MATERIAL
LindeGAS, LLC (216) 642-6600
Linde Gas LLC (216) 642-6600
AGA Gas INC. SAFETY
P.O. Box 94737
P.O. Box 94737 WOODS BLVD
6055 ROCKSIDE DATA SHEET
Cleveland, Ohio 44101
Cleveland, Ohio 44101
P.O. BOX 94737
www.us.lindegas.com
CLEVELAND, OH 44101-4737
www.us.lindegas.com No. 152
PRODUCT NAME CAS #
10025-78-2
Trichlorosilane
DOT I.D. No.:
UN 1295
TRADE NAME AND SYNONYMS
Trichlorosilane (D.O.T.); Trichloromonosilane
DOT Hazard Class:
Division 4.3
CHEMICAL NAME AND SYNONYMS
Formula
SiHCl3
Trichlorosilane
ISSUE DATES AND REVISIONS Chemical Family:
Chlorosilane
Revised January 1995
HEALTH HAZARD DATA
TIME WEIGHTED AVERAGE EXPOSURE LIMIT
None listed (ACGIH 1994-1995).Hydrogen chloride (hydrolysis product) ceiling limit = 5 Molar PPM. OSHA 1993 ceiling
limit for HCl = 5 Molar PPM.
SYMPTOMS OF EXPOSURE
Corrosive and irritating to the upper and lower respiratory tracts, skin and eyes. It hydrolyzes very rapidly in water or
with the moisture in the air yielding hydrogen chloride. Skin burns and mucosal irritation are like that from exposure to
hydrochloric acid. Symptoms include lacrymation, cough, labored breathing and excessive salivary and sputum
formation. Excessive irritation of the lungs causes acutepneumonitis and pulmonary edema which could be fatal.
Hydrochloric acid burns exhibit severe pain, redness, possible swellinq and early necrosis.
TOXICOLOGICAL PROPERTIES
Trichlorosilane is irritating and corrosive to all living tissues. Toxic level exposure to dermal tissue causes hydrochloric
acid burns and skin lesions resulting in early necrosis and scarring. Chemical pneumonitis and pulmonary edema result
from exposure to the lower respiratory tract and deep lung. Residual pulmonary malfunction might also occur. Burns to
the eye result in lesions and possible loss of vision.
(Continued on Page 4)
RECOMMENDED FIRST AID TREATMENT
PROMPT MEDICAL ATTENTION IS MANDATORY IN ALL CASES OF OVEREXPOSURE TO TRICHLOROSILANE.
RESCUE PERSONNEL SHOULD BE EQUIPPED WITH SELF-CONTAINED BREATHING APPARATUS.
Inhalation: Conscious persons should be assisted to an uncontaminated area and inhale fresh air. Unconscious
persons should be moved to an uncontaminated area and given assisted respiration and supplemental oxygen. Keep
the victim warm and quiet. Assure that mucus or vomited material does not obstruct the airway by positional drainage.
Delayed pulmonary edema may occur. Keep patient under medical observation for at least 24 hours.
Information contained in this material safety data sheet is offered without charge for use by technically qualified personnel at their discretion and
risk. All statements, technical information and recommendations contained herein are based on tests and data which we believe to be reliable, but
the accuracy or completeness thereof is not guaranteed and no warranty of any kind is made with respect thereto. This information is not intended
as a license to operate under or a recommendation to practice or infringe any patent of this Company or others covering any process, composition
of matter or use.
Since the Company shall have no control of the use of the product described herein, the Company assumes no liability for loss or damage incurred
from the proper or improper use of such product.
Trichlorosilane Page 2
HAZARDOUS MIXTURES OF OTHER LIQUIDS, SOLIDS, OR GASES
Reacts vigorously with water or moist air yielding hydrogen chloride. It is also flammable in air over a very wide range.
Also reacts violently with oxidizers and organic materials and very rapidly with alcohols, amines, acetone and
ammonia.
PHYSICAL DATA
BOILING POINT LIQUID DENSITY AT BOILING POINT
90潞 (32潞C) @ 77潞F (25潞C) + 83 lb/ft3 (1330 kg/m3)
VAPOR PRESSURE GAS DENSITY AT 70掳F. 1 atm
@ 68潞F (20潞C) = 9.67 psia (67 kPa) .352 lb/ft3 (5.64 kg/m3)
SOLUBILITY IN WATER FREEZING POINT
Reacts violently -195.7潞F (-116.5潞C)
EVAPORATION RATE SPECIFIC GRAVITY (AIR=1)
(Ether = 1) = <1 @ 70潞F (21.1潞C) = 4.7
Coloriess liquid which on vaporization forms dense, acrid, acidic fumes.
APPEARANCE AND ODOR
FIRE AND EXPLOSION HAZARD DATA
AUTO IGNITION TEMPERATURE
FLASH POINT (Method used) FLAMMABLE LIMITS % BY VOLUME (See Page 4)
7鈥 (-13 C) (CC) LEL 7 UEL 83
Unknown
ELECTRICAL CLASSIFICATION
EXTINGUISHING MEDIA
Not specified
Carbon dioxide or dry chemical for small fires. Coarse water spray for large fires.
SPECIAL FIRE FIGHTING PROCEDURES
A coarse water spray should be used on large fires since the hydrolysis reaction to HCl is more rapid than the
combusion reaction.
UNUSUAL FIRE AND EXPLOSION HAZARDS
Recognize the potential for ground (water) contamination with hydrochloric acid following a trichlorosilane fire which
has been 鈥渆xtinguished鈥? with water.
