Product: Silane P-4649-E Date: October 2001
Praxair Material Safety Data Sheet
1. Chemical Product and Company Identification
Product Name: Silane, compressed (MSDS No. P-4649-E) Trade Name: Silane
Chemical Name: Silicon Tetrahydride Synonyms: Monosilane, silicon tetrahydride,
silicane
Formula: SiH4 Chemical Family: Inorganic hydride
1-800-645-4633* Company Name: Praxair, Inc.
Telephone: Emergencies:
CHEMTREC: 1-800-424-9300* 39 Old Ridgebury Road
1-800-PRAXAIR Danbury, CT 06810-5113
Routine:
* Call emergency numbers 24 hours a day only for spills, leaks, fire, exposure, or accidents involving this
product. For routine information, contact your supplier, Praxair sales representative, or call
1-800-PRAXAIR (1-800-772-9247).
2. Composition/Information on Ingredients
See section 16 for important information about mixtures.
CAS CONCEN-
INGREDIENT NUMBER TRATION OSHA PEL ACGIH TLV-TWA (2001)
Silane 7803-62-5 >99%* None currently established. 5 ppm
*The symbol > means 鈥済reater than鈥?; the symbol <, 鈥渓ess than.
3. Hazards Identification
EMERGENCY OVERVIEW
DANGER! Pyrophoric, flammable high-pressure gas.
Can ignite on contact with air.
May form explosive mixtures with air.
Does not need a source of ignition.
Harmful if inhaled.
May cause respiratory system damage.
Self-contained breathing apparatus and protective clothing
may be required by rescue workers.
Odor: Choking
THRESHOLD LIMIT VALUE: TLV-TWA, 5 ppm (ACGIH, 2001). TLV-TWAs should be used as a
guide in the control of health hazards and not as fine lines between safe and dangerous concentrations.
Copyright 漏 1980, 1986, 1989, 1992, 1997, 2001, Praxair Technology, Inc. Page 1 of 8
All rights reserved.
Revised
Product: Silane P-4649-E Date: October 2001
EFFECTS OF A SINGLE (ACUTE) OVEREXPOSURE:
INHALATION鈥揗ay cause headache, nausea, and irritation of the respiratory tract.
SKIN CONTACT鈥揘o information available.
SWALLOWING鈥揂n unlikely route of exposure. This product is a gas at normal temperature and
pressure.
EYE CONTACT鈥揘o information available.
EFFECTS OF REPEATED (CHRONIC) OVEREXPOSURE: No information available.
OTHER EFFECTS OF OVEREXPOSURE: None known.
MEDICAL CONDITIONS AGGRAVATED BY OVEREXPOSURE: The toxicology and the
physical and chemical properties of this product suggest that overexposure is unlikely to aggravate
existing medical conditions.
SIGNIFICANT LABORATORY DATA WITH POSSIBLE RELEVANCE TO HUMAN HEALTH
HAZARD EVALUATION: None known.
CARCINOGENICITY: Silane is not listed by NTP, OSHA, or IARC.
4. First Aid Measures
INHALATION: Immediately remove to fresh air. If not breathing, give artificial respiration. If
breathing is difficult, qualified personnel may give oxygen. Call a physician.
SKIN CONTACT: Wash with soap and water. If irritation persists, seek medical attention.
SWALLOWING: This product is a gas at normal temperature and pressure.
EYE CONTACT: Flush eyes with water. Hold the eyelids open and away from the eyeballs to ensure
that all surfaces are flushed thoroughly. If irritation persists, seek medical attention.
NOTES TO PHYSICIAN: There is no specific antidote. Treatment of overexposure should be directed
at the control of symptoms and the clinical condition of the patient.
5. Fire Fighting Measures
FLASH POINT (test method): Not applicable
AUTOIGNITION TEMPERATURE: Not available
FLAMMABLE LIMITS IN AIR, % by volume: LOWER: Approximately 1% UPPER: 96%
EXTINGUISHING MEDIA: Gas may ignite spontaneously in air. (Fire cannot be extinguished.)
