MATERIAL
Linde Gas LLC (216) 642-6600
LindeGAS,LLC (216) 642-6600
AGA Gas INC. SAFETY
P.O. Box 94737 WOODS BLVD
P.O. Box 94737
6055 ROCKSIDE DATA SHEET
Cleveland, Ohio 44101
Cleveland, Ohio 44101
P.O. BOX 94737
www.us.lindegas.com
www.us.lindegas.com
CLEVELAND, OH 44101-4737 No. 148
PRODUCT NAME CAS #
7783-54-2
Nitrogen Trifluoride
DOT I.D. No.:
UN 2451
TRADE NAME AND SYNONYMS
Nitrogen trifluoride (D.O.T.)
DOT Hazard Class:
Division 2.2
CHEMICAL NAME AND SYNONYMS
NF3
Nitrogen Trifluoride Formula
ISSUE DATES AND REVISIONS Chemical Family:
Inorganic Flouride
Revised January 1995
HEALTH HAZARD DATA
TIME WEIGHTED AVERAGE EXPOSURE LIMIT
TWA = 10 Molar PPM (ACGIH 1994-1995). OSHA 1993 PEL (8 Hr. TWA) = 10 Molar PPM.
SYMPTOMS OF EXPOSURE
Symptoms include headache, weakness, dizziness, confusion and other manifestations associated with a reduced
oxygen supply in the blood.
No hazard from skin contact has been recognized.
TOXICOLOGICAL PROPERTIES
Inhalation: Monkey LC50:10,000 ppm (1%)
The toxicity of nitrogen trifluoride is related to its capacity to form methemoglobin, a modified form of hemoglobin
incapable of transporting oxygen, and its ability to destroy red blood cells (hemolysis). Upon cessation of exposure,
methemoglobin spontaneously reverts to hemoglobin. However, at high levels of conversion, therapeutic intervention
may be indicated (oxygen, methylene blue, exchange transfusion). The occurence of hemolysis requires careful
monitoring for degree of anemia and the potential for impaired kidney function. No hazard from skin contact is
recognized.
(Continued on Page 4)
RECOMMENDED FIRST AID TREATMENT
PROMPT MEDICAL ATTENTION IS MANDATORY IN ALL CASES OF OVEREXPOSURE TO NITROGEN
TRIFLUORIDE. RESCUE PERSONNEL SHOULD BE EQUIPPED WITH SELF-CONTAINED BREATHING
APPARATUS.
An individual exposed to nitrogen trifluoride should be removed from the contaminated area as quickly as possible. If
there is evidence of chemical cyanosis, administer oxygen. Headache or other symptoms may also be alleviated by
oxygen. Seek medical assistance promptly.
Note to the Physician: Human data on nitrogen trifluoride are limited. Methemoglobin production and hemolysis are
nonspecific effects which require monitoring and appropriate supportive measures. Close observation for
pulmonaryand renal impairment is indicated.
Information contained in this material safety data sheet is offered without charge for use by technically qualified personnel at their discretion and
risk. All statements, technical information and recommendations contained herein are based on tests and data which we believe to be reliable, but
the accuracy or completeness thereof is not guaranteed and no warranty of any kind is made with respect thereto. This information is not intended
as a license to operate under or a recommendation to practice or infringe any patent of this Company or others covering any process, composition
of matter or use.
Since the Company shall have no control of the use of the product described herein, the Company assumes no liability for loss or damage incurred
from the proper or improper use of such product.
Nitrogen Trifluoride
HAZARDOUS MIXTURES OF OTHER LIQUIDS, SOLIDS, OR GASES
Nitrogen trifluoride reacts similar to oxygen up to temperatures of 660潞F (350潞C) in that it is relatively inert towards
most materials. However it may form flammable or explosive mixtures with gaseous fuels. Above 1830潞F (1000潞C) it
should ignite most materials it contacts.
PHYSICAL DATA
BOILING POINT LIQUID DENSITY AT BOILING POINT
-200.2潞F (-129潞C) 95.7 lb/ft3 (1533 kg/m3)
VAPOR PRESSURE GAS DENSITY AT 700F. 1 atm
@ 70潞F (21.1潞C) Above the critical temp. of -38.65潞F (-39.25潞C) 0.186 lb/ft3 (2.98 kg/m3)
SOLUBILITY IN WATER FREEZING POINT
Insoluble -340.2潞F (-206.8潞C)
EVAPORATION RATE SPECIFIC GRAVITY (AIR=1)
N/A (Gas) @ 70潞F (21.1潞C) = 2.48
Colorless, odorless gas
APPEARANCE AND ODOR
FIRE AND EXPLOSION HAZARD DATA
AUTO IGNITION TEMPERATURE
FLASH POINT (Method used) FLAMMABLE LIMITS % BY VOLUME (See Page 4)
N/A N/A N/A N/A
LEL UEL
ELECTRICAL CLASSIFICATION
EXTINGUISHING MEDIA
Carbon dioxide may be used for small fires with NF3 as the oxidizer. Nonhazardous
SPECIAL FIRE FIGHTING PROCEDURES
Fires with nitrogen trifluoride as the oxidizer can best be extinguished by shutting off the source of nitrogen trifluoride.
UNUSUAL FIRE AND EXPLOSION HAZARDS
Fires supported by nitrogen trifluoride as the oxidizer may generate toxic and reactive fluoride compounds.
REACTIVITY DATA
STABILITY CONDITIONS TO AVOID
Unstable Open flames and high [> 500潞F (260潞鈥)] temperatures.