REACTIVITY DATA
STABILITY CONDITIONS TO AVOID
Unstable None
Stable X
INCOMPATIBILITY (Materials to avoid)
Water, oxidizers
HAZARDOUS DECOMPOSITION PRODUCTS Hydrogen chloride, hydrogen, chlorine and finely divided amorphous silica
HAZARDOUS POLYMERIZATION CONDITIONS TO AVOID
May Occur
None
Will Not Occur X
SPILL OR LEAK PROCEDURES
STEPS TO BE TAKEN IN CASE MATERIAL IS RELEASED OR SPILLED
Evacuate all personnel from affected area. Use appropriate protective equipment. If leak is in user鈥檚 equipment, be
certain to purge piping with an inert gas prior to attempting repairs. If leak is in container, contact your closest supplier
location or call the emergency telephone number listed herein.
WASTE DISPOSAL METHOD
Do not attempt to dispose of waste or unused quantities. Return in the shipping container to your supplier for proper
disposal. For emergency disposal assistance, contact your closest supplier location or call the emergency telephone
number listed herein.
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.Trichlorosilane Page 3
SPECIAL PROTECTION INFORMATION
Positive pressure air line with mask or self-contained breathing apparatus should be available for
RESPIRATORY PROTECTION
(Specify type)
emergency use.
VENTILATION LOCAL EXHAUST SPECIAL
N/A
To prevent accumulation above the Ceiling Limit for HCl
Hood with forced ventilation MECHANICAL (Gen.) OTHER
N/A
N/A
PROTECTIVE GLOVES
Natural rubber, PVC or polyethylene (low density)
EYE PROTECTION
Safety goggles or glasses
OTHER PROTECTIVE EQUIPMENT
Safety shoes, safety shower, eyewash 鈥渇ountain,鈥欌?? face shield
SPECIAL PRECAUTIONS*
SPECIAL LABELING INFORMATION
DOT Shipping Name: Trichlorosilane DOT Hazard Class: Division 4.3
DOT Shipping Labels: Dangerous When Wet, Flammable Liquid, Corrosive I.D. No.: UN 1295
SPECIAL HANDLING RECOMMENDATIONS
Use only in well-ventilated areas. Valve protection caps must remain in place unless container is secured with valve
outlet piped to use point. Do not drag, slide or roll containers. Use a suitable hand truck for container movement. Do
not heat container by any means to increase the discharge rate of product from the container. Use a check valve or
trap in the discharge line to prevent hazardous back flow into the container.
For additional handling recommendations consult Compressed Gas Association Pamphlet P-1.
SPECIAL STORAGE RECOMMENDATIONS
Protect containers from physical damage. Store in cool, dry, well-ventilated area of noncombustible construction away
from heavily trafficked areas and emergency exits. Do not allow the temperature where containers are stored to exceed
125F (52C). Containers should be stored upright and firmly secured to prevent falling or being knocked over. Full and
empty containers should be segregated. Use a 鈥渇irst in - first out鈥? inventory system to prevent full containers being
stored for excessive periods of time. Post 鈥淣o Smoking or Open Flamest鈥? signs in the storage or use area. There
should be no sources of ignition in the storage or use area.
For additional storage recommendations consult Compressed Gas Association Pamphlet P-1.
SPECIAL PACKAGING RECOMMENDATIONS
Any materials suitable for use with anhydrous hydrogen chloride may be used with trichlorosilane. Systems and
equipment must be scrupulously dry.
OTHER RECOMMENDATIONS OR PRECAUTIONS
Earth-ground and bond all lines and equipment associated with the trichlorosilane system. Electrical equipment should
be non-sparking or explosion proof. Compressed gas containers should not be refilled except by qualified producers of
compressed gases. Shipment of a compressed gas container which has not been filled by the owner or with his
(written) consent is a violation of Federal Law (49CFR).
(Continued on Page 4)
*Various Government Agencies (i.e. Department of Transportation, Occupational Safety and Health Administration, Food and Drug Administration
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and others) may have specific regulations concerning the transportation, handling, storage or use of this product which will not be reflected in this
data sheet. The customer should review these regulations to ensure that he is in full compliance.
Trichlorosilane Page 4
HEALTH HAZARD DATA
TOXICOLOGICAL PROPERTIES: (Continued)
Trichlorosilane is not listed in the IARC, NTP or by OSHA as a carcinogen or potential carcinogen.
Persons in ill health where such illness would be aggravated by exposure to trichlorosilane should not be allowed to work
with or handle this product.
RECOMMENDED FIRST AID TREATMENT: (Continued)
Eye Contact: PERSONS WITH POTENTIAL EXPOSURE TO TRICHLOROSILANE SHOULD NOT WEAR
CONTACT LENSES.
Flush contaminated eye(s) with copious quantities of water. Part eyelids to assure complete flushing. Continue for a
minimum of 15 minutes.
Skin Contact: Flush affected area with copious quantities of water. Remove affected clothing as rapidly as possible.
SPECIAL PRECAUTIONS
OTHER RECOMMENDATIONS OR PRECAUTIONS: (Continued)
Always secure containers in an upright position before transporting them. NEVER transport containers in trunks of
vehicles, enclosed vans, truck cabs or in passenger compartments. Transport containers secured in open flatbed or in
open pick-up type vehicles.
Reporting under SARA, Title III, Section 313 not required.
NFPA 704 No. for trichlorosilane = 3 4 2 W = Water Reactive
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