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Subject: LDD -26W Developer MSDS
Date: Fri, 21 Jan 2005 10:23:01 -0500
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Material Safety Data Sheet
1. PRODUCT AND COMPANY IDENTIFICATION
MICROPOSIT(TM) LDD(TM) -26W Developer
Revision date:
04/08/2004
Supplier Name & Address
Supplier
Rohm and Haas Electronic Materials LLC
455 Forest Street
Marlborough, MA 01752 United States of America
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Manufacturer Name & Address Canada only
Telephone
For non-emergency information contact: 508-481-7950
Emergency Telephone
Emergency telephone number
Chemtrec
800-424-9300
Rohm and Haas Emergency
215-592-3000
2. COMPOSITION/INFORMATION ON INGREDIENTS
SECTION 2. Composition / information on components
Component
CAS CAS-No.
W/W Concentration
Water
7732-18-5
> 95.0 %
Tetramethylammonium hydroxide
75-59-2
1.9 - 2.3 %
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Canadian composition
EU & APR Composition
3. HAZARDS IDENTIFICATION
Section 3 Hazards Identification
Emergency Overview
Emergency Overview
Form
Appearance
Form
liquid
Color
Colour
Colorless to yellow
Odor
Odour
amines
Hazard Summary
Alkaline liquid and vapor. Causes skin, eye, and respiratory tract irritation. Onset of symptoms may be
delayed.
Prolonged, repeated contact, inhalation, ingestion, or absorption through the skin, may cause toxic effects to
internal organ systems (liver, kidney, central nervous system).
Potential Health Effects
Potential Health Effects
Primary Routes of Entry
Primary Routes of Entry:
Inhalation, ingestion, eye and skin contact, absorption.
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Eyes
Eyes: May cause pain, transient irritation and superficial corneal effects.
Skin
Skin: Material may cause irritation.
Prolonged or repeated exposure may have the following effects:
central nervous system depression
drowsiness
defatting of skin leading to irritation and dermatitis
Ingestion
Ingestion: Swallowing may have the following effects:
irritation of mouth, throat and digestive tract
Repeated doses may have the following effects:
central nervous system depression
drowsiness
Inhalation
Inhalation: Inhalation may have the following effects:
irritation of nose, throat and respiratory tract
Higher concentrations may have the following effects:
systemic effects similar to those resulting from ingestion
Target Organs
Target Organs: Eye
Respiratory System
Skin
nervous system
Environmental effects
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Carcinogenicity US & Shipley/Rodel
Carcinogenicity
Not considered carcinogenic by NTP, IARC, and OSHA
Japan FCIA
Taiwan Hazard Class
4. FIRST AID MEASURES
Section 4 First Aid Measures
Inhalation
Inhalation: Remove from exposure. If there is difficulty in breathing, give oxygen. Seek medical attention if symptoms
persist.
Skin contact
Skin contact: Wash skin with water. Continue washing for at least 15 minutes. Obtain medical attention if blistering occurs
or redness persists.
Eye contact
Eye contact: Immediately flush the eye with plenty of water for at least 15 minutes, holding the eye open. Obtain medical
attention if soreness or redness persists.
Ingestion
Ingestion: Wash out mouth with water. Have victim drink 1-3 glasses of water to dilute stomach contents. Immediate medical
attention is required Never administer anything by mouth if a victim is losing conciousness, is unconcious or is convulsing.
Notes to physician
Notes to physician -- treatment
Treat symptomatically.
5. FIRE-FIGHTING MEASURES
Section 5 Fire Fighting Measures
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Flash Point
Flash point
Nonflammable
Auto Ignition Temperature
Lower Explosive Limit
Lower explosion limit
not applicable
Upper Explosive Limit
Upper explosion limit
not applicable
Minimum ignition energy of dust cloud indicate cloud vs layer
Thermal Decomposition
Suitable extinguishing media
Suitable extinguishing media:
Not readily combustible.
Select extinguishing agent appropriate to other materials involved.
Unsuitable extinguishing media
Specific hazards during fire fighting
Specific hazards during fire fighting: No specific measures necessary.
Special protective equipment for fire fighters
Special protective equipment for fire-fighters: Wear full protective clothing and self-contained breathing apparatus.
Further information
Further information: This product may give rise to hazardous vapors in a fire.
Other fire safety data
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6. ACCIDENTAL RELEASE MEASURES
Section 6 Accidental Release Measures
Personal precautions
Personal precautions
Wear suitable protective clothing.
Environmental precautions
Environmental precautions
Prevent the material from entering drains or water courses.
Do not discharge directly to a water source.
Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation.
Methods for cleaning up
Methods for cleaning up
Cover with absorbent or contain. Collect and dispose.
Additional advice
Possibly add reference to Sec 15
7. Handling and storage
Section 7 Handling and Storage
Handling
Handling
Use only in well-ventilated areas. Avoid breathing vapor. Avoid contact with eyes, skin and clothing. Keep container
tightly closed.
Further information on storage conditions
Further information on storage conditions: No special precautions necessary.
Advice on protection against fire and explosion
Storage
Storage
Storage conditions: Store in original container.Storage area should be: cool dry well ventilated out of direct sunlight
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away from incompatible materials
Storage period
Storage temperature
Other data
Other handling and storage
8. EXPOSURE CONTROLS / PERSONAL PROTECTION
Section 8 Exposure Controls/Personal Protection
Exposure guidelines
Exposure limit(s)
Exposure limits are listed below, if they exist.
Eye Protection
Eye protection: goggles
Hand Protection
Hand protection: Butyl rubber gloves. Other chemical resistant gloves may be recommended by your safety professional.
Skin & Body Protection
Skin and body protection: Normal work wear.
Respiratory Protection
Respiratory protection: Respiratory protection if there is a risk of exposure to high vapor concentrations.The specific
respirator selected must be based on the airborne concentration found in the workplace and must not exceed the working limits
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of the respirator.
Hygienic Practices
General Protective Measures
Engineering Controls
Engineering measures: Engineering methods to prevent or control exposure are preferred.
9. PHYSICAL AND CHEMICAL PROPERTIES
Section 9 Physical and Chemical Properties
Appearance
Form
Form
liquid
Color
Colour
Colorless to yellow
Odor
Odour
amines
pH
pH
13
Boiling Point
Boiling point/range
100 掳C (212 掳F)
Freezing Point
Flash Point
Flash point
Nonflammable
Auto Ignition Temperature
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Lower Explosive Limit - Dust
Upper Explosive Limit - Dust
Lower Explosive Limit
Lower explosion limit
not applicable
Upper Explosive Limit
Upper explosion limit
not applicable
Vapor Pressure
Vapour pressure
Similar to water
Component: Tetramethylammonium hydroxide
Vapour pressure
17.5 mmHg at 20 掳C
Relative Vapor Density
Relative vapour density
No data available
Solubility in Water
Water solubility
completely soluble
Solubility (quantitative)
Solubility (qualitative)
Partitioning Coefficient
Relative density (Specific Gravity)
Relative density
1.00
Density
Bulk Density
Viscosity (Dynamic)
Flow time
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Viscosity (Kinematic)
Evaporation rate
Evaporation rate
Slower than ether
Surface Tension
% Volatility
VOC
VOC's
not applicable
General Remarks
Disclaimer
NOTE: The physical data presented above are typical values and should not be construed as a
specification.
10. STABILITY AND REACTIVITY
Section 10 Stability and Reactivity
Hazardous reactions
Hazardous reactions
Stable under normal conditions.
Conditions to avoid
Conditions to avoid
contact with incompatible materials
Materials to avoid (InCompatibility)
Materials to avoid
Strong oxidizing agents acids
Hazardous Decomp prods
Hazardous decomposition products
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triethylamine, toxic fluorine compounds, nitrogen oxides (NOx), oxides of carbon, Methanol,
Polymerization
polymerization
Will not occur.
11. TOXICOLOGICAL INFORMATION
Toxicological information on this product or its components appear in this section when such data is
available.
