The MSDS format adheres to the standards and regulatory requirements
of the United States and may not meet regulatory requirements
in other countries.
DuPont Page 1
Material Safety Data Sheet
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DP-6545
EPM00163 Revised 14-OCT-2006
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CHEMICAL PRODUCT/COMPANY IDENTIFICATION
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Material Identification
Formula : SiO2
Molecular Weight : 60.08
Product Use
Polishing composition for chemical mechanical planarization
of barrier slurry.
Tradenames and Synonyms
Colloidal Silica
Company Identification
MANUFACTURER/DISTRIBUTOR
DuPont AirProducts Nanomaterials L.L.C
2441 W.Erie Dr.
Tempe
AZ
United States
85282
PHONE NUMBERS
Product Information : (800)441-7515(outside U.S. 302-774-1000)
Transport Emergency : (800)424-9300(outside U.S. 703-527-3887)
Medical Emergency : (800)441-3637(outside U.S. 302-774-1000)
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COMPOSITION/INFORMATION ON INGREDIENTS
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Components
Material CAS Number %
AMORPHOUS SILICA 7631-86-9 1-30
WATER 7732-18-5 >60
Component A 0.012-4
Component B 0.1-8
Sulfuric Acid 7664-93-9 0.1-8
Component D <4
Component E <2
Component F <2
Component G <2
Isopropanol 67-63-0 <1
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Material Safety Data Sheet
(COMPOSITION/INFORMATION ON INGREDIENTS - Continued)
Components (Remarks)
Specific chemical identities of Components A, B, D, E, F,
and G are with held as tradesecrets.
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HAZARDS IDENTIFICATION
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Potential Health Effects
This product has not been tested as a whole for health
effects. The general information reported here is based on
the health effects of the individual components of this
mixture.
>>>Amorphous Silica
SKIN CONTACT may cause skin irritation with discomfort or
rash, and possibly skin burns. EYE CONTACT may cause eye
irritation with discomfort, tearing, or blurring of vision.
INHALATION may cause drying of mucous membranes and
irritation of nose, throat, and lungs with nosebleeds,
cough, difficulty breathing or shortness of breath. Based on
animal experiments, long term exposures to high doses could
lead to pulmonary inflammation and subsequent development of
chronic lung disease.
Amorphous Silica does not induce the lung effects associated
with crystalline silica. Epidemiology studies have not shown
any evidence of fibrosis in workers exposed to Amorphous
Silica dust levels ranging from 2 to 7 mg/m3.
>>>Component A
SKIN CONTACT may initially include: skin burns or
ulceration. EYE CONTACT may initially include: eye corrosion
with corneal or conjunctival ulceration. INHALATION may
initially include: irritation of the upper respiratory
passages from inhalation of the dust or mist. INGESTION may
initially include: corrosion of the mouth and upper
gastrointestinal with abdominal discomfort, characterized by
nausea, severe pain, diarrhea, and collapse.
>>>Component B
SKIN CONTACT: Causes burns. Skin Absorption: May be harmful
if absorbed through the skin. EYE CONTAT: Causes burns.
INHALATION: Material is extremely destructive to the tissue
of the mucous membranes and upper respiratory tract. May be
harmful if inhaled. INGESTION: Harmful if swallowed.
>>>Sulfuric Acid
Exposure to mists by INHALATION may cause irritation of the
nose and throat with sneezing, sore throat or runny nose;
non-specific effects such as headache, nausea and weakness.
Gross overexposure may cause irritation of nose, throat, and
lungs with cough, difficulty breathing or shortness of
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Material Safety Data Sheet
(HAZARDS IDENTIFICATION - Continued)
breath. Pulmonary edema (body fluid in the lungs) with
cough, wheezing, abnormal lung sounds, possibly progressing
to severe shortness of breath and bluish discoloration of
the skin; symptoms may be delayed. Repeated and/or prolonged
exposure to mists may cause corrosion of teeth. SKIN CONTACT
with liquid may cause skin corrosion, burns or ulcers.
Contact with a 1 % solution may cause slight irritation with
itching, redness or swelling. Repeated and/or prolonged
exposure to mists may cause irritation with itching,
burning, redness, swelling or rash. EYE CONTACT with may
cause eye corrosion or ulceration; blindness may result.
Repeated and/or prolonged exposure to mists may cause eye
irritation with tearing, pain or blurred vision. Immediate
effects of INGESTION may include burns of the mouth, throat,
esophagus and stomach, with severe pain, bleeding, vomiting,
diarrhea and collapse of blood pressure - damage may appear
days after exposure.
Increased susceptibility to the effects of this material may
be observed in persons with pre-existing disease of the
lungs.
<<
EYE: Causes eye burns. **SKIN: Causes skin burns. Prolonged
and/or repeated contact may cause defatting of the skin and
dermatitis. **INGESTION: May cause severe and permanent
damage to the digestive tract. Causes gastrointestinal tract
burns. May cause central nervous system depression.