SPECIAL FIRE FIGHTING PROCEDURES: DANGER! Pyrophoric, flammable high-pressure
gas. Evacuate all personnel from danger area. Do not use halon fire extinguisher. Do not approach area
without self-contained breathing apparatus and protective clothing. Immediately spray cylinders with
water from maximum distance until cool. Reverse flow into cylinder may cause rupture. (See section 16.)
Stop flow of gas if without risk, while continuing cooling water spray. If flow of gas cannot be shut off,
allow fire to burn out. Reduce combustion products with water spray or fog. Remove all cylinders from
area if without risk. If fire is extinguished while gas is present, explosive reignition may occur. On-site
fire brigades must comply with OSHA 29 CFR 1910.156.
Page 2 of 8
Product: Silane P-4649-E Date: October 2001
UNUSUAL FIRE AND EXPLOSION HAZARDS: Gas may ignite spontaneously in air. At low
ambient temperatures and high rates of flow, ignition may be delayed, and under sonic flow conditions,
may not occur. Vapors may spread. Flammable vapors can be ignited by pilot lights, other flames,
smoking, sparks, heaters, electrical equipment, static discharge, or other ignition sources at locations
distant from product handling point. May form explosive mixtures with air. Heat of fire can build pressure
in cylinder and cause it to rupture. No part of a cylinder should be subjected to a temperature higher than
125掳F (52掳C). Silane cylinders are equipped with a pressure relief device. (Exceptions may exist where
authorized be DOT.)
HAZARDOUS COMBUSTION PRODUCTS: See section 10.
6. Accidental Release Measures
STEPS TO BE TAKEN IF MATERIAL IS RELEASED OR SPILLED: DANGER! Pyrophoric,
flammable high-pressure gas. May ignite spontaneously in air. Forms explosive mixtures with air. (See
section 5.) Immediately evacuate all personnel from danger area. Use self-contained breathing apparatus
and protective clothing where needed. Reduce combustion products with fog or fine water spray. Reverse
flow into cylinder may cause rupture. (See section 16.) Shut off flow if without risk. Ventilate area or
move cylinder to a well-ventilated area. Prevent waste from contaminating surrounding environment.
EMERGENCY DISPOSAL: Silane, silane mixtures, and silane purge or vent gases can be readily
treated to destroy the silane by several means:
鈥? Burning the silane by slowly bleeding silane-containing gases into a continuously burning pilot
light
鈥? Venting the silane-containing gases slowly into the air through a water seal and allowing the
silane to self-ignite and burn in an isolated area away from personnel
鈥? Scrubbing the silane through a caustic bed or caustic solution (10% sodium hydroxide)
鈥? Reacting the silane with aqueous mercuric chloride
WASTE DISPOSAL METHOD: Prevent waste from contaminating the surrounding environment.
Keep personnel away. Discard any product, residue, disposable container, or liner in an environmentally
acceptable manner, in full compliance with federal, state, and local regulations. If necessary, call your
local supplier for assistance.
7. Handling and Storage
PRECAUTIONS TO BE TAKEN IN STORAGE: Store and use with adequate ventilation. Separate
cylinders containing this product from oxygen, chlorine, and other oxidizers by at least 20 ft (6.1 m) or
use a barricade of noncombustible material. This barricade should be at least 5 ft (1.53 m) high and have a
fire resistance rating of at least 陆 hour. Firmly secure cylinders upright to keep them from falling or being
knocked over. Screw valve protection cap firmly in place by hand. Post 鈥淣o Smoking or Open Flames鈥?
signs in storage and use areas. There must be no sources of ignition. All electrical equipment in storage
areas must be explosion-proof. Storage areas must meet national electric codes for Class 1 hazardous
areas. Store only where temperature will not exceed 125掳F (52掳C). Store full and empty cylinders
separately. Use a first-in, first-out inventory system to prevent storing full cylinders for long periods.
