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                     MATERIAL SAFETY DATA SHEET



1. CHEMICAL PRODUCT AND COMPANY IDENTIFICATION



MATHESON TRI-GAS, INC.                                   EMERGENCY CONTACT:

959 ROUTE 46 EAST                                        CHEMTREC 1-800-424-9300

PARSIPPANY, NEW JERSEY 07054-0624                        INFORMATION CONTACT:

                                                         973-257-1100



SUBSTANCE: DICHLOROSILANE



TRADE NAMES/SYNONYMS:

MTG MSDS 27; DICHLOROSILICANE; UN 2189; MAT06970; RTECS VV3050000



CHEMICAL FAMILY: silicon, hydrides



CREATION DATE: Jan 24 1989

REVISION DATE: Mar 19 2003





2. COMPOSITION, INFORMATION ON INGREDIENTS



COMPONENT: DICHLOROSILANE

CAS NUMBER: 4109-96-0

PERCENTAGE: 100.0





3. HAZARDS IDENTIFICATION



NFPA RATINGS (SCALE 0-4): HEALTH=4 FIRE=4 REACTIVITY=2



EMERGENCY OVERVIEW:

COLOR: colorless

PHYSICAL FORM: gas

ODOR: irritating odor

MAJOR HEALTH HAZARDS: respiratory tract burns, skin burns, eye burns, mucous membrane burns

PHYSICAL HAZARDS: Flammable gas. May cause flash fire. May polymerize. Containers may rupture or

explode. May react on contact with air, heat, light or water.



POTENTIAL HEALTH EFFECTS:

INHALATION:

SHORT TERM EXPOSURE: burns, difficulty breathing, headache, dizziness, bluish skin color, lung

congestion

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LONG TERM EXPOSURE: digestive disorders

SKIN CONTACT:

SHORT TERM EXPOSURE: burns

LONG TERM EXPOSURE: same as effects reported in short term exposure

EYE CONTACT:

SHORT TERM EXPOSURE: irritation (possibly severe)

LONG TERM EXPOSURE: same as effects reported in short term exposure

INGESTION:

SHORT TERM EXPOSURE: burns

LONG TERM EXPOSURE: same as effects reported in short term exposure





4. FIRST AID MEASURES



INHALATION: If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not

breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate

medical attention.



SKIN CONTACT: Wash skin with soap and water for at least 15 minutes while removing contaminated

clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing and

shoes before reuse. Destroy contaminated shoes.



EYE CONTACT: Immediately flush eyes with plenty of water for at least 15 minutes. Then get immediate

medical attention.



INGESTION: If a large amount is swallowed, get medical attention.



NOTE TO PHYSICIAN: For inhalation, consider oxygen.





5. FIRE FIGHTING MEASURES



FIRE AND EXPLOSION HAZARDS: Severe fire hazard. Gas/air mixtures are explosive. The gas is

heavier than air. Vapors or gases may ignite at distant ignition sources and flash back.



EXTINGUISHING MEDIA: carbon dioxide, regular dry chemical



Large fires: Use regular foam or flood with fine water spray.



FIRE FIGHTING: Move container from fire area if it can be done without risk. Cool containers with water

spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: If

this is impossible then take the following precautions: Keep unnecessary people away, isolate hazard area

and deny entry. Let the fire burn. Withdraw immediately in case of rising sound from venting safety device

or any discoloration of tanks due to fire. For tank, rail car or tank truck: Let burn unless leak can be stopped

immediately. For smaller tanks or cylinders, extinguish and isolate from other flammables. Evacuation

radius: 800 meters (1/2 mile). Do not attempt to extinguish fire unless flow of material can be stopped first.

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Cool containers with water spray until well after the fire is out. Apply water from a protected location or

from a safe distance. Do not get water directly on material. Large fires: Flood with fine water spray. Reduce

vapors with water spray. Avoid inhalation of material or combustion by-products. Stay upwind and keep out

of low areas.



FLASH POINT: -35 F (-37 C)

LOWER FLAMMABLE LIMIT: 4.1%

UPPER FLAMMABLE LIMIT: 99%

AUTOIGNITION: 136 F (58 C)





6. ACCIDENTAL RELEASE MEASURES



OCCUPATIONAL RELEASE:

Avoid heat, flames, sparks and other sources of ignition. Do not touch spilled material. Stop leak if possible

without personal risk. Reduce vapors with water spray. Do not get water inside container. Small spills:

Absorb with sand or other non-combustible material. Collect spilled material in appropriate container for

disposal. Large spills: Dike for later disposal. Remove sources of ignition. Keep unnecessary people away,

isolate hazard area and deny entry.





7. HANDLING AND STORAGE



STORAGE: Store and handle in accordance with all current regulations and standards. Keep separated from

incompatible substances.





8. EXPOSURE CONTROLS, PERSONAL PROTECTION



EXPOSURE LIMITS:

DICHLOROSILANE:

No occupational exposure limits established.



VENTILATION: Provide local exhaust or process enclosure ventilation system. Ensure compliance with

applicable exposure limits.



EYE PROTECTION: Wear splash resistant safety goggles with a faceshield. Provide an emergency eye

wash fountain and quick drench shower in the immediate work area.



CLOTHING: Wear appropriate chemical resistant clothing.



GLOVES: Wear appropriate chemical resistant gloves.