**INHALATION: May cause irritation of the respiratory tract
with burning pain in the nose and throat, coughing,
wheezing, shortness of breath and pulmonary edema. Causes
chemical burns to the respiratory tract. Exposure produces
central nervous system depression. Inhalation may be fatal
as a result of spasm, inflammation, edema of the larynx and
bronchi, chemical pneumonitis and pulmonary edema. Chronic:
Prolonged or repeated skin contact may cause dermatitis.
Component E
<<
discomfort or rash. There are inconclusive or unverified
reports of human sensitization. Eye contact may initially
include: eye irritation with discomfort, tearing or
blurring of vision.
Component F
<<
contact causes irritation with discomfort, local redness and
possible swelling. Prolonged skin contact may cause severe
irritation. Prolonged or widespread skin contact may result
in the absorption of potentially harmful amounts of
material. Repeated skin contact may cause dermatitis.
Moderately toxic if swallowed. May cause irritation of the
mouth and throat.
EPM00163 DuPont Page 4
Material Safety Data Sheet
(HAZARDS IDENTIFICATION - Continued)
Component G
<<
swelling, discharge or corneal clouding. Skin contact may
cause severe damage on prolonged contact. Inhalation may
result in respiratory irritation.
<<
Inhalation may cause irritation of the nose and throat with
sneezing, sore throat or runny nose.^^ Repeated and/or
prolonged skin contact may cause defatting of the skin with
itching, redness or rash. There are inconclusive or
unverified reports of human sensitization.^^ Eye contact may
cause eye irritation or injury with tearing, pain or blurred
vision. Contact with the vapor or aerosol may cause eye
irritation with tearing, pain or blurred vision.^^ Ingestion
may cause irritation of the digestive tract with stomach
pain, heartburn, nausea, vomiting or diarrhea; however there
may be no symptoms at all. A major ingestion hazard is
aspiration (liquid entering the lungs during ingestion or
vomiting) which may result in "chemical pneumonia". Symptoms
include coughing, gasping, choking, shortness of breath,
bluish discoloration of the skin, rapid breathing and heart
rate, and fever. Pulmonary edema or bleeding, drowsiness,
confusion, coma and seizures may occur in more serious
cases. Symptoms may develop immediately or as late as 24
hours after exposure, depending on how much chemical entered
the lungs.^^ Inhalation, ingestion or skin contact may
include non-specific effects such as headache, nausea and
weakness; flushing of the face; and low blood pressure.
Repeated and/or prolonged exposure may cause central nervous
system depression with dizziness, confusion, incoordination,
drowsiness or unconsciousness. Gross overexposure may cause
fatality.^^ Increased susceptibility to the effects may be
observed in persons with pre-existing disease of the skin.^
Carcinogenicity Information
None of the components present in this material at concentrations
equal to or greater than 0.1% are listed by IARC, NTP, OSHA or ACGIH
as a carcinogen.
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FIRST AID MEASURES
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First Aid
INHALATION
If inhaled, remove to fresh air. If not breathing, give
artificial respiration. If breathing is difficult, give oxygen.
Call a physician.
SKIN CONTACT
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Material Safety Data Sheet
(FIRST AID MEASURES - Continued)
Flush skin with water after contact. Wash contaminated clothing
before reuse.
EYE CONTACT
In case of contact, immediately flush eyes with plenty of water
for at least 15 minutes. Call a physician.
INGESTION
If swallowed, do not induce vomiting. Immediately give 2 glasses
of water. Never give anything by mouth to an unconscious person.
Call a physician.
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FIRE FIGHTING MEASURES
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Flammable Properties
Flash Point :Not Determined
Extinguishing Media
Use media appropriate for surrounding material.
Fire Fighting Instructions
Wear self-contained breathing apparatus (SCBA) and full protective
equipment.
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ACCIDENTAL RELEASE MEASURES
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Safeguards (Personnel)
NOTE: Review FIRE FIGHTING MEASURES and HANDLING (PERSONNEL)
sections before proceeding with clean-up. Use appropriate
PERSONAL PROTECTIVE EQUIPMENT during clean-up.
Ventilate spill area.
Initial Containment
Dike spill.
Spill Clean Up
Soak up with sawdust, sand, oil dry or other absorbent material.
EPM00163 DuPont Page 6
Material Safety Data Sheet
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HANDLING AND STORAGE
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Handling (Personnel)
Avoid contact with eyes, skin, or clothing. Wash thoroughly after
handling.
Avoid breathing aerosols and mists (also dust from dried-
down product). Wash contaminated clothing before reuse and
before product dries.
Storage
Keep container tightly closed.
Do NOT allow to freeze.
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EXPOSURE CONTROLS/PERSONAL PROTECTION
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Engineering Controls
Use with sufficient ventilation to keep employee exposure
below recommended exposure limits.
Personal Protective Equipment
EYE/FACE PROTECTION
Wear coverall chemical splash goggles when possibility exists for
eye and face contact due to splashing or spraying material.
RESPIRATORS
Wear NIOSH approved respiratory protection, as appropriate.
PROTECTIVE CLOTHING
Where there is potential for skin contact have available, and wear
as appropriate, impervious gloves, apron, pants, and jacket.
# Exposure Guidelines
Applicable Exposure Limits
AMORPHOUS SILICA
PEL (OSHA) : 80 mg/m3 / % SiO2 - 8 Hr TWA
AEL * (DuPont) : 3 mg/m3, 8 & 12 Hr. TWA, respirable dust
Component A
PEL (OSHA) : None Established
TLV (ACGIH) : Ceiling 2 mg/m3
Sulfuric Acid
EPM00163 DuPont Page 7
Material Safety Data Sheet
(Applicable Exposure Limits - Continued)
PEL (OSHA) : 1 mg/m3, 8 Hr. TWA
TLV (ACGIH) : 0.2 mg/m3, 8 Hr. TWA
A2 (Sulfuric acid contained in strong
inorganic acid mists)
AEL * (DuPont) : 0.5 mg/m3, 8 & 12 Hr. TWA
1.5 mg/m3, 15 minute TWA
Isopropanol
PEL (OSHA) : 400 ppm, 980 mg/m3, 8 Hr. TWA
TLV (ACGIH) : 200 ppm, 8 Hr. TWA, A4
STEL 400 ppm
AEL * (DuPont) : 400 ppm, 8 & 12 Hr. TWA
* AEL is DuPont鈥檚 Acceptable Exposure Limit. Where governmentally
imposed occupational exposure limits which are lower than the AEL
are in effect, such limits shall take precedence.
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PHYSICAL AND CHEMICAL PROPERTIES
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Physical Data
pH : 8-12
Form : Liquid
Odor : Mild.
Vapor Pressure : Not Available
Specific Gravity : 1.01-1.1
Solubility in Water : Silica dispersion in water
Boiling Point : 100 C (212 F)
Vapor Density : Not Available
Evaporation Rate : Not Available
Color : Opaque.
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STABILITY AND REACTIVITY
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Chemical Stability
Stable at normal temperatures and storage conditions.
Incompatibility with Other Materials
Material may be perishable if frozen (possible non-
hazardous, irreversible silica agglomeration). Do NOT allow
to freeze.
Decomposition
Decomposition will not occur.
Polymerization
Polymerization will not occur.
EPM00163 DuPont Page 8
Material Safety Data Sheet
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TOXICOLOGICAL INFORMATION
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Animal Data
>>>Amorphous Silica
Oral LD50: >10,000 mg/kg in rats
>>>Component A
Inhalation LC50: no information found
Skin absorption LD50: no information found
Oral LD50: 365 mg/kg in rats (Moderately toxic by
ingestion)
>>>Component B
Oral LD50: Rat- 890 UL/KG
Oral LD50: Bird (wild)-75 mg/kg
>>>Sulfuric Acid
Oral LD50: 2,140 mg/kg in rats
Inhalation 8 hour LC50: 30 mg/m3 in guinea pigs
>>>Component D
Oral, rat: LD50 = >90 mL/kg.
>>>Component E
Oral ALD: 670 mg/kg in rats
>>>Isopropanol
Oral LD50: 4700 mg/kg in rats
Dermal LD50: 12,900 mg/kg in rabbits
Inhalation 4 hour LC50: 16,000 ppm in rats
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ECOLOGICAL INFORMATION
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Ecotoxicological Information
>>>Amorphous Silica
96 hour LC50 - Fathead minnows: 5600 ppm
>>>Component A
The 96 Hr LC50 in mosquito fish is 80-85 mg/L.
>>>Component B
No information available.
>>>Sulfuric Acid
96 hour LC50 - Bluegill sunfish: 10.5 ppm.
48 hour TLm - Flounder: 100-300 ppm
EPM00163 DuPont Page 9
Material Safety Data Sheet
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DISPOSAL CONSIDERATIONS
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Waste Disposal
Treatment, storage, transportation, and disposal must be in
accordance with applicable Federal, State/Provincial, and Local
regulations.
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REGULATORY INFORMATION
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U.S. Federal Regulations
This product complies with TSCA inventory reporting requirements.
State Regulations (U.S.)
WARNING - SUBSTANCES KNOWN TO THE STATE OF CALIFORNIA TO
CAUSE CANCER, BIRTH DEFECTS OR OTHER REPRODUCTIVE HARM- *
Ethylene oxide赂<0.00002%
1,4-Dioxane 赂<0.00001%
Acetaldehyde赂<0.00001%
Formaldehyde赂<0.00001%
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OTHER INFORMATION
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The data in this Material Safety Data Sheet relates only to the
specific material designated herein and does not relate to use in
combination with any other material or in any process.
Responsibility for MSDS : DuPont Air Products Nanomaterials L.L.C.
MSDS Coordinator
Telephone : (757) 686-8663 OR (919) 248-5027
# Indicates updated section.
This information is based upon technical information believed to be
reliable. It is subject to revision as additional knowledge and
experience is gained.
End of MSDS
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