Section 11 Toxicological Information
Memo remarks
Acute Oral Tox
Acute Inhalation tox
Acute Dermal tox
Acute tox other route
Skin irritation
Eye irritation
Sensitization
Respiratory system irritation
Chronic/sub-chronic tox
Carcinogenicity
Assessment Carcinogenicity
Toxicity to reproduction
Assessment Toxicity to Reproduction
Teratogenecity
Assessment Teratogenicity
Genetic Toxicity in-vitro
Genetic Toxicity in-Vivo
Assessment Mutagenicity
Epidemiology
Further Information
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_________________________________________________________________________________
Acute Oral Tox
Component: Tetramethylammonium hydroxide
Acute Dermal tox
Acute dermal toxicity
2.1 %(m)
A single 4h semi-occlusive application to intact rabbit skin produced no signs of dermal irritation.
No clinical signs of toxicity were observed.
Testing complied with OECD 404 and EPA TSCA 40 CFR Part 798 standard protocols.
DOT Corrosivity testing conducted on stainless steel and laboratory animals determined that this product is
not corrosive.
Component: Tetramethylammonium hydroxide
Acute Dermal tox
Acute dermal toxicity
3.5 %(m)
A single 4h semi-occlusive application to intact rabbit skin produced minimal signs of irritation ( mean scores
for erythema or edema less than 2).
No clinical signs of toxicity were observed.
Testing complied with OECD 404 and EPA TSCA 40 CFR Part 798 standard protocols.
Component: Tetramethylammonium hydroxide
Acute Dermal tox
Acute dermal toxicity
5 %(m)
A single 4h semi-occlusive application to intactrabbit skin produced burns (full thickness destruction of skin).
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This material is corrosive.
No clinical signs of toxicity were observed.
Testing complied with OECD 404 and EPA TSCA 40 CFR Part 798 standard protocols.
Corrosive to aluminum per DOT corrosivity testing.
Component: Tetramethylammonium hydroxide
Acute Dermal tox
Acute dermal toxicity
7 %(m)
A single 4h semi-occlusive application to intactrabbit skin produced burns (full thickness destruction of skin).
This material is corrosive.
No clinical signs of toxicity were observed.
Testing complied with OECD 404 and EPA TSCA 40 CFR Part 798 standard protocols.
Corrosive to aluminum per DOT corrosivity testing.
Component: Tetramethylammonium hydroxide
Acute Dermal tox
Acute dermal toxicity
<5% (w/v):
Repeated application to rat skin for 6 h/d, 5 d/wk for 4 weeks did not produce systemic toxicity.
Test material was applied continuously through a reservoir affixed to shaved animal backs.
Component: Tetramethylammonium hydroxide
Acute Dermal tox
Acute dermal toxicity
>=5% (w/v):
Repeated application to rat skin for 6h/d, 5d/wk for 4 weeks produced rapid toxicity and following effects:
convulsions
death
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Effects were noted after 2 hours of initial application.
Test material was applied continuously through a reservoir affixed to shaved animal backs.
Component: Tetramethylammonium hydroxide
Acute Dermal tox
Acute dermal toxicity
LD50 guinea pig 25 mg/kg
100% (by weight).
Acute tox other route
Skin irritation
Eye irritation
Sensitization
_________________________________________________________________________________
Respiratory system irritation
Chronic/sub-chronic tox
Carcinogenicity
Assessment Carcinogenicity
Toxicity to reproduction
Assessment Toxicity to Reproduction
Teratogenecity
Assessment Teratogenicity
Genetic Toxicity in-vitro
Genetic Toxicity in-Vivo
Assessment Mutagenicity
Epidemiology
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Further Information
_________________________________________________________________________________
Respiratory system irritation
Chronic/sub-chronic tox
Carcinogenicity
Assessment Carcinogenicity
Toxicity to reproduction
Assessment Toxicity to Reproduction
Teratogenecity
Assessment Teratogenicity
Genetic Toxicity in-vitro
Genetic Toxicity in-Vivo
Assessment Mutagenicity
Epidemiology
Further Information
12. ECOLOGICAL INFORMATION
Ecotoxicological information on this product or its components appear in this section when such data is
available.