Page 3 of 8
Product: Silane P-4649-E Date: October 2001
PRECAUTIONS TO BE TAKEN IN HANDLING: Protect cylinders from damage. Use a suitable
hand truck to move cylinders; do not drag, roll, slide, or drop. All piped silane systems and associated
equipment must be grounded. Electrical equipment must be non-sparking or explosion-proof. Never
attempt to lift a cylinder by its cap; the cap is intended solely to protect the valve. Never insert an object
(e.g., wrench, screwdriver, pry bar) into cap openings; doing so may damage the valve and cause a leak.
Use an adjustable strap wrench to remove over-tight or rusted caps. Open valve slowly. If valve is hard to
open, discontinue use and contact your supplier. For other precautions in using silane, see section 16.
8. Exposure Controls/Personal Protection
VENTILATION/ENGINEERING CONTROLS:
LOCAL EXHAUST鈥揢se an explosion-proof local exhaust system with sufficient airflow velocity to
prevent oxygen deficiency and keep hazardous fumes and gases below applicable TLVs in the
worker鈥檚 breathing zone.
MECHANICAL (general)鈥揘ot recommended as a primary ventilation system to control worker's
exposure.
SPECIAL鈥揘one
OTHER鈥揘one
RESPIRATORY PROTECTION: Use air-supplied respirators for concentrations up to 10 times the
applicable permissible exposure limit. For higher concentrations, a full-face, self-contained breathing
apparatus is required. Respirators must be acceptable to MSHA and NIOSH. Respiratory protection must
conform to OSHA rules as specified in 29 CFR 1910.134.
SKIN PROTECTION: Wear work gloves when handling cylinders.
EYE PROTECTION: Wear safety glasses when handling cylinders. Select eye protection in accordance
with OSHA 29 CFR 1910.133.
OTHER PROTECTIVE EQUIPMENT: Metatarsal shoes for cylinder handling. Select in accordance
with OSHA 29 CFR 1910.132 and 1910.133. Fire-resistant clothing, ear protection, and face shields are
recommended when connecting or disconnecting transfer lines. Select in accordance with OSHA 29 CFR
1910.132 and 1910.133. Regardless of protective equipment, never touch live electrical parts.
9. Physical and Chemical Properties
MOLECULAR WEIGHT: 32.12
SPECIFIC GRAVITY (Air = 1) at 70掳F (21.1掳C) and 1 atm: 1.2
0.0838 lb/ft3 (1.342 kg/m3)
GAS DENSITY at 68掳F (20掳C) and 1 atm:
SOLUBILITY IN WATER: Negligible
PERCENT VOLATILES BY VOLUME: 100
BOILING POINT at 1 atm: -169掳F (-112掳C)
MELTING POINT at 1 atm: -300.5掳F (-184.7掳C)
APPEARANCE, ODOR, AND STATE: Colorless gas at normal temperature and pressure; choking
odor.
Page 4 of 8
Product: Silane P-4649-E Date: October 2001
10. Stability and Reactivity
Unstable Stable
STABILITY:
NOTE: Silane is stable as shipped and when stored, handled, and used under the conditions specified in this
MSDS, sections 7, 10, and 16. Silane must not be exposed to air or moisture.
INCOMPATIBILITY (materials to avoid): Air, water, solutions of bases, oxidizing agents, chlorine, and
halogens will react violently with halocarbons.
HAZARDOUS DECOMPOSITION PRODUCTS: Hydrogen, silica dust, amorphous silicon dioxide.
Powder produced by the decomposition of silane in the absence of air may be flammable. (Note:
Minimum ignition energy may be less than 5 mJ. Kst may be greater than 400 bar meters-seconds鈥?1.)
May Occur Will Not Occur
HAZARDOUS POLYMERIZATION:
CONDITIONS TO AVOID: Temperatures in excess of 752掳F (400掳C)
11. Toxicological Information
See section 3.
12. Ecological Information
No adverse ecological effects expected. Silane does not contain any Class I or Class II ozone-depleting
chemicals. Silane is not listed as a marine pollutant by DOT.
13. Disposal Considerations
WASTE DISPOSAL METHOD: Do not attempt to dispose of residual or unused quantities. Return
cylinder to supplier.
