------------------------------------------------------------
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CHEMICAL PRODUCT/COMPANY IDENTIFICATION
----------------------------------------------------------------------
Product Use

STI CMP Polishing

Company Identification

MANUFACTURER/DISTRIBUTOR
DuPont Air Products NanoMaterials L.L.C.
2441 W.Erie Dr.
Tempe
AZ
United States
85282

PHONE NUMBERS
Product Information : (800)441-7515(outside U.S. 302-774-1000)
Transport Emergency : (800)424-9300(outside U.S. 703-527-3887)
Medical Emergency : (800)441-3637(outside U.S. 302-774-1000)

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COMPOSITION/INFORMATION ON INGREDIENTS
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Components

Material CAS Number %
Cerium Oxide 1306-38-3

Components (Remarks)

Specific wt% of component withheld as a trade secret.

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HAZARDS IDENTIFICATION
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Emergency Overview

CAUTION
White slurry.
May cause eye and skin irritation.
May cause allergic skin reaction in some people.
EPM00097 DuPont Page 2
Material Safety Data Sheet

(HAZARDS IDENTIFICATION - Continued)

Potential Health Effects

INHALATION
No adverse effects expected.

EYE CONTACT
May cause irritation.

SKIN CONTACT
May cause irritation. Prolonged or repeated exposure may
cause allergic skin reaction in some people.

INGESTION
No adverse effects known.

TARGET ORGANS
Eyes and Skin.

MEDICAL CONDITIONS AGGRAVATED BY EXPOSURE
Overexposure may aggravate existing respiratory or skin
conditions.

POTENTIAL ENVIRONMENTAL EFFECTS
None have been identified.

Carcinogenicity Information

None of the components present in this material at concentrations
equal to or greater than 0.1% are listed by IARC, NTP, OSHA or ACGIH
as a carcinogen.

----------------------------------------------------------------------
FIRST AID MEASURES
----------------------------------------------------------------------
First Aid

INHALATION

No specific intervention is indicated as the compound is not
likely to be hazardous by inhalation. Consult a physician if
necessary.

SKIN CONTACT

Flush skin with water after contact. Wash contaminated clothing
before reuse.

EYE CONTACT

In case of contact, immediately flush eyes with plenty of water
for at least 15 minutes. Call a physician.

INGESTION
EPM00097 DuPont Page 3
Material Safety Data Sheet

(FIRST AID MEASURES - Continued)

If swallowed, do not induce vomiting. Immediately give 2 glasses
of water. Never give anything by mouth to an unconscious person.
Call a physician.

Notes to Physicians

Treat symptomatically as required by the condition of the
patient.

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FIRE FIGHTING MEASURES
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Flammable Properties

Flash Point : Not Flammable
Autoignition : Not Available
Flammable limits in Air, % by Volume
LEL : None
UEL : None

Extinguishing Media

Use media appropriate for surrounding material.

Fire Fighting Instructions

Evacuate personnel to a safe area. Wear full protective
equipment. Shut off source of fuel, if possible and without risk.
Cool tank/container with water spray.

UNUSUAL FIRE AND EXPLOSION HAZARDS.
None known.

HAZARDOUS COMBUSTION PRODUCTS
None known.

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ACCIDENTAL RELEASE MEASURES
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Safeguards (Personnel)

NOTE: Review FIRE FIGHTING MEASURES and HANDLING (PERSONNEL)
sections before proceeding with clean-up. Use appropriate
PERSONAL PROTECTIVE EQUIPMENT during clean-up.

Initial Containment

Follow applicable Federal, State/Provincial and Local laws/
regulations.
EPM00097 DuPont Page 4
Material Safety Data Sheet

(ACCIDENTAL RELEASE MEASURES - Continued)

Spill Clean Up

Soak up with sawdust, sand, oil dry or other absorbent material.
Dispose of in an approved container. Comply with Federal, State,
and local regulations for reporting releases.

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HANDLING AND STORAGE
----------------------------------------------------------------------
Handling (Personnel)

Avoid contact with eyes, skin or clothing. Use with sufficient
ventilation to keep employee exposure below recommended limits.
Wash thoroughly after handling. Wash clothing after use.

Handling (Physical Aspects)

Keep container tightly closed.

Storage

No special requirements.

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EXPOSURE CONTROLS/PERSONAL PROTECTION
----------------------------------------------------------------------
Engineering Controls

Use only with adequate ventilation.

Personal Protective Equipment

EYE/FACE PROTECTION: Wear safety glasses or coverall chemical
splash goggles.

RESPIRATORS: Where there is potential for airborne exposures in
excess of applicable limits, wear NIOSH approved respiratory
protection.

PROTECTIVE CLOTHING: Where there is potential for skin contact
have available and wear as appropriate impervious gloves, apron,
pants, and jacket.