Stable X
INCOMPATIBILITY (Materials to avoid)
Plastics, hydrocarbons and other organic materials
HAZARDOUS DECOMPOSITION PRODUCTS Tetrafluorohydrazine (N2F4) and active fluoride radicals
HAZARDOUS POLYMERIZATION CONDITIONS TO AVOID
May Occur
None
Will Not Occur X
SPILL OR LEAK PROCEDURES
STEPS TO BE TAKEN IN CASE MATERIAL IS RELEASED OR SPILLED
Evacuate all personnel from affected area. Use appropriate protective equipment. If leak is in user鈥檚 equipment, be
certain to purge piping with an inert gas prior to attempting repairs. If leak is in container or container valve, contact
your closest supplier location or call the emergency telephone number listed herein.
WASTE DISPOSAL METHOD
Do not attempt to dispose of waste or unused quantities. Return in the shipping container properly labeled, with any
valve outlet plugs or caps secured and valve protection cap in place to your supplier for proper disposal. For
emergency disposal, contact your closest supplier location or call the emergency telephone number listed herein.
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Nitrogen Trifluoride
SPECIAL PROTECTION INFORMATION
Positive pressure air line with mask or self-contained breathing apparatus shou Id be available for
RESPIRATORY PROTECTION
(Specify type)
emergency use.
VENTILATION LOCAL EXHAUST SPECIAL
N/A
To prevent accumulation above the TWA
Hood with forced ventilation MECHANICAL (Gen.) OTHER
N/A
N/A
PROTECTIVE GLOVES
Plastic or Rubber
EYE PROTECTION
Safety goggles or glasses
OTHER PROTECTIVE EQUIPMENT
Safety shoes
SPECIAL PRECAUTIONS*
SPECIAL LABELING INFORMATION
DOT Shipping Name: Nitrogen trifluoride DOT Hazard Class: Division 2.2
DOT Shipping Label: Nonflammable Gas, Oxidizer I.D. No.: UN 2451
SPECIAL HANDLING RECOMMENDATIONS
Use only in well-ventilated areas. Valve protection caps and valve outlet threaded plugs must remain in place unless
container is secured with valve outlet piped to use point. Do not drag, slide or roll cylinders. Use a suitable hand truck
for cylinder movement. Use a pressure reducing regulator when connecting cylinder to lower pressure (<3,000 psig)
piping or systems. Do not heat cylinder by any means to increase the discharge rate of product from the cylinder. Use a
check valve or trap in the discharge line to prevent hazardous back flow into the cylinder.
For additional handling recommendations consult Compressed Gas Association Pamphlet P-1.
SPECIAL STORAGE RECOMMENDATIONS
Protect cylinders from physical damage. Store in cool, dry, well-ventilated area away from heavily trafficked areas and
emergency exits. Do not allow the temperature where cylinders are stored to exceed 125潞F (52潞C). Cylinders should be
stored upright and firmly secured to prevent falling or being knocked over. Full and empty cylinders should be
segregated. Use a 鈥渇irst in - first out鈥? inventory system to prevent full cylinders being stored for excessive periods of
time.
For additional storage recommendations consult Compressed Gas Association Pamphlet P-1.
SPECIAL PACKAGING RECOMMENDATIONS
Most metals are satisfactory for handling nitrogen trifluoride up to temperatures of approximately 160潞F (70潞C). Nickel
and Monel庐 are recommended for higher temperatures. Wetted surfaces should be passivated with an 鈥渁ctive鈥? fluorine
compound to establish a metal fluoride coating as additional protection. Teflon庐 and Kel-F庐 are the preferred gasket
materials.
OTHER RECOMMENDATIONS OR PRECAUTIONS
Keep equipment scrupulously dry. Many of the metal fluorides are water soluble so that the passive film corrosion
protection may be destroyed if wetted with water. Compressed gas cylinders should not be refilled except by qualified
producers of compressed gases. Shipment of a compressed gas cylinder which has not been filled by the owner or with
his (written) consent is a violation of Federal Law (49CFR).
(Continued on Page 4)
*Various Government Agencies (i.e. Department of Transportation, Occupational Safety and Health Administration, Food and Drug Administration
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and others) may have specific regulations concerning the transportation, handling, storage or use of this product which will not be reflected in this
data sheet. The customer should review these regulations to ensure that he is in full compliance.
Nitrogen Trifluoride
HEALTH HAZARD DATA
TOXICOLOGICAL PROPERTIES: (Continued)
The results of the Ames Tests conducted on NF3 are reported as negative, without metabolic activation; weakly positive,
with metabolic activation. Examination of these results and those of previously conducted tests suggest that the activity
shown is attributable to N2F2, a recognized contaminant of NF3.
Nitrogen trifluoride is not listed in the IARC, NTP or by OSHA as a carcinogen or potential carcinogen.
Persons in ill health where such illness would be aggravated by exposure to nitrogen trifluoride should not be allowed to
work with or handle this product.
SPECIAL PRECAUTIONS
OTHER RECOMMENDATIONS OR PRECAUTIONS: (Continued)
Always secure cylinders in an upright position before transporting them. NEVER transport cylinders in trunks of vehicles,
enclosed vans, truck cabs or in passenger compartments. Transport cylinders secured in open flatbed or in open pick-up
type vehicles.
Reporting under SARA, Title III, Section 313 not required.
NFPA 704 No. for nitrogen trifluoride = 2 O O OX
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