MATERIAL SAFETY DATA SHEET (MSDS)
HEXA METHYL DI SILAZANE - HMDS
1. Product Identification
Synonyms:
1,1,1,3,3,3-hexamethyldisilazane; HMDS; OAP; 1,1,1-trimethyl-N-(trimethylsilyl)
Silaramine;
Bis(Trimethylsilyl)Amine
CAS No.:
999-97-3
Molecular Weight:
161.39
Chemical Formula:
(CH3)3SiNHSi(CH3)3
2. Composition/Information on Ingredients
Ingredient: Hexamethyldisilazane
CAS No : 999-97-3 99
Percent Hazardous : 100% Yes
3. Hazards Identification
Emergency Overview
WARNING! FLAMMABLE LIQUID AND VAPOR. MAY BE HARMFUL IF
SWALLOWED, INHALED OR ABSORBED THROUGH SKIN. MAY CAUSE
SEVERE IRRITATION OR BURNS TO SKIN, EYES, AND RESPIRATORY
TRACT
Health Rating: 2 - Moderate
Flammability Rating: 4 - Extreme (Flammable)
Reactivity Rating: 2 - Moderate
Contact Rating: 3 - Severe (Corrosive)
Lab Protective Equip: GOGGLES & SHIELD; LAB COAT & APRON; VENT HOOD;
PROPER GLOVES; CLASS B EXTINGUISHER
Storage Color Code: Red Stripe (Store Separately)
Potential Health Effects
Information on the human health effects from exposure to this substance is
limited. However, it is closely related to chemicals that cause severe eye and skin
burns.
Inhalation:
Excessive inhalation of vapors can irritate the respiratory tract and possibly lead
to fluid accumulation in the lungs. Mild anesthesia has also been reported.
Page: 1 of 6
Ingestion:
Toxicity data limited. Not considered a serious hazard although ammonia and
hydrous silica compounds may be formed by hydrolysis in the digestive system.
Gastrointestinal upset may follow the ingestion of appreciable amounts. Vomiting
can present the additional hazard of getting HMDS into the lungs.
Skin Contact:
Moderate irritant, especially to sensitive areas. Alkaline reaction can cause
soreness with inflammation in acute cases. May be absorbed through skin.
Eye Contact:
Irritant, may cause severe burns on direct contact with liquid HMDS.
Chronic Exposure:
No information found.
Aggravation of Pre-existing Conditions:
Persons with pre-existing skin disorders or eye problems or impaired respiratory
function may be more susceptible to the effects of the substance.
4. First Aid Measures
Inhalation:
Remove to fresh air. If not breathing, give artificial respiration. If breathing is
difficult, give oxygen. Call a physician immediately.
Ingestion:
If swallowed, DO NOT INDUCE VOMITING. Give large quantities of water. Never
give anything by mouth to an unconscious person. Get medical attention
immediately.
Skin Contact:
Wash exposed area with soap and water. Get medical advice if irritation
develops.
Eye Contact:
Immediately flush eyes with plenty of water for at least 15 minutes, lifting lower
and upper eyelids occasionally.
Get medical attention immediately.
5. Fire Fighting Measures
Fire:
Flash point: 11C (52F) CC
Autoignition temperature: 380C (716F)
HEXAMETHYLDISILAZANE
Flammable limits in air % by volume:
lel: 0.8; uel: 16.3
Flammable.
Explosion:
Above flash point, vapor-air mixtures are explosive within flammable limits noted
above. Sealed containers may rupture when heated. Contact with strong
oxidizers may cause fire. Sensitive to static discharge.
Page: 2 of 6
Fire Extinguishing Media:
Dry chemical, alcohol-resistant foam, or carbon dioxide. Do not use water.
Special Information:
In the event of a fire, wear full protective clothing and NIOSH-approved self-
contained breathing apparatus with full face-piece operated in the pressure
demand or other positive pressure mode. This highly flammable liquid must be
kept from sparks, open flame, hot surfaces, and all sources of heat and ignition.
Vapors can flow along surfaces to distant ignition source and flash back. Water
spray may be used to extinguish surrounding fire and cool exposed containers.
Water spray will also reduce fume and irritant gases.
6. Accidental Release Measures
Ventilate area of leak or spill. Remove all sources of ignition. Wear appropriate
personal protective equipment as specified in Section 8. Isolate hazard area.
Keep unnecessary and unprotected personnel from entering. Contain and recover
liquid when possible. Use non-sparking tools and equipment. Collect liquid in an
appropriate container or absorb with an inert material (e. g., vermiculite, dry
sand, earth), and place in a chemical waste container. Do not use combustible
materials, such as saw dust. Do not flush to sewer!
7. Handling and Storage
Protect against physical damage. Store in a cool, dry well-ventilated location,
away from any area where the fire hazard may be acute. Outside or detached
storage is preferred. Separate from incompatibles. Containers should be bonded
and grounded for transfers to avoid static sparks. Storage and use areas should
be No Smoking areas. Use non-sparking type tools and equipment, including
explosion proof ventilation. Do not attempt to clean empty containers since
residue is difficult to remove. Do not pressurize, cut, weld, braze, solder, drill,
grind or expose such containers to heat, sparks, flame, static electricity or other
sources of ignition: they may explode and cause injury or death. Containers of
this material may be hazardous when empty since they retain product residues
(vapors, liquid); observe all warnings and precautions listed for the product.
