MATERIAL SAFETY DATA SHEET
SECTION 1. PRODUCT IDENTIFICATION
PRODUCT NAME: Tetrafluoromethane in Oxygen Gas Mixture
CHEMICAL NAME: 20% Tetrafluoromethane in Oxygen Gas Mixture or
30% Tetrafluoromethane in Oxygen Gas Mixture
SYNONYMS: Plasma Desmearing Gas
Halocarbon-14 or Carbon Tetrafluoride / Oxygen Gas Mixture
FORMULA: Oxygen: O2 Tetrafluoromethane: CF4
MANUFACTURER: Air Products and Chemicals, Inc.
7201 Hamilton Boulevard
Allentown, PA 18195-1501
PRODUCT INFORMATION: (800) 752-1597
MSDS NUMBER: 1090 REVISION: 3
REVIEW DATE: October 1998 REVISION DATE: October 1998
SECTION 2. COMPOSITION / INFORMATION ON INGREDIENTS
Tetrafluoromethane in Oxygen Gas Mixture
CAS NUMBER: Oxygen: 7782-44-7 Tetrafluoromethane: 75-73-0
EXPOSURE LIMITS:
Oxygen Tetrafluoromethane
OSHA: PEL-TWA Not established Not established
ACGIH: TLV-TWA Not established Simple asphyxiant
NIOSH: IDLH Not established Not established
SECTION 3. HAZARD IDENTIFICATION
EMERGENCY OVERVIEW
This product is an oxidizing, colorless, compressed gas packaged in cylinders under pressure. It
will vigorously accelerate combustion. Keep away from oil and grease. Rescue personnel should
be aware of the extreme fire hazards associated with oxygen-enriched (>23%) atmospheres, and
that self-contained breathing apparatus (SCBA) may be required.
EMERGENCY TELEPHONE NUMBERS
(800) 523 - 9374 Continental U.S., Canada and Puerto Rico
(610) 481 - 7711 other locations
ACUTE POTENTIAL HEALTH EFFECTS:
ROUTES OF EXPOSURE:
EYE CONTACT: May cause irritation.
INGESTION: Not applicable
INHALATION: Extended exposure to high concentrations of oxygen (>23%) may cause
nasal stuffiness, dry cough, sore throat, chest pain, breathing difficulty, lung damage and
central nervous system effects (CNS). CNS depression symptoms may include dizziness,
poor coordination, tingling sensation, visual and hearing disturbances, muscular
twitching, unconsciousness and convulsions. May also cause prolongation of adaptation
to darkness and reduced peripheral vision.
SKIN CONTACT: May cause irritation.
POTENTIAL HEALTH EFFECTS OF REPEATED EXPOSURE:
ROUTE OF ENTRY: Inhalation
TARGET ORGANS: None
SYMPTOMS: None
MEDICAL CONDITIONS AGGRAVATED BY OVEREXPOSURE: None
CARCINOGENICITY: Components of this mixture are not listed in IARC, NTP, or OSHA Subpart
Z as carcinogens or potential carcinogens.
SECTION 4. FIRST AID MEASURES
EYE CONTACT: Flush eyes with plenty of water for several minutes. Seek medical attention if
irritation persists.
INGESTION: Not applicable
INHALATION: Remove person to fresh air. If not breathing, administer artificial respiration.
Obtain prompt medical attention.
SKIN CONTACT: Wash skin with plenty of water for several minutes. Seek medical attention if
irritation persists.
NOTES TO PHYSICIAN: Treatment of overexposure should be directed at the control of
symptoms and the clinical condition.
SECTION 5. FIRE FIGHTING MEASURES
FLASH POINT: AUTOIGNITION: FLAMMABLE LIMITS:
Not applicable Not applicable Not applicable
EXTINGUISHING MEDIA: This product is nonflammable but will support and vigorously
accelerate combustion. Use extinguishing media appropriate for surrounding fire.
SPECIAL FIRE FIGHTING INSTRUCTIONS: Evacuate all personnel from area. Do not approach
area without self-contained breathing apparatus (SCBA) and protective clothing. If possible, shut
off flow of gas which is supporting the fire. If possible, remove cylinders from fire area or cool with
water.
UNUSUAL FIRE AND EXPLOSION HAZARDS: Oxygen-enriched environments (greater than
23% oxygen) vigorously accelerate combustion. Some materials which are noncombustible in air
will burn in the presence of an oxygen-enriched atmosphere. Fire resistant clothing may burn and
offer no protection. Oxidizing mixtures may form explosive compounds when exposed to
combustible materials or oil, grease, and other hydrocarbon materials. Most cylinders are
designed to vent contents when exposed to elevated temperatures. Pressure in a container can
build up due to heat and it may rupture if pressure relief devices should fail to function.
