The MSDS format adheres to the standards and regulatory requirements
of the United States and may not meet regulatory requirements
in other countries.
DuPont Page 1
Material Safety Data Sheet
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MICROPLANAR CMP3700M
EPM00139 Revised 21-JAN-2008
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CHEMICAL PRODUCT/COMPANY IDENTIFICATION
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Product Use
Tungsten CMP
Tradenames and Synonyms
MicroPlanar(R) CMP3700MDE(TM)
MicroPlanar(R) CMP3700M1Y(TM)
Company Identification
MANUFACTURER/DISTRIBUTOR
DuPont Air Products Nanomaterials LLC
2441 West Erie Drive
Tempe
Arizona
USA
85282
PHONE NUMBERS
Product Information : 1-800-441-7515 (outside U.S 302-774-1000)
Transport Emergency : CHEMTREC 1-800-424-9300 (outside U.S
703-527-3887)
Medical Emergency : 1-800-441-3637 (outside U.S 302-774-1000)
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COMPOSITION/INFORMATION ON INGREDIENTS
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# Components
Material CAS Number %
Colloidal Silica 7631-86-9 <5
Water 7732-18-5 >95
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HAZARDS IDENTIFICATION
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# Potential Health Effects
A corrosivity screening test was performed and the results
indicated that the mixture is not corrosive to skin.
<<
SKIN CONTACT may cause skin irritation with discomfort or
rash, and possibly skin burns. EYE CONTACT may cause eye
irritation with discomfort, tearing, or blurring of vision.
INHALATION may cause drying of mucous membranes and
irritation of nose, throat, and lungs with nosebleeds,
cough, difficulty breathing or shortness of breath. Based on
EPM00139 DuPont Page 2
Material Safety Data Sheet
(HAZARDS IDENTIFICATION - Continued)
animal experiments, long term exposures to high doses could
lead to pulmonary inflammation and subsequent development of
chronic lung disease.
Colloidal Silica does not induce the lung effects associated
with crystalline silica. Epidemiology studies have not shown
any evidence of fibrosis in workers exposed to Amorphous
Silica dust levels ranging from 2 to 7 mg/m3.
Carcinogenicity Information
None of the components present in this material at concentrations
equal to or greater than 0.1% are listed by IARC, NTP, OSHA or ACGIH
as a carcinogen.
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FIRST AID MEASURES
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First Aid
INHALATION
No specific intervention is indicated as the compound is not
likely to be hazardous by inhalation.
However, if exposed to fumes from overheating or combustion,
remove to fresh air. If not breathing, give artificial
respiration. If breathing is difficult, give oxygen. Call a
physician if necessary.
SKIN CONTACT
Flush skin with water after contact. Wash contaminated clothing
before reuse.
EYE CONTACT
In case of contact, immediately flush eyes with plenty of water
for at least 15 minutes. Call a physician.
INGESTION
If swallowed, do not induce vomiting. Immediately give 2 glasses
of water. Never give anything by mouth to an unconscious person.
Call a physician.
Notes to Physicians
Treat symptomatically as required by the condition of the
patient.
EPM00139 DuPont Page 3
Material Safety Data Sheet
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FIRE FIGHTING MEASURES
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Flammable Properties
Flash Point : Not Flammable
Autoignition : Not Available
Flammable limits in Air, % by Volume
LEL : None
UEL : None
Extinguishing Media
Use media appropriate for surrounding material.
Fire Fighting Instructions
This material is not flammable. Use normal firefighting
procedures for the area.
FIRE FIGHTING EQUIPMENT
Non-flammable.
HAZARDOUS COMBUSTION PRODUCTS
None
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ACCIDENTAL RELEASE MEASURES
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Safeguards (Personnel)
NOTE: Review FIRE FIGHTING MEASURES and HANDLING (PERSONNEL)
sections before proceeding with clean-up. Use appropriate
PERSONAL PROTECTIVE EQUIPMENT during clean-up.
Spill Clean Up
If material becomes dry, wet before removal. Contain spill
with absorbent material. Transfer absorbent and other
contaminated materials to a UN approved covered container
for disposal. Consult with Federal, State, and local
regulatory agencies to determine acceptable clean-up levels.
Comply with Federal, State and local regulations on
reporting releases.
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HANDLING AND STORAGE
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Handling (Personnel)
Avoid contact with eyes, skin or clothing. Wash thoroughly after
handling. Wash clothing after use.
