The MSDS format adheres to the standards and regulatory requirements
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in other countries.
DuPont Page 1
Material Safety Data Sheet
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MICROPLANAR CMP3006
EPM00136 Revised 30-JUN-2007
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CHEMICAL PRODUCT/COMPANY IDENTIFICATION
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Product Use
Tungsten CMP
Tradenames and Synonyms
MICROPLANAR(R) CMP3004
CMP3006X
Company Identification
MANUFACTURER/DISTRIBUTOR
DuPont Air Products NanoMaterials L.L.C.
2441 W.Erie Dr.
Tempe
AZ
United States
85282
PHONE NUMBERS
Product Information : (800)441-7515(outside U.S. 302-774-1000)
Transport Emergency : (800)424-9300(outside U.S. 703-527-3887)
Medical Emergency : (800)441-3637(outside U.S. 302-774-1000)
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COMPOSITION/INFORMATION ON INGREDIENTS
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Components
Material CAS Number %
Alumina
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HAZARDS IDENTIFICATION
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Emergency Overview
Milky white suspension with no odor. May cause eye
irritation and drying of the skin.
Potential Health Effects
INHALATION
No adverse effect expected.
EYE CONTACT
May cause irritation.
SKIN CONTACT
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Material Safety Data Sheet
(HAZARDS IDENTIFICATION - Continued)
May cause drying of skin.
INGESTION
Not expected to be a hazard by this route.
TARGET ORGANS
Skin and Eyes.
MEDICAL CONDITIONS AGGRAVATED BY EXPOSURE
Overexposure may aggravate existing skin conditions.
Carcinogenicity Information
None of the components present in this material at concentrations
equal to or greater than 0.1% are listed by IARC, NTP, OSHA or ACGIH
as a carcinogen.
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FIRST AID MEASURES
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First Aid
INHALATION
No specific intervention is indicated as the compound is not
likely to be hazardous by inhalation. Consult a physician if
necessary.
SKIN CONTACT
In case of contact, immediately flush skin with plenty of water
for at least 15 minutes, while removing contaminated clothing and
shoes. Call a physician. Wash contaminated clothing before reuse.
EYE CONTACT
In case of contact, immediately flush eyes with plenty of water
for at least 15 minutes. Call a physician.
INGESTION
If swallowed, do not induce vomiting. Immediately give 2 glasses
of water. Never give anything by mouth to an unconscious person.
Call a physician.
Notes to Physicians
Treat symptomatically as required by the condition of the
patient.
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Material Safety Data Sheet
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FIRE FIGHTING MEASURES
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Flammable Properties
Flash Point : None
Autoignition : None
Flammable limits in Air, % by Volume
LEL : None
UEL : None
Extinguishing Media
Use media appropriate for surrounding material.
Fire Fighting Instructions
This material is not flammable. Use normal firefighting
procedures for the area.
UNUSUAL FIRE AND EXPLOSION HAZARDS.
No special precautions are necessary.
HAZARDOUS COMBUSTION PRODUCTS
None.
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ACCIDENTAL RELEASE MEASURES
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Safeguards (Personnel)
NOTE: Review FIRE FIGHTING MEASURES and HANDLING (PERSONNEL)
sections before proceeding with clean-up. Use appropriate
PERSONAL PROTECTIVE EQUIPMENT during clean-up.
Spill Clean Up
Soak up with sawdust, sand, oil dry or other absorbent material.
Dispose of in an approved container. Comply with Federal, State,
and local regulations for reporting releases.
If material becomes dry, wet before removal.
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HANDLING AND STORAGE
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Handling (Personnel)
Avoid contact with eyes, skin or clothing. Use with sufficient
ventilation to keep employee exposure below recommended limits.
Wash thoroughly after handling. Wash clothing after use.
Handling (Physical Aspects)
Keep container tightly closed.
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Material Safety Data Sheet
(HANDLING AND STORAGE - Continued)
Storage
Store in original container. Store above 32 F (0 C)
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EXPOSURE CONTROLS/PERSONAL PROTECTION
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Engineering Controls
Use only with adequate ventilation.
Personal Protective Equipment
EYE/FACE PROTECTION: Wear safety glasses or coverall chemical
splash goggles.
RESPIRATORS: Where there is potential for airborne exposures in
excess of applicable limits, wear NIOSH approved respiratory
protection.
PROTECTIVE CLOTHING: Where there is potential for skin contact
have available and wear as appropriate impervious gloves, apron,
pants, and jacket.