8. Exposure Controls/Personal Protection
Airborne Exposure Limits:
None established.
Ventilation System:
A system of local and/or general exhaust is recommended to keep employee
exposures as low as possible. Local exhaust ventilation is generally preferred
because it can control the emissions of the contaminant at its source, preventing
dispersion of it into the general work area. Please refer to the ACGIH document,
IndustrialVentilation, A Manual of Recommended Practices, most recent edition,
for details.
Page: 3 of 6
Personal Respirators (NIOSH Approved):
For conditions of use where exposure to the substance is apparent, consult an
industrial hygienist. For emergencies, or instances where the exposure levels are
not known, use a full-face-piece positive-pressure, air-supplied respirator.
WARNING: Air purifying respirators do not protect workers in oxygen-deficient
atmospheres.
HEXAMETHYLDISILAZANE
Skin Protection:
Wear impervious protective clothing, including boots, gloves, lab coat, apron or
coveralls, as appropriate, to prevent skin contact.
Eye Protection:
Use chemical safety goggles and/or a full face shield where splashing is possible.
Maintain eye wash fountain and quick-drench facilities in work area.
9. Physical and Chemical Properties
Appearance:
Clear, colorless liquid.
Odor:
Ammonia odor.
Solubility:
Hydrolyses slowly at room temperature.
Specific Gravity:
0.77 @ 25C / 77F
pH:
8.5
% Volatiles by volume @ 21C (70F):
100
Boiling Point:
125C (257F)
Melting Point:
-70C (-94F)
Vapor Density (Air=1):
4.6
Vapor Pressure (mm Hg):
20 @ 20C (68F)
Evaporation Rate (BuAc=1):
< 1 (Ether = 1)
10. Stability and Reactivity
Stability:
Stable under ordinary conditions of use and storage.
Hazardous Decomposition Products:
May form silicon dioxide, carbon oxides and nitrogen oxides when heated to
decomposition. Ammonia or formaldehyde when exposed to heat and water.
Page: 4 of 6
Hazardous Polymerization:
Will not occur.
Incompatibilities:
Water, methyl alcohol, acids, strong alkalis, and oxidizing agents.
Conditions to Avoid:
Heat, ignition sources, moisture, incompatibles.
11. Toxicological Information
LD50, oral, rat = 850 mg / Kg. LD50, skin, rabbit = 710 uL/Kg. LC50, inhalation,
rat = 8700mg / m3 / 4 Hr.
HEXAMETHYLDISILAZANE
12. Ecological Information
Environmental Fate:
No information found.
Environmental Toxicity:
No information found.
13. Disposal Considerations
Whatever cannot be saved for recovery or recycling should be handled as
hazardous waste and sent to a RCRA approved incinerator or disposed in a RCRA
approved waste facility. Processing, use or contamination of this product may
change the waste management options. State and local disposal regulations may
differ from federal
disposal regulations. Dispose of container and unused contents in accordance
with federal, state and local requirements.
14. Transport Information
Domestic (Land, D.O.T./Water, I.M.O.)
Proper Shipping Name:
FLAMMABLE LIQUID, CORROSIVE, N.O.S. (HEXAMETHYLDISILAZANE)
Hazard Class:
3, 8
UN/NA:
UN2924
Packing Group: II
Information reported for product/size:
340LB
Page: 5 of 6
15. Regulatory Information
Hexamethyldisilazane (999-97-3) Yes Yes Yes Yes
HEXAMETHYLDISILAZANE
Hexamethyldisilazane (999-97-3) No No Yes
Chemical Weapons Convention: No TSCA 12(b): No CDTA: No
SARA 311/312: Acute: Yes Chronic: No Fire: Yes Pressure: No
Reactivity: No (Pure / Liquid)
Australian Hazchem Code:
3WE
Poison Schedule:
None allocated.
WHMIS:
This MSDS has been prepared according to the hazard criteria of the Controlled
Products Regulations (CPR) and the MSDS contains all of the information
required by the CPR.
16. Other Information
NFPA Ratings:
Health: 1 Flammability: 3 Reactivity: 1
Label Hazard Warning:
WARNING! FLAMMABLE LIQUID AND VAPOR. MAY BE HARMFUL IF
SWALLOWED, INHALED OR ABSORBED THROUGH SKIN. MAY CAUSE SEVERE
IRRITATION OR BURNS TO SKIN, EYES, AND RESPIRATORY TRACT
Label Precautions:
Avoid breathing vapor.
Keep container closed.
Use only with adequate ventilation.
Avoid contact with eyes, skin and clothing.
Wash thoroughly after handling.
Label First Aid:
If swallowed, DO NOT INDUCES VOMITING. Give large quantities of water. Never
give anything by mouth to an unconscious person. If inhaled, remove to fresh
air. If not breathing, give artificial respiration. If breathing is difficult, give
oxygen. In case of contact, immediately flush eyes or skin with plenty of water
for at least 15 minutes while removing contaminated clothing and shoes. Wash
clothing before reuse. In all cases call a physician.
Page: 6 of 6
|