RESPIRATOR: Under conditions of frequent use or heavy exposure, respiratory protection may be needed.

Respiratory protection is ranked in order from minimum to maximum. Consider warning properties before

use.

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For Unknown Concentrations or Immediately Dangerous to Life or Health -

Any supplied-air respirator with full facepiece and operated in a pressure-demand or other positive-pressure

mode in combination with a separate escape supply.

Any self-contained breathing apparatus with a full facepiece.





9. PHYSICAL AND CHEMICAL PROPERTIES



PHYSICAL STATE: gas

COLOR: colorless

ODOR: irritating odor

MOLECULAR FORMULA: H2-SI-CL2

BOILING POINT: 46 F (8 C)

FREEZING POINT: -188 F (-122 C)

VAPOR PRESSURE: 1.7 atm @ 20 C

VAPOR DENSITY (air=1): 3.5

SPECIFIC GRAVITY (water=1): 1.2

WATER SOLUBILITY: reacts

PH: acidic in solution

VOLATILITY: Not applicable

ODOR THRESHOLD: Not available

EVAPORATION RATE: Not applicable

COEFFICIENT OF WATER/OIL DISTRIBUTION: Not applicable

SOLVENT SOLUBILITY:

Soluble: benzene, carbon tetrachloride, ether





10. STABILITY AND REACTIVITY



REACTIVITY: May polymerize violently or explosively. Avoid contact with incompatible materials.



CONDITIONS TO AVOID: Avoid heat, flames, sparks and other sources of ignition. Minimize contact

with material. Keep out of water supplies and sewers.



INCOMPATIBILITIES: combustible materials, halo carbons, oxidizing materials



HAZARDOUS DECOMPOSITION:

Thermal decomposition products: acid halides, halogenated compounds, crystalline silica, acid halides,

oxides of silicon



POLYMERIZATION: May polymerize violently or explosively. Avoid contact with incompatible

materials.





11. TOXICOLOGICAL INFORMATION

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DICHLOROSILANE:

TOXICITY DATA:

215 ppm inhalation-rat LC50

LOCAL EFFECTS:

Corrosive: inhalation, skin, eye, ingestion

ACUTE TOXICITY LEVEL:

Toxic: inhalation





12. ECOLOGICAL INFORMATION



Not available





13. DISPOSAL CONSIDERATIONS



Dispose in accordance with all applicable regulations.





14. TRANSPORT INFORMATION



U.S. DOT 49 CFR 172.101:

PROPER SHIPPING NAME: Dichlorosilane

ID NUMBER: UN2189

HAZARD CLASS OR DIVISION: 2.3

LABELING REQUIREMENTS: 2.3; 2.1; 8

QUANTITY LIMITATIONS:

PASSENGER AIRCRAFT OR RAILCAR: Forbidden

CARGO AIRCRAFT ONLY: Forbidden

ADDITIONAL SHIPPING DESCRIPTION: Toxic-Inhalation Hazard Zone B



CANADIAN TRANSPORTATION OF DANGEROUS GOODS:

SHIPPING NAME: Dichlorosilane

UN NUMBER: UN2189

CLASS: 2.3; 2.1; 8





15. REGULATORY INFORMATION



U.S. REGULATIONS:

CERCLA SECTIONS 102a/103 HAZARDOUS SUBSTANCES (40 CFR 302.4): Not regulated.



SARA TITLE III SECTION 302 EXTREMELY HAZARDOUS SUBSTANCES (40 CFR 355.30): Not

regulated.



SARA TITLE III SECTION 304 EXTREMELY HAZARDOUS SUBSTANCES (40 CFR 355.40): Not

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regulated.



SARA TITLE III SARA SECTIONS 311/312 HAZARDOUS CATEGORIES (40 CFR 370.21):

ACUTE: Yes

CHRONIC: No

FIRE: Yes

REACTIVE: Yes

SUDDEN RELEASE: Yes



SARA TITLE III SECTION 313 (40 CFR 372.65): Not regulated.



OSHA PROCESS SAFETY (29CFR1910.119):

DICHLOROSILANE: 2500 LBS TQ



STATE REGULATIONS:

California Proposition 65: Not regulated.



CANADIAN REGULATIONS:

WHMIS CLASSIFICATION: ABD1F



NATIONAL INVENTORY STATUS:

U.S. INVENTORY (TSCA): Listed on inventory.



TSCA 12(b) EXPORT NOTIFICATION: Not listed.



CANADA INVENTORY (DSL/NDSL): Not determined.





16. OTHER INFORMATION



©Copyright 1984-2005 MDL Information Systems, Inc. All rights reserved.



MATHESON TRI-GAS, INC. MAKES NO EXPRESS OR IMPLIED WARRANTIES,

GUARANTEES OR REPRESENTATIONS REGARDING THE PRODUCT OR THE

INFORMATION HEREIN, INCLUDING BUT NOT LIMITED TO ANY IMPLIED WARRANTY

OF MERCHANTABILITY OR FITNESS FOR USE. MATHESON TRI-GAS, INC. SHALL NOT BE

LIABLE FOR ANY PERSONAL INJURY, PROPERTY OR OTHER DAMAGES OF ANY

NATURE, WHETHER COMPENSATORY, CONSEQUENTIAL, EXEMPLARY, OR

OTHERWISE, RESULTING FROM ANY PUBLICATION, USE OR RELIANCE UPON THE

INFORMATION HEREIN.