# Exposure Guidelines
Applicable Exposure Limits
Alumina
PEL (OSHA) : 15 mg/m3, total dust, 8 Hr. TWA
5 mg/m3, respirable dust, 8 Hr. TWA
TLV (ACGIH) : Notice of Intended Changes (2007)
Withdraw Adopted Documentation and TLV;
See NIC Entry for Aluminum Metal and
Insoluble Compounds
AEL * (DuPont) : None Established
* AEL is DuPont鈥檚 Acceptable Exposure Limit. Where governmentally
imposed occupational exposure limits which are lower than the AEL
are in effect, such limits shall take precedence.
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PHYSICAL AND CHEMICAL PROPERTIES
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Physical Data
Boiling Point : 212 F (100 C)
Vapor Pressure : Not Available
Vapor Density : >1 (Air=1.0)
Evaporation Rate : Not Available
Solubility in Water : Insoluble Solids
pH : 8
Odor : None.
Color : Milky, White.
Specific Gravity : ~1.13 @ 25 C (77 F)
EPM00136 DuPont Page 5
Material Safety Data Sheet
(PHYSICAL AND CHEMICAL PROPERTIES - Continued)
Form : Slurry.
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STABILITY AND REACTIVITY
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Chemical Stability
Stable at normal temperatures and storage conditions.
Incompatibility with Other Materials
None have been identified.
Decomposition
Decomposition will not occur.
Polymerization
Polymerization will not occur.
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TOXICOLOGICAL INFORMATION
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Animal Data
No data are available for this product. Data for a component
are listed below.
Data for Alumina
INHALATION
LC50, rat (4 hr): >1.89 mg/l (no deaths). Excessive exposure
may cause cough, mucous production, and
shortness of breath. Respiratory effects typically
associated with inhalation of particulates and lung overload
have occurred in animals.
EYE CONTACT
Dust may cause mechanical irritation, based on human
experience.
SKIN CONTACT
May cause irritation with redness and pain, based on human
experience.
INGESTION
No information available.
GENOTOXICITY
No information available.
TARGET ORGANS
Skin, eyes, and respiratory tract.
EPM00136 DuPont Page 6
Material Safety Data Sheet
(TOXICOLOGICAL INFORMATION - Continued)
CHRONIC TOXICITY
Chronic exposure of workers to aluminum containing dusts or
fumes has caused fibrosis, emphysema and
pneumothorax.
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ECOLOGICAL INFORMATION
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Ecotoxicological Information
Data for MicroPlanar(R) CMP3004
Aquatic Toxicity
No information is available.
FATE
Contains inert mineral product that is insoluble in water
and settles easily.
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DISPOSAL CONSIDERATIONS
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Waste Disposal
Treatment, storage, transportation, and disposal must be in
accordance with applicable Federal, State/Provincial, and Local
regulations.
Incineration at a facility with proper Federal and State
issued permits is the recommended method for disposal.
Container Disposal
Observe all label warnings. Empty containers may contain
hazardous residue. Refer to applicable Local, State/Provincial,
and Federal Regulations, as well as industry Standards.
Do not distribute, make available, or reuse empty containers
except for storage and shipment of original product. Remove
all hazardous product residue, and puncture or otherwise
destroy empty containers before disposal. Consult 40 CFR,
Parts 261 and 268 for guidance on disposal.
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TRANSPORTATION INFORMATION
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Shipping Information
DOT/IMO/IATA
Not Regulated.
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Material Safety Data Sheet
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REGULATORY INFORMATION
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U.S. Federal Regulations
This product complies with TSCA inventory reporting requirements.
SARA TITLE III (SUPERFUND AMENDMENTS AND REAUTHORIZATION
ACT)
311/312 Hazard Categories: None
313: This product contains no substance(s) that are
subject to the report requirements of Section 313 of the
Emergency Planning and Community Right-To-Know Act of 1986
and of 40 CFR 372.
CERCLA (COMPREHENSIVE RESPONSE COMPENSATION AND LIABILITY
ACT)
Not reportable.
We recommend you contact local authorities to determine if
there may be other local reporting requirements.
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OTHER INFORMATION
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NFPA, NPCA-HMIS
NFPA Rating
Health :1
Flammability :0
Reactivity :0
Additional Information
Because the long-term human health effects from exposure to
MicroPlanar(R) CMP3006 have not been fully evaluated,
exposure should be kept to the lowest level possible.
This material is for industrial use. Use only
under the supervision of a technically qualified indiviual.
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The data in this Material Safety Data Sheet relates only to the
specific material designated herein and does not relate to use in
combination with any other material or in any process.
Responsibility for MSDS : DuPont AirProducts Nanomaterials L.L.C
MSDS Coordinator
Telephone : (757)686-8663 OR (919)248-5027
# Indicates updated section.
EPM00136 DuPont Page 8
Material Safety Data Sheet
(Continued)
This information is based upon technical information believed to be
reliable. It is subject to revision as additional knowledge and
experience is gained.
End of MSDS
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