HAZARDOUS COMBUSTION PRODUCTS: None
SECTION 6. ACCIDENTAL RELEASE MEASURES
STEPS TO BE TAKEN IF MATERIAL IS RELEASED OR SPILLED: Evacuate immediate area.
Increase ventilation to release area and monitor oxygen level. Use appropriate protective
equipment (SCBA). Do not enter areas of high oxygen concentration which could saturate
clothing and increase its flammability. Personnel who have been exposed to high concentrations
of oxygen should stay in a well-ventilated or open area for thirty minutes before going into a
confined space or near an ignition source. Shut off source of leak if possible. Isolate any leaking
cylinder. If leak is from container, pressure relief device or its valve, contact your supplier. If leak
is in user鈥檚 system, close cylinder valve and vent pressure before attempting repairs.
SECTION 7. HANDLING AND STORAGE
STORAGE: Store cylinders in a well-ventilated, secure area, protected from the weather.
Cylinders should be stored upright with valve outlet seals and valve protection caps in place.
Storage area temperatures should not exceed 125 掳 F (52 掳 C) and area should be free of
combustible materials. Cylinders should be separated from flammable materials by a minimum
distance of 20 ft. or by a barricade of non-combustible material at least five ft. high having a fire
resistance rating of at least 1/2 hour. Storage should be away from heavily traveled areas and
emergency exits. Full and empty cylinders should be segregated. Use a first-in first-out inventory
system to prevent full containers from being stored for long periods of time.
HANDLING: Do not drag, roll, slide or drop cylinder. Use a suitable hand truck designed for
cylinder movement. Never attempt to lift a cylinder by its cap. Secure cylinders at all times while
in use. Use a pressure reducing regulator and separate control valve to safely discharge gas from
cylinder. Use a check valve to prevent reverse flow into cylinder. Use piping and equipment
adequately designed to withstand pressures to be encountered. Never apply flame or localized
heat directly to any part of the cylinder. When preparing to connect cylinder for use, always
loosen valve outlet seal slowly. Once cylinder has been connected to process, open cylinder
valve slowly and carefully. Do not use rapid opening valves (i.e., ball valves). If user experiences
any difficulty operating cylinder valve, discontinue use and contact supplier. Never insert an
object (e.g., wrench, screwdriver, etc.) into valve cap openings. Doing so may damage valve
causing a leak to occur. Use an adjustable strap-wrench to remove over-tight or rusted caps.
All gauges, valves, regulators, piping and equipment to be used in enriched-oxygen service must
be cleaned for oxygen service in accordance with Compressed Gas Association pamphlet G-4.1.
Carbon steel, stainless steel, copper, brass, nickel and their alloys are materials of construction
that can be used in enriched-oxygen service.
SPECIAL PRECAUTIONS: Always store and handle compressed gas cylinders in accordance
with Compressed Gas Association, Inc. (telephone 703-412-0900) pamphlet CGA P-1, Safe
Handling of Compressed Gases in Containers. Local regulations may require specific equipment
for storage or use.
SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION
ENGINEERING CONTROLS:
VENTILATION: Provide adequate ventilation and/or local exhaust to prevent
accumulation of oxygen concentrations greater than 23%.
RESPIRATORY PROTECTION:
Emergency Use: Self-contained breathing apparatus (SCBA) or positive
pressure air line with full-face mask.
EYE PROTECTION: Safety glasses are recommended when handling cylinders.
SKIN PROTECTION: Work gloves are recommended when handling cylinders.
OTHER PROTECTIVE EQUIPMENT: Safety shoes are recommended when handling cylinders.
Clothing exposed to high concentrations may retain oxygen for thirty minutes or longer and
become a potential fire hazard. Stay away from ignition sources.
SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES
APPEARANCE: Odorless, colorless gas.
VAPOR PRESSURE: Permanent gas mixture.
20% CF4 / O2 30% CF4 / O2
GAS DENSITY (At 68 掳 F (20 掳 C) and 1 atm) (lb/cf): 0.1122 0.1268
SPECIFIC GRAVITY (also 1.5 1.7
called vapor density) (Air =1):
SPECIFIC VOLUME (At 8.9 7.9
68 掳 F (20 掳 C) and 1 atm) (lb/cf):
Oxygen Tetrafluoromethane
-297.7 -198.5
BOILING POINT (1 atm) (掳 F):
-361.9 -298.5
FREEZING POINT (掳 F):
MOLECULAR WEIGHT (lb/lb-mole): 32.0 88.0
SECTION 10. REACTIVITY / STABILITY
CHEMICAL STABILITY: Stable
CONDITIONS TO AVOID: Cylinders should not be exposed to temperatures in excess of 125 掳 F
(52 掳 C).