14. Transport Information
Silane, compressed
DOT/IMO SHIPPING NAME:
HAZARD IDENTIFICATION PRODUCT
2.1 UN 2203 None
CLASS: NUMBER: RQ:
FLAMMABLE GAS
SHIPPING LABEL(s):
FLAMMABLE GAS
PLACARD (when required):
SPECIAL SHIPPING INFORMATION: Cylinders should be transported in a secure position, in a
well-ventilated vehicle. Cylinders transported in an enclosed, nonventilated compartment of a vehicle can
present serious safety hazards.
Shipment of compressed gas cylinders that have been filled without the owner's consent is a violation of
federal law [49 CFR 173.301(b)].
15. Regulatory Information
The following selected regulatory requirements may apply to this product. Not all such requirements are
identified. Users of this product are solely responsible for compliance with all applicable federal, state,
and local regulations.
Page 5 of 8
Product: Silane P-4649-E Date: October 2001
U.S. FEDERAL REGULATIONS:
EPA (ENVIRONMENTAL PROTECTION AGENCY)
CERCLA: COMPREHENSIVE ENVIRONMENTAL RESPONSE, COMPENSATION, AND
LIABILITY ACT OF 1980 (40 CFR Parts 117 and 302):
Reportable Quantity (RQ): None
SARA: SUPERFUND AMENDMENT AND REAUTHORIZATION ACT:
SECTIONS 302/304: Require emergency planning based on Threshold Planning Quantity
(TPQ) and release reporting based on Reportable Quantities (RQ) of Extremely Hazardous
Substances (EHS) (40 CFR Part 355):
Threshold Planning Quantity (TPQ): None
EHS RQ (40 CFR 355): None
SECTIONS 311/312: Require submission of MSDSs and reporting of chemical inventories
with identification of EPA hazard categories. The hazard categories for this product are as
follows:
IMMEDIATE: Yes PRESSURE: Yes
DELAYED: No REACTIVITY: Yes
FIRE: Yes
SECTION 313: Requires submission of annual reports of release of toxic chemicals that
appear in 40 CFR Part 372.
Silane does not require reporting under Section 313.
40 CFR 68: RISK MANAGEMENT PROGRAM FOR CHEMICAL ACCIDENTAL
RELEASE PREVENTION: Requires development and implementation of risk management
programs at facilities that manufacture, use, store, or otherwise handle regulated substances in
quantities that exceed specified thresholds.
Silane is not listed as a regulated substance.
TSCA: TOXIC SUBSTANCES CONTROL ACT: Silane is listed on the TSCA inventory.
OSHA: OCCUPATIONAL SAFETY AND HEALTH ADMINISTRATION:
29 CFR 1910.119: PROCESS SAFETY MANAGEMENT OF HIGHLY HAZARDOUS
CHEMICALS: Requires facilities to develop a process safety management program based on
Threshold Quantities (TQ) of highly hazardous chemicals.
Silane is not listed in Appendix A as a highly hazardous chemical. However, any process that
involves a flammable gas on site in one location in quantities of 10,000 lb (4536 kg) or
greater is covered under this regulation unless the gas is used as a fuel.
STATE REGULATIONS:
CALIFORNIA: Silane is not listed by California under the SAFE DRINKING WATER AND
TOXIC ENFORCEMENT ACT OF 1986 (Proposition 65).
PENNSYLVANIA: Silane is subject to the PENNSYLVANIA WORKER AND COMMUNITY
RIGHT-TO-KNOW ACT (35 P.S. Sections 7301-7320).
Page 6 of 8
Product: Silane P-4649-E Date: October 2001
16. Other Information
Be sure to read and understand all labels and instructions supplied with all containers of this product.
