MATERIAL
LindeGAS, LLC (216) 642-6600
Linde Gas LLC (216) 642-6600
AGA Gas INC. SAFETY
P.O. Box 94737
P.O. Box 94737 WOODS BLVD
6055 ROCKSIDE DATA SHEET
Cleveland, Ohio 44101
Cleveland, Ohio 44101
P.O. BOX 94737
www.us.lindegas.com
CLEVELAND, OH 44101-4737
www.us.lindegas.com No. 150
PRODUCT NAME CAS #
7803-62-5
Silane
DOT I.D. No.:
UN 2203
TRADE NAME AND SYNONYMS
Silane, Compressed (D.O.T.)
Mono-Silane DOT Hazard Class:
Division 2.1
CHEMICAL NAME AND SYNONYMS
Formula
SiH4
Silane, Silicon Tetrahydride
ISSUE DATES AND REVISIONS Chemical Family:
Silicon Hyydride
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HEALTH HAZARD DATA
TIME WEIGHTED AVERAGE EXPOSURE LIMIT
TWA = 5 Molar PPM (ACGIH 1997). OSHA 1995 PEL (8 Hr. TWA) = None listed.
SYMPTOMS OF EXPOSURE
Symptoms of inhalation are not well defined. It has been reported that breathing this gas may cause
headache or nausea.
Dermal burns from ignited silane are similar to other thermal burns.
TOXICOLOGICAL PROPERTIES
Since silane is spontaneously flammable in air (liberating silicon dioxide), its toxicological properties are
difficult to determine. Inhalation of low concentrations (probably less than one molar percent) of silane so
that spontaneous ignition does not occur could react with basic solutions in the body liberating silicates and
hydrogen. Further, with possible hydrolysis in body tissues, silicic acid could be formed.
Silane is not listed in the IARC, NTP or by OSHA as a carcinogen or potential carcinogen.
(Continued on Page 4)
RECOMMENDED FIRST AID TREATMENT
PROMPT MEDICAL ATTENTION IS MANDATORY IN ALL CASES OF OVEREXPOSURE TO SILANE.
RESCUE PERSONNEL SHOULD BE EQUIPPED WITH SELF-CONTAINED BREATHING APPARATUS
AND BE COGNIZANT OF EXTREME FIRE AND EXPLOSION HAZARD.
Inhalation: Conscious persons should be assisted to an uncontaminated area and inhale fresh air. Quick
removal from the contaminated area is most important. Unconscious persons should he moved to an
uncontaminated area, given assisted respiration and supplemental oxygen. Medical assistance should be
sought immediately. Further treatment should be symptomatic and supportive.
Dermal burns from ignited silane should be treated as with any thermal burn.
Information contained in this material safety data sheet is offered without charge for use by technically qualified personnel at their discretion and
risk. All statements, technical information and recommendations contained herein are based on tests and data which we believe to be reliable, but
the accuracy or completeness thereof is not guaranteed and no warranty of any kind is made with respect thereto. This information is not intended
as a license to operate under or a recommendation to practice or infringe any patent of this Company or others covering any process, composition
of matter or use.
Since the Company shall have no control of the use of the product described herein, the Company assumes no liability for loss or damage incurred
from the proper or improper use of such product.
Silane PAGE 2
HAZARDOUS MIXTURES OF OTHER LIQUIDS, SOLIDS, OR GASES
Concentrations of greater than 3 molar percent silane are normally spontaneously combustible in air. It does
not react with pure water or acid solutions but reacts with bases to form the appropriate silicate with the
liberation of hydrogen.
PHYSICAL DATA
BOILING POINT LIQUID DENSITY AT BOILING POINT
34.7 lb/ft3 (556 kg/m3)
-168.5潞F (-111.41潞C)
@70潞F (21.1潞C) Above the
VAPOR PRESSURE GAS DENSITY AT 70掳F. 1 atm
.0824 lb/ft3 (1.32 kg/m3)
critical temperature of 25.7潞F (-3.5潞C)
SOLUBILITY IN WATER FREEZING POINT
Insoluble in pure water -303.5潞F (-186.4潞C)
EVAPORATION RATE SPECIFIC GRAVITY (AIR=1)
N/A (Gas) @ 70潞F (21.1潞C) = 1.1
Colorless with a repulsive odor
APPEARANCE AND ODOR
FIRE AND EXPLOSION HAZARD DATA
AUTO IGNITION TEMPERATURE
FLASH POINT (Method used) FLAMMABLE LIMITS % BY VOLUME (See Page 4)
Pyrophoroc Gas See Page 4
Pyrophoroc Gas
ELECTRICAL CLASSIFICATION
EXTINGUISHING MEDIA
None specified
Use water spray to cool surrounding containers
SPECIAL FIRE FIGHTING PROCEDURES
Shut off source of silane.
UNUSUAL FIRE AND EXPLOSION HAZARDS
Although silane is pyrophoric, low concentrations (in mixtures) may be released
without burning, with these volumes concentrating with the potential for a subsequent fire or
explosion hazard.
