PRISM Micro/Nano Fabrication Laboratory 鈥? floor plan Nano- lithography Lapping Photo- J-412B / Gray lithography J-412A PRISM area J-410 room Stock- Micro/ J-402 Nano Fabric. Lab Changing Entry Room Characterization Service Service Room Box J-421 Room Service Room J-415 Metals Room J-417 J-411 Plasmatherm 790 SEM J-419 J-413 The cleanroom users can use the doors marked in red as emergency exits only. Office of Joseph Palmer and Mikhail Gaevski is in J-301 E-Quad. Packaging lab is in 407A Bowen Hall. Raith electron beam writer is in D002 E-Quad.