OTHER HAZARDOUS CONDITIONS OF HANDLING, STORAGE, AND USE: Pyrophoric,
flammable high-pressure gas. Use piping and equipment adequately designed to withstand pressures to
be encountered. Use only in a closed system thoroughly purged with an inert gas prior to introduction of
silane from cylinder. Use only spark-proof tools and explosion-proof equipment. Keep away from heat,
sparks, and open flame. Close cylinder valve after each use; keep closed even when empty. Prevent
reverse flow. Reverse flow into cylinder may cause rupture. Use a check valve or other protective device
in any line or piping from the cylinder. Store and use with adequate ventilation. Isolate from all other
products. When returning cylinder to supplier, be sure valve is closed; then tightly install valve outlet
cap or plug. Never work on a pressurized system. If there is a leak, close the cylinder valve. Blow the
system down in an environmentally safe manner in compliance with all federal, state, and local laws; then
repair the leak. Never place a compressed gas cylinder where it may become part of an electrical circuit.
NOTE: Prior to using any plastics, confirm their compatibility with silane.
Recommended Equipment: In semiconductor process gas and other suitable applications, Praxair
recommends the use of engineering controls such as gas cabinet enclosures, automatic gas panels (used to
purge systems on cylinder changeout), excess-flow valves throughout the gas distribution system, double
containment for the distribution system, and continuous gas monitors.
MIXTURES: When you mix two or more gases or liquefied gases, you can create additional,
unexpected hazards. Obtain and evaluate the safety information for each component before you produce
the mixture. Consult an industrial hygienist or other trained person when you evaluate the end product.
Remember, gases and liquids have properties that can cause serious injury or death.
HAZARD RATING SYSTEMS:
NFPA RATINGS: HMIS RATINGS:
HEALTH HEALTH
=1 =0
FLAMMABILITY FLAMMABILITY
=4 =4
REACTIVITY REACTIVITY
=3 =3
SPECIAL = None
STANDARD VALVE CONNECTIONS FOR U.S. AND CANADA:
CGA-350
THREADED:
CGA-None
PIN-INDEXED YOKE:
ULTRA-HIGH-INTEGRITY CONNECTION: CGA-632
Use the proper CGA connections. DO NOT USE ADAPTERS. Additional limited-standard
connections may apply. See CGA pamphlets V-1 listed below.
Ask your supplier about free Praxair safety literature as referred to in this MSDS and on the label for this
product. Further information about this product can be found in the following pamphlets published by the
Compressed Gas Association, Inc. (CGA), 4221 Walney Road, 5th Floor, Chantilly, VA 20151-2923,
Telephone (703) 788-2700.
AV-1 Safe Handling and Storage of Compressed Gases
P-1 Safe Handling of Compressed Gases in Containers
V-1 Compressed Gas Cylinder Valve Inlet and Outlet Connections
鈥? Handbook of Compressed Gases, Fourth Edition
Page 7 of 8
Product: Silane P-4649-E Date: October 2001
Praxair asks users of this product to study this MSDS and become aware of product hazards and safety
information. To promote safe use of this product, a user should (1) notify employees, agents, and
contractors of the information in this MSDS and of any other known product hazards and safety
information, (2) furnish this information to each purchaser of the product, and (3) ask each purchaser to
notify its employees and customers of the product hazards and safety information.
The opinions expressed herein are those of qualified experts within Praxair, Inc. We
believe that the information contained herein is current as of the date of this Material
Safety Data Sheet. Since the use of this information and the conditions of use of the
product are not within the control of Praxair, Inc., it is the user鈥檚 obligation to
determine the conditions of safe use of the product.
Praxair MSDSs are furnished on sale or delivery by Praxair or the independent distributors and suppliers
who package and sell our products. To obtain current Praxair MSDSs for these products, contact your
Praxair sales representative or local distributor or supplier. If you have questions regarding Praxair
MSDSs, would like the form number and date of the latest MSDS, or would like the names of the Praxair
suppliers in your area, phone or write the Praxair Call Center (Phone: 1-800-PRAXAIR;
Address: Praxair Call Center, Praxair, Inc., PO Box 44, Tonawanda, NY 14151-0044).
Praxair and the Flowing Airstream design are trademarks or registered trademarks of
Praxair Technology, Inc. in the United States and other countries.
Praxair, Inc.
39 Old Ridgebury Road
Danbury, CT 06810-5113
Page 8 of 8
Printed in USA
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