Exposure Guidelines
EPM00097 DuPont Page 5
Material Safety Data Sheet

Exposure Limits
MICROPLANAR STI2100F
PEL (OSHA) : None Established
TLV (ACGIH) : None Established

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PHYSICAL AND CHEMICAL PROPERTIES
----------------------------------------------------------------------
# Physical Data

Boiling Point : 212 F (100 C)
Vapor Pressure : Not Available
Vapor Density : Not Available
Freezing Point : 32 F (0 C)
Evaporation Rate : Not Available
Solubility in Water : Complete
pH : 5.0
Odor : None.
Color : White.
Specific Gravity : ~1.015
Form : Liquid Dispersion.

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STABILITY AND REACTIVITY
----------------------------------------------------------------------
Chemical Stability

Stable at normal temperatures and storage conditions.

Incompatibility with Other Materials

Mineral acids.

Decomposition

None known.

Polymerization

Will not normally occur.

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TOXICOLOGICAL INFORMATION
----------------------------------------------------------------------
Animal Data

INHALATION
No additional information available.

EYE CONTACT
No additional information available.

SKIN CONTACT
No additional information available.

INGESTION
EPM00097 DuPont Page 6
Material Safety Data Sheet

(TOXICOLOGICAL INFORMATION - Continued)

No additional information available.

GENOTOXICITY
No information available.

TARGET ORGANS
Eyes and Skin.

DATA FOR CERIUM OXIDE, A COMPONENT OF MICROPLANAR(TM)
STI2100F(TM)

INHALATION
High concentrations may cause headache, nausea, or
bronchitis.

EYE CONTACT
In vitro IDE score: 17.2/110, slightly irritating.

SKIN CONTACT
Irritation; dust may cause burning, tearing, and redness.

INGESTION
LD50, rat: >5000 mg/kg, not harmful

SUBCHRONIC TOXICITY
Inhalation study (rat, 6hr/day, 5days/week, 13 weeks):
NOAEL = 0.5 mg/l, the highest level tested
Pigment accumulation noted in the lungs, nasal cavity,
bronchi, lymph nodes, trachea, liver and spleen, indication
that normal clearance mechanisms were overwhelmed.

TARGET ORGANS
Respiratory tract and eyes.

----------------------------------------------------------------------
ECOLOGICAL INFORMATION
----------------------------------------------------------------------
Ecotoxicological Information

No information is available.

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DISPOSAL CONSIDERATIONS
----------------------------------------------------------------------
Waste Disposal

Treatment, storage, transportation, and disposal must be in
accordance with applicable Federal, State/Provincial, and Local
regulations.

Incineration at a facility with proper Federal and State
issued permits is the recommended method for disposal.
EPM00097 DuPont Page 7
Material Safety Data Sheet

(DISPOSAL CONSIDERATIONS - Continued)

Container Disposal

Observe all label warnings. Empty containers may contain
hazardous residue. Refer to applicable Local, State/Provincial,
and Federal Regulations, as well as industry Standards.

Keep away from heat, sparks, and flames. Do not distribute,
make available, or reuse empty containers except for storage
and shipment of original product. Remove all hazardous
product residue, and puncture or otherwise destroy empty
containers before disposal. Consult 40 CFR, Parts 261 and
268 for guidance on disposal.

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TRANSPORTATION INFORMATION
----------------------------------------------------------------------
Shipping Information

DOT/IMO/IATA
Not Regulated.

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REGULATORY INFORMATION
----------------------------------------------------------------------
U.S. Federal Regulations

This product complies with TSCA inventory reporting requirements.

SARA TITLE III (SUPERFUND AMENDMENTS AND REAUTHORIZATION
ACT)

311/312 Hazard Categories: None

313: This product is not subject to the reporting
requirements of Section 313 of the Emergency Planning and
Community Right-To-Know Act of 1986 and of 40 CFR 372.

CERCLA (COMPREHENSIVE RESPONSE COMPENSATION AND LIABILITY
ACT)

Reportable Quantity (RQ): None

We recommend you contact local authorities to determine if
there may be other local reporting requirements.
EPM00097 DuPont Page 8
Material Safety Data Sheet

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OTHER INFORMATION
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NFPA, NPCA-HMIS

NFPA Rating
Health :1
Flammability :0
Reactivity :0

Additional Information

This material is for industrial use and should only be used
under the superivsion of a technically qualified individual.


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The data in this Material Safety Data Sheet relates only to the
specific material designated herein and does not relate to use in
combination with any other material or in any process.

Responsibility for MSDS : MSDS Coordinator
Telephone : (757)-686-8663 OR (919) 248-5027

# Indicates updated section.

This information is based upon technical information believed to be
reliable. It is subject to revision as additional knowledge and
experience is gained.

End of MSDS

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