INCOMPATIBILITY: Oils, grease, hydrocarbons and flammable materials.
REACTIVITY:
A) HAZARDOUS DECOMPOSITION PRODUCTS: None
B) HAZARDOUS POLYMERIZATION: Will not occur.
SECTION 11. TOXICOLOGICAL INFORMATION
At atmospheric concentration and pressure, oxygen poses no toxicity hazards.
Premature infants exposed to high oxygen concentrations may suffer delayed retinal damage
which may progress to retinal detachment and blindness. Retinal damage may also occur in
adults exposed to 100% oxygen for extended periods (24 to 48 hours).
At two or more atmospheres, central nervous system (CNS) toxicity occurs. Symptoms include
nausea, vomiting, dizziness or vertigo, muscle twitching, vision changes, and loss of
consciousness and generalized seizures. At three atmospheres, CNS toxicity occurs in less than
two hours, and at six atmospheres in only a few minutes
Tetrafluoromethane is a simple asphyxiant.
SECTION 12. ECOLOGICAL INFORMATION
This mixture does not contain any Class I or Class II ozone depleting chemicals.
SECTION 13. DISPOSAL CONSIDERATIONS
UNUSED PRODUCT / EMPTY CYLINDER: Return cylinder and unused product to supplier. Do
not attempt to dispose of unused product. Ensure cylinder valve is properly closed, valve outlet
cap has been reinstalled, and valve protection cap is secured before shipping cylinder.
SECTION 14. TRANSPORT INFORMATION
DOT SHIPPING NAME: Compressed gas, Oxidizing, N.O.S.
HAZARD CLASS: 2.2
IDENTIFICATION NUMBER: UN3156
SHIPPING LABEL(s): Nonflammable Gas, Oxidizer
PLACARD (When required): Nonflammable Gas, Oxidizer
SPECIAL SHIPPING INFORMATION: Cylinders should be transported in a secure upright
position in a well-ventilated truck. Never transport in passenger compartment of a vehicle. Ensure
cylinder valve is properly closed, valve outlet cap has been reinstalled, and valve protection cap
is secured before shipping cylinder.
CAUTION: Compressed gas cylinders shall not be refilled except by qualified producers of
compressed gases. The filling and shipping of a compressed gas cylinder without the written
consent of the cylinder鈥檚 owner is in violation of federal law (49 CFR 173.301).
SECTION 15. REGULATORY INFORMATION
U.S. FEDERAL REGULATIONS:
EPA - ENVIRONMENTAL PROTECTION AGENCY
CERCLA: Comprehensive Environmental Response, Compensation, and Liability Act of 1980
(40 CFR Parts 117 and 302)
Reportable Quantity (RQ): None
SARA TITLE III: Superfund Amendment and Reauthorization Act
SECTIONS 302/304: Emergency Planning and Notification (40 CFR Part 355)
Extremely Hazardous Substances: Oxygen and Tetrafluoromethane are not listed.
Threshold Planning Quantity (TPQ): None
Reportable Quantity (RQ): None
SECTIONS 311/312: Hazardous Chemical Reporting (40 CFR Part 370):
IMMEDIATE HEALTH: No PRESSURE: Yes
DELAYED HEALTH: No REACTIVITY: No
FIRE: Yes
SECTION 313: Toxic Chemical Release Reporting (40 CFR Part 372)
Oxygen and Tetrafluoromethane do not require reporting under Section 313.
CLEAN AIR ACT:
SECTION 112 (r): Risk Management Programs for Chemical Accidental Release
(40 CFR Part 68)
Oxygen and Tetrafluoromethane are not listed as regulated substances.
Threshold Planning Quantity (TPQ): None
TOXIC SUBSTANCE CONTROL ACT (TSCA):
Oxygen and Tetrafluoromethane are listed on the TSCA inventory.
OCCUPATIONAL SAFETY AND HEALTH ADMINISTRATION (OSHA):
29 CFR 1910.119: Process Safety Management of Highly Hazardous Chemicals.
Oxygen and Tetrafluoromethane are not listed in Appendix A as highly hazardous chemicals.
Threshold Planning Quantity (TPQ): None
STATE REGULATIONS:
CALIFORNIA:
Proposition 65: This product does NOT contain any listed
substances which the State of California requires warning under
this statute.
SECTION 16. SUPPLEMENTAL INFORMATION
NFPA RATING: O2 CF4 HMIS RATING: O2 CF4
HEALTH 0 1 HEALTH 0 0
FLAMMABILITY 0 0 FLAMMABILITY 0 0
REACTIVITY 0 0 REACTIVITY 0 0
SPECIAL Ox None
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