REACTIVITY DATA
STABILITY CONDITIONS TO AVOID
Unstable
See Table on Page 4
Stable X
INCOMPATIBILITY (Materials to avoid)
Air, halogens, and other oxidizing agents
HAZARDOUS DECOMPOSITION PRODUCTS
Silicon and hydrogen at 788潞F (420潞C)
HAZARDOUS POLYMERIZATION CONDITIONS TO AVOID
May Occur
None
Will Not Occur X
SPILL OR LEAK PROCEDURES
STEPS TO BE TAKEN IN CASE MATERIAL IS RELEASED OR SPILLED
Evacuate all personnel from affected area. Use appropriate protective equipment. If leak is in user鈥檚 equipment, be
certain to purge piping with an inert gas prior to attempting repairs. If leak is in container or container valve, contact
your closest supplier location or call the emergency telephone number listed herein.
WASTE DISPOSAL METHOD
Do not attempt to dispose of waste or unused quantities. Return in the shipping container properly labeled,
with any valve outlet plugs or caps secured and valve protection cap in place to your supplier. For
emergency disposal assistance, contact your closest supplier location or call the emergency telephone
number listed herein.
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SPECIAL PROTECTION INFORMATION
Positive pressure air line with mask or self-contained breathinq apparatus shou ld
RESPIRATORY PROTECTION
(Specify type)
be available for emercency use.
VENTILATION LOCAL EXHAUST SPECIAL
N/A
To prevent accumulation above theTWA
Hood with forced ventilation MECHANICAL (Gen.) OTHER
N/A
N/A
PROTECTIVE GLOVES
As required
EYE PROTECTION
Safety goggles or glasses
OTHER PROTECTIVE EQUIPMENT
Safety shoes, safety shower
SPECIAL PRECAUTIONS*
SPECIAL LABELING INFORMATION
DOT Shipping Name: Silane, Compressed DOT Hazard Class: Division 2.1DOT
Shipping Label: Flammable Gas I.D. No.: UN 2203
SPECIAL HANDLING RECOMMENDATIONS
Use only in well-ventilated areas. Valve protection caps must remain in place unless container is
secured with valve outlet piped to use point. Do not drag, slide or roll cylinders. Use a suitable hand
truck for cylinder movement. Use a pressure reducing regulator when connecting cylinder to lower
pressure (<1500 psig) piping or systems. Do not heat cylinder by any means to increase the
discharge rate of product from the cylinder. Use a check valve or trap in the discharge line to prevent
hazardous back flow into the cylinder.
For additionalhandlingrecommendations consult Compressed Gas Association Pamphlet P-1.
SPECIAL STORAGE RECOMMENDATIONS
Protect cylinders from physical damage. Store in cool, dry, well-ventilated area of noncombustible
construction away from heavily trafficked areas and emergency exits. Do not allow the temperature
where cylinders are stored to exceed 125潞F (52潞C). Cylinders should be stored upright and firmly
secured to prevent falling or being knocked over. Full and empty cylinders should be segregated.
Use a 鈥渇irst in - first out鈥? inventory system to prevent full cylinders being stored for excessive periods
of time. Post 鈥淣o Smoking or Open Flames鈥? signs in the storage or use area. There should be no
sources of ignition in the storage or use area. Silane cylinders, whether full or empty, should not be
stored with other flammable products.
For additional storage recommendations consult Compressed Gas Association Pamphlet P-1.
SPECIAL PACKAGING RECOMMENDATIONS
Pure silane is noncorrosive and may be handled in most common structural materials. Carbon steel,
stainless steel, copper, brass, Monel庐, and Hasteloy庐 C are the most commonly used materials. It is also
compatible with ordinary glass, Pyrex庐, and quartz. For gasketing materials, Viton庐, Nylon庐, Teflon庐, and
Kel-F庐 are all satisfactory.
OTHER RECOMMENDATIONS OR PRECAUTIONS
Most all silane leaks will ignite in air producing silicon dioxide. Occasionally the silicon dioxide will
slow or stop the leak. These leaks are recognizable by the presence of the silicon dioxide and
permanent repairs to the leak should be made. Earth-ground and bond all lines and equipment
associated with the silane system. Electrical equipment should be non-sparking or explosion proof.
Compressed gas cylinders should not be refilled except by qualified producers of compressed gases.
(Continued on Page 4)
*Various Government Agencies (i.e. Department of Transportation, Occupational Safety and Health Administration, Food and Drug Administration
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and others) may have specific regulations concerning the transportation, handling, storage or use of this product which will not be reflected in this
data sheet. The customer should review these regulations to ensure that he is in full compliance.
Silane Page 4
HEALTH HAZARD DATA
TOXICOLOGICAL PROPERTIES: (Continued)
Persons in ill health where such illness would be aggravated by exposure to silane should not be allowed to
work with or handle this product.
FIRE AND EXPLOSION HAZARD DATA: (Continued)
FLAMMABLE LIMITS % BY VOLUME
Flammability of Silane in Certain Carrier Gases
Carrier Gas Molar % of SiH4: <1% 1%-3% >3%
Ar A B C
N2 A B C
He A B C
A =Nonflammable Mixture
B =Probably Nonflammable Mixture
C = Flammable Mixture
SPECIAL PRECAUTIONS
OTHER RECOMMENDATIONS OR PRECAUTIONS: (Continued)
Shipment of a compressed gas cylinder which has not been filled by the owner or with his (written) consent is
a violation of Federal Law (49CFR).
Always secure cylinders in an upright position before transporting them. NEVER transport cylinders in trunks
of vehicles, enclosed vans, truck cabs or in passenger compartments. Transport cylinders secured in open
flatbed or in open pick-up type vehicles.
Reporting under SARA, Title III, Section 313 not required.
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