1254 Chestnut Street
Newton, MA 02464-1418
Tel: (617) 965-5511
Fax: (617) 965-5818
MATERIAL SAFETY DATA SHEET PAGE 1
03 March 2005
SECTION 1. CHEMICAL IDENTIFICATION ---------------------------------------------------------
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 495 PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 鈥? Section 9
SECTION 2. COMPOSITION-----------------------------------------------------------------------------
HAZARDOUS
INGREDIENTS: Anisole (CAS: 100-66-3); 84-99% (See Table 1 鈥? Section 9)
OTHER
INGREDIENTS: Poly(methylmethacrylate) (CAS: 9011-14-7)
SECTION 3. HAZARD DATA----------------------------------------------------------------------------
INFLAMMABILITY: Flammable liquid.
SKIN CONTACT: May cause skin irritation.
EYE CONTACT: Vapor or mist is irritating to the eyes.
INHALATION: Vapor or mist is irritating to mucous membranes and upper
respiratory tract.
MUTAGENICITY: Not known to be mutagenic.
CARCINOGENICITY: Not known to be carcinogenic.
TARGET ORGANS: Eyes, Skin, Respiratory System, and Nervous System.
SECTION 4. FIRST AID MEASURES-------------------------------------------------------------------
INHALATION: Move the affected person away from the contaminated area and into
the fresh air. If necessary seek medical advice.
INGESTION: Rinse mouth out with water. Consult a doctor if necessary.
SKIN CONTACT: Rinse with plenty of water.
EYE CONTACT: Rinse with water while keeping the eyes wide open.
SECTION 5. FIRE FIGHTING MEASURES-----------------------------------------------------------
EXTINGUISHING MEDIA: Dry chemical, carbon dioxide.
SPECIAL FIRE FIGHTING
PRECAUTIONS: Wear self-contained breathing apparatus (SCBA) and
personal protective equipment to prevent contact with skin
and eyes.
UNUSUAL FIRE OR
EXPLOSION HAZARDS: Heat will build pressure and may rupture closed containers.
Keep containers cool with water spray.
MATERIAL SAFETY DATA SHEET PAGE 2
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 495 PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 鈥? Section 9
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SECTION 6. ACCIDENTAL RELEASE PROCEDURES -------------------------------------------
EVACUATION
PROCEDURES & SAFETY: Wear appropriate protective gear for the situation. See Personal
Protection information in Section 8. Eliminate all sources of
ignition. Do not breathe vapors or dust.
CLEANUP & DISPOSAL
OF SPILL: Absorb with an inert absorbent. Sweep up and place in an
appropriate closed container. Use clean, non-sparking tools to
collect absorbed material.
ENVIRONMENTAL &
REGULATORY REPORTING: Do not flush to drain. If required proper authorities should be
notified.
SECTION 7. STORAGE AND HANDLING PRECAUTIONS---------------------------------------
STORAGE: Store in tightly closed container in a cool, dry, well-ventilated
environment away from ignition source.
HANDLING: Use only under yellow light.
Keep away from heat, sparks, and flames.
Use only with mechanical exhaust.
Do not contact with skin, eyes, and clothing.
Avoid prolonged or repeated contact with skin.
Do not breathe vapors or mist.
Wash with soap and water after handling.
Have safety shower and eye wash available.
Store and transfer under a blanket of dry inert gas.
SECTION 8. EXPOSURE CONTROLS AND PERSONAL PROTECTION-----------------------
RESPIRATORY
PROTECTION: Under normal conditions, use of air-purifying (half-mask/full-face)
respirator with cartridges/canisters approved for use against organic
vapors, dust, mists and fumes is recommended.
VENTILATION: General area dilution/exhaust ventilation.
SKIN PROTECTION: PVC protective gloves are highly recommended.
EYE PROTECTION: Safety goggles are highly recommended.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street鈥ewton, MA 02464-1418鈥el:(617)965-5511鈥ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 3
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 495 PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 鈥? Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 9. PHYSICAL AND CHEMICAL DATA--------------------------------------------------
APPEARANCE: Clear to straw colored liquid
ODOR: Strong
BOILING POINT: 154 潞C (309 潞F)
SPECIFIC GRAVITY: See Table 1 below
VAPOR PRESSURE: 13 mm @ 42 潞C (108 潞F)
VAPOR DENSITY: 3.7 (air=1)
H2O SOLUBILITY: Slightly soluble.
% VOLATILES: See Table 1 below
EVAPORATION RATE: 0.1 (BuAc=1)
FLASH POINT: 44 潞C (111 潞F) CC
AUTOIGNITION TEMP: 475 潞C (887 潞F)
EXPLOSION LIMITS: unk. Lower
unk. Upper
Table 1
Name Product # Specific Gravity Volatiles (% by wt.) VOC (g/L)
495A1 M130001 0.995 99 985
495A2 M130002 0.997 98 975
495A3 M130003 0.999 97 970
495A4 M130004 1.001 96 960
495A4.5 M130504 1.002 95.5 957
495A5 M130005 1.003 95 955
495A5.5 M130505 1.004 94.5 950
495A6 M130006 1.005 94 945
495A7 M130007 1.007 93 935
495A7.5 M130507 1.008 92.5 930
495A8 M130008 1.009 92 930
495A8.5 M130508 1.010 91.5 925
495A9 M130009 1.011 91 920
495A10 M130010 1.013 90 910
495A11 M130011 1.014 89 900
495A15 M130015 1.018 85 865
495A15.5 M130515 1.019 84.5 860
SECTION 10. REACTIVITY DATA -------------------------------------------------------------------
STABILITY: Stable
INCOMPATIBILITY: Strong Oxidizing Agents, Strong Acids, Strong Bases
HAZARDOUS COMBUSTION OR
DECOMPOSITION PRODUCTS: Carbon Monoxide, Carbon Dioxide, Phenol
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street鈥ewton, MA 02464-1418鈥el:(617)965-5511鈥ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 4
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 495 PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 鈥? Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
SECTION 11. TOXICITY HAZARDS-------------------------------------------------------------------
ACUTE TOXICITY:
As Anisole:
ORAL: LD50 (rat): 3700 mg/kg
SKIN: LD50 (rat): >5000 mg/kg
LOCAL EFFECTS: Slightly irritating to the skin. Not irritating to rabbits on ocular
application. No sensitizing reaction was observed for guinea pigs.
SECTION 12. ECOLOGICAL DATA--------------------------------------------------------------------
BIODEGRADABILITY: Readily biodegradable.
BIOