1254 Chestnut Street
Newton, MA 02464-1418
Tel: (617) 965-5511
Fax: (617) 965-5818
MATERIAL SAFETY DATA SHEET PAGE 1
12 December 2001
SECTION 1. CHEMICAL IDENTIFICATION -----------------------------------------------------
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CHEMICAL NAME: Organic Resin Solution
TRADE NAME: SU-8 Series Resists
PRODUCT #: See Table 1 鈥? Section 9
SECTION 2. COMPOSITION----------------------------------------------------------------------
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INGREDIENTS: Gamma Butyrolactone (CAS: 96-48-0); 22-60%
Mixed Triarylsulfonium/ Hexafluoroantimonate Salt;
(CAS: 89452-37-9)/(CAS: 71449-78-0) See Table 1, Section 9
Propylene Carbonate (CAS: 108-32-7); 1-5%
Epoxy Resin (CAS: 28906-96-9); 35-75%
SECTION 3. HAZARD DATA----------------------------------------------------------------------
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INFLAMMABILITY: Combustible liquid.
SKIN CONTACT: May cause skin irritation.
EYE CONTACT: Severe eye irritant.
INGESTION: May be harmful if swallowed in large quantities.
INHALATION: May cause irritation..
MUTAGENICITY: Not known to be mutagenic.
CARCINOGENICITY: Not considered carcinogenic by NTP, IARC and OSHA
TARGET ORGANS: Eyes, Epidermis.
SECTION 4. FIRST AID MEASURES--------------------------------------------------------------
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INHALATION: No occupational exposure limits have been developed for this material.
Where exposure through inhalation may occur from use, NIOSH
approved respiratory equipment is recommended.
INGESTION: If a large quantity swallowed, give lukewarm water. DO NOT induce
vomiting. Risk of damage to lungs exceeds poisoning risk. Get medical
attention immediately.
SKIN CONTACT: Rinse with water for 15 minutes while removing contaminated clothing
and shoes. Wash affected area with soap and water. Wash contaminated clothing.
EYE CONTACT: Rinse immediately with water, flush for 15 min. lifting eyelids
frequently. Get emergency medical assistance. Prompt action is
essential.
MATERIAL SAFETY DATA SHEET PAGE 2
12 December 2001
CHEMICAL NAME: Organic Resin Solution
TRADE NAME: SU-8 Resist Series
PRODUCT #: See Table 1 鈥? Section 9
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SECTION 5. FIRE FIGHTING MEASURES--------------------------------------------------------
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EXTINGUISHING
MEDIA: Dry chemical, carbon dioxide, foam, water spray, and fog.
SPECIAL FIRE FIGHTING
PRECAUTIONS: Do not enter fire area without proper protection. Fight fire from a
safe distance/protected location. Heat may build enough pressure
to rupture closed containers, spreading fire, increasing risk of
burns/injuries. Use water spray/fog for cooling. Avoid frothing,
steam explosion. Burning liquid may float on water. Although
water-soluble, may not be practical to extinguish fire by water
dilution. Notify authorities immediately if liquid enters sewer, public
waters.
UNUSUAL FIRE OR
EXPLOSION HAZARDS: Heat from fire can generate flammable vapor. When mixed
with air and exposed to ignition source, vapors can burn in open or
explode if confined. Vapors may be heavier than air. May travel long distances along the ground
before igniting and flashing back to vapor source. Fine sprays/mists may be
combustible at temperatures below normal flash point.
SECTION 6. ACCIDENTAL RELEASE PROCEDURES ------------------------------------------
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Evacuate Area.
Eliminate all ignition sources.
Wear self-contained breathing apparatus (SCBA), rubber boots, and heavy rubber gloves. Avoid eye
or skin contact. Cover with dry absorbent material and collect in closed container for disposal using
non-sparking tools. Ventilate area and wash spill sites after material pickup is complete, rinse with
water. All clean up should be carried out in accordance with federal, state, and local regulations. If
required proper authorities should be notified.
SECTION 7. STORAGE AND HANDLING PRECAUTIONS-------------------------------------
--
STORAGE: Store in tightly closed container in a cool environment away from
direct sunlight.
HANDLING: Use only under yellow light.
Keep away from heat, sparks, and flames.
Use only with mechanical exhaust.
Do not contact with skin, eyes, and clothing.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street鈥ewton, MA 02464-1418鈥el:(617)965-5511鈥ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 3
12 December 2001
CHEMICAL NAME: Organic Resin Solution
TRADE NAME: SU-8 Resist Series
PRODUCT #: See Table 1 鈥? Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
Severe eye irritant.
Avoid prolonged or repeated exposure.
Wear heavy rubber gloves.
Wash with soap and water after handling.
Have safety shower and eye wash available.
SECTION 8. EXPOSURE CONTROLS AND PERSONAL PROTECTION----------------------
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RESPIRATORY
PROTECTION: In case of spills, use of self-contained breathing apparatus (SCBA)
is recommended.