Storage
Store above 32 F (0 C)
EPM00139 DuPont Page 4
Material Safety Data Sheet
(HANDLING AND STORAGE - Continued)
Keep in original closed containers.
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EXPOSURE CONTROLS/PERSONAL PROTECTION
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Engineering Controls
Use only with adequate ventilation.
Personal Protective Equipment
EYE/FACE PROTECTION
Use safety glasses or chemical goggles.
RESPIRATORS
No respiratory protection is normally required. However, if
material becomes dry and dust is present, use a NIOSH
approved dust respirator.
PROTECTIVE CLOTHING
Prevent skin contact. Wear chemical resistant gloves.
Exposure Guidelines
Applicable Exposure Limits
Colloidal Silica
PEL (OSHA) : 80 mg/m3 / % SiO2 - 8 Hr TWA
AEL * (DuPont) : 3 mg/m3, 8 & 12 Hr. TWA, respirable dust
* AEL is DuPont鈥檚 Acceptable Exposure Limit. Where governmentally
imposed occupational exposure limits which are lower than the AEL
are in effect, such limits shall take precedence.
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PHYSICAL AND CHEMICAL PROPERTIES
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Physical Data
Boiling Point : 212 F (100 C)
Freezing Point : 32 F (0 C)
pH : 3.5
Odor : None.
Form : Liquid Dispersion.
Color : Milky, Orange.
Vapor Pressure : Not Available
Vapor Density : Not Available
Evaporation Rate : Not Available
Specific Gravity : 1-1.2
EPM00139 DuPont Page 5
Material Safety Data Sheet
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STABILITY AND REACTIVITY
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Chemical Stability
Stable at normal temperatures and storage conditions.
Incompatibility with Other Materials
CONDITIONS TO AVOID
Freezing.
Decomposition
HAZARDOUS DECOMPOSITION
None known.
Polymerization
Polymerization will not occur.
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TOXICOLOGICAL INFORMATION
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# Animal Data
>>>Colloidal Silica
Oral LD50: >10,000 mg/kg in rats
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ECOLOGICAL INFORMATION
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# Ecotoxicological Information
<<
96 hour LC50 - Fathead minnows: 5600 ppm
FATE
No information is available.
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DISPOSAL CONSIDERATIONS
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Waste Disposal
Treatment, storage, transportation, and disposal must be in
accordance with applicable Federal, State/Provincial, and Local
regulations.
Incineration at a facility with proper Federal and State
issued permits is the recommended method for disposal.
EPM00139 DuPont Page 6
Material Safety Data Sheet
(DISPOSAL CONSIDERATIONS - Continued)
Container Disposal
Empty containers retain product residue. Observe all hazard
precautions. Keep away from heat, sparks, and flames. Do
not distribute, make available, or reuse empty containers
except for storage and shipment of original product. Remove
all hazardous product residue, and puncture or otherwise
destroy empty containers before disposal. Consult 40 CFR,
Parts 261 and 268 for guidance on disposal.
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TRANSPORTATION INFORMATION
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Shipping Information
DOT/IMO/IATA
Not Regulated.
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REGULATORY INFORMATION
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U.S. Federal Regulations
This product complies with TSCA inventory reporting requirements.
SARA TITLE III (SUPERFUND AMENDMENTS AND REAUTHORIZATION
ACT)
311/312 Hazard Categories None
313
This product is not subjected to the reporting requirements
of Section 313 of the Emergency Planning and Community
Right-To-Know Act of 1986 and of 40 CFR 372.
CERCLA (COMPREHENSIVE RESPONSE COMPENSATION AND LIABILITY
ACT)
Reportable Quantity(RQ): None
We recommend you contact local authorities to determine if
there may be other local reporting requirements.
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OTHER INFORMATION
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NFPA, NPCA-HMIS
NPCA-HMIS Rating
Health :1
Flammability :0
Reactivity :0
EPM00139 DuPont Page 7
Material Safety Data Sheet
(Continued)
Additional Information
Exposure to MicroPlanar(TM) CMP3700M(TM) should be kept to
the lowest level possible. This material is for industrial
use. Use only under the supervision of a technically
qualified individual.
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The data in this Material Safety Data Sheet relates only to the
specific material designated herein and does not relate to use in
combination with any other material or in any process.
Responsibility for MSDS : DuPont AirProducts Nanomaterials L.L. C
MSDS Coordinator
Telephone : 757-686-8663 or 919-248-5027
# Indicates updated section.
This information is based upon technical information believed to be
reliable. It is subject to revision as additional knowledge and
experience is gained.
End of MSDS
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