Section 12 Ecological Information
Memo remarks
__________________________________________________________________________________________
Additional remarks
Ecotoxicity Effects
Chemical Fate Information
Additional remarks
Tetramethylammonium hydroxide
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Ecotoxicity Effects
Ecotoxicity effects
Toxicity to fish
Toxicity to algae
Toxicity to bacteria
Toxicity to aquatic inverterbrates
Toxicity to aquatic invertebrates
LC50 ceriodaphnia dubia (water flea) 96 h
0.07 - 1.2 mg/l
A pH neutralized solution has been shown to be toxic to aquatic organisms.
Toxic to soil organisms
Chemical Fate Information
Additional remarks
13. DISPOSAL CONSIDERATIONS
Environmental precautions
Environmental precautions: Prevent the material from entering drains or water courses.
Do not discharge directly to a water source.
Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation.
Section 13 Disposal Considerations
Waste Classification
Disposal
Dispose in accordance with all local, state (provincial), and federal regulations. Under RCRA, it is the
responsibility of the product's user to determine at the time of disposal, whether the product meets RCRA criteria for hazardous
waste.This is because the product uses, transformations, mixtures, processes, etc. may render the resulting materials
hazardous.
Do not remove label until container is thoroughly cleaned.Empty containers may contain hazardous residues.This
material and its container must be disposed of in a safe way.
Contaminated packaging
EU waste code
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14. TRANSPORT INFORMATION
Japanese FSL and PDSC statements
US DOT Information
DOT
Not regulated for transport
IMDG (International Ocean)
IMO/IMDG
Not regulated (Not dangerous for transport)
CN HAZCHEM
Transportation classifications may vary by container volume and may be influenced by regional or country
variations in regulations
15. REGULATORY INFORMATION
Section 15 Regulatory Information
Workplace Classification
Canadian WHMIS Classification
EU Label Phrases
SARA 311/312
SARA Title III: Section 311/312 Categorizations (40CFR370): Immediate (acute) Health Hazard
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SARA 302
SARA 313
SARA Title III: Section 313 Information (40CFR372)
This product does not contain a chemical which is listed in Section 313 at or above de minimis
concentrations.
TSCA 12b
U.S. Toxic Substances Control Act (TSCA) Section 12(b) Export Notification (40 CFR 707, Subpt D):
U.S. Toxic Substances Control Act (TSCA) Section 12(b) Export Notification (40 CFR 707, Subpt D)
This product does not contain any substances subject to Section 12(b) export notification.
CERCLA
HAPS/ODS
Inventories EU
Inventories ex-EU
US. Toxic Substances Control Act (TSCA) All components of this product are in compliance with the inventory listing
requirements of the U.S. Toxic Substances Control Act (TSCA) Chemical Substance Inventory.
National 1
National 2
National 3
Not Japan or Taiwan
Regional (States)
California (Proposition 65)
This product does not contain materials which the State of California has found to cause cancer, birth defects
or other reproductive harm.
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16. OTHER INFORMATION
Hazard Rating
Health
Fire
Reactivity
NFPA
3
0
0
Legend
Legend
ACGIH
American Conference of Governmental Industrial Hygienists
BAc
Butyl acetate
OSHA
Occupational Safety and Health Administration
PEL
Permissible Exposure Limit
STEL
Short Term Exposure Limit (STEL):
TLV
Threshold Limit Value
TWA
Time Weighted Average (TWA):
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Bar denotes a revision from prior MSDS.
The information provided in this Safety Data Sheet is correct to the best of our knowledge, information and
belief at the date of its publication. The information given is designed only as a guidance for safe handling,
use, processing, storage, transportation, disposal and release and is not to be considered a warranty or
quality specification. The information relates only to the specific material designated and may not be valid for
such material used in combination with any other materials or in any process, unless specified in the text.
Version: 2.2
Print Date:
07/26/2004
Layout 304880
Page 8 of 8
Revision date
04/08/2004
Page 1 of 4
Revision date
04/08/2004
Dr. Luigi Frunzio
Associate Research Scientist
Yale University
Department of Applied Physics
427 Becton Center
15 Prospect Street
P.O.Box 208284
New Haven, CT 06520-8284
USA
ph: (203) 432-4268
fax: (203) 432-4283
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