VENTILATION: Local or general mechanical ventilation is required.
SKIN PROTECTION: Rubber gloves are recommended.
EYE PROTECTION: Safety goggles are highly recommended.
SECTION 9. PHYSICAL AND CHEMICAL DATA-----------------------------------------------
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APPEARANCE: Pale yellow to clear
ODOR: Slightly sweet
BOILING POINT: 204 潞C (400 潞F)
SPECIFIC GRAVITY: See Table 1 below
VAPOR PRESSURE: 2 mm @ 20 潞C (68 潞F)
H2O SOLUBILITY: See Table 1 below
% VOLATILES: See Table 1 below
EVAPORATION RATE: 1 (BuAc=1)
FLASH POINT: 98 潞C (209 潞F) TCC
AUTOIGNITION TEMP: 437 潞C (820 潞F)
EXPLOSION LIMITS: 3.6 lower
16 upper
Table 1
Name Product# Specific Gravity Volatiles H2O Solubility VOC SbF6 Salt Sb
(g/ml) (% by wt.) (% by wt) (g/L) (% by wt) (% by wt)
SU8-2 Y131240 1.123 60.5 60.5 680 1.9 <1.0%
SU8-5 Y131252 1.164 45-50 45-50 560 2.5 <1.0%
SU8-10 Y131259 1.187 35-40 35-40 490 2.8 <1.0%
SU8-25 Y131263 1.200 35-40 35-40 440 3.0 <1.0%
SU8-50 Y131269 1.219 30-35 30-35 380 3.3 <1.0%
SU8-100 Y131273 1.233 20-30 20-30 330 3.5 <1.0%
SU8-250 Y131274 1.236 20-30 20-30 320 2.2 <1.0%
SU8-500+ Y131275 1.237 20-30 20-30 310 1.5 <1.0%
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street鈥ewton, MA 02464-1418鈥el:(617)965-5511鈥ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 4
12 December 2001
CHEMICAL NAME: Organic Resin Solution
TRADE NAME: SU-8 Resist Series
PRODUCT #: See Table 1 鈥? Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 10. REACTIVITY DATA ---------------------------------------------------------------
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STABILITY: Stable
INCOMPATIBILITY: Strong Oxidizing Agents, Strong Bases, Strong
Acids
HAZARDOUS POLYMERIZATION: Will not occur
HAZARDOUS COMBUSTION OR
DECOMPOSITION PRODUCTS: Carbon Monoxide, Aldehydes, Acids, Hydrogen
Fluoride Gas.
SECTION 11. TOXICITY HAZARDS--------------------------------------------------------------
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Gamma Butyrolactone
In animal studies, due to the rate of dermal absorption of GBL, dermal toxicity is assumed to be
essential equal to oral toxicity. In humans, oral ingestion of solutions containing high concentrations of
GBL has caused reversible coma.
Mixed Triarylsulfonium/Hexafluoroantimonate Salt/Propylene Carbonate
This material was mutagenic in the Ames bacterial assay. It is inactive, however, in the in vivo
mouse micronucleus test.
SECTION 12. ECOLOGICAL DATA---------------------------------------------------------------
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No data available at this time.
SECTION 13. DISPOSAL CONSIDERATIONS---------------------------------------------------
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Burn in an EPA-licensed chemical incinerator equipped with an afterburner and scrubber at an
approved waste disposal facility. Observe all federal, state, and local environmental regulations.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street鈥ewton, MA 02464-1418鈥el:(617)965-5511鈥ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 5
12 December 2001
CHEMICAL NAME: Organic Resin Solution
TRADE NAME: SU-8 Resist Series
PRODUCT #: See Table 1 鈥? Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 14. TRANSPORTATION INFORMATION---------------------------------------------
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HAZARD CLASSIFICATION: Not Regulated
SHIPPING NAME: Not Regulated
UN NUMBER: Not Regulated
PACKING GROUP Not Regulated
SECTION 15. REGULATORY INFORMATION---------------------------------------------------
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HAZARDOUS LISTINGS: All ingredients appear on the TSCA Inventory of
Chemical Substances, EINECS, and the Japan
Hazardous Chemical Listing.
SARA Title III: This product IS NOT subject to SARA Title III, Section
313 Reporting Requirements.
Calif. SCAQMD Rule 443.1 VOC's: See Table 1 鈥? Section 9
SECTION 16. ADDITIONAL PRECAUTIONS AND COMMENTS------------------------------
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To the best of our knowledge, the above information is believed to be accurate but does not
claim to be all-inclusive and is intended to be used only as a guide. The supplier makes no
warranty of any kind, expressed or implied, concerning the use of this product and shall not be
held liable for any damage resulting from handling or from contact with the above product. User
assumes all risks incident to its use.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street鈥ewton, MA 02464-1418鈥el:(617)965-5511鈥ax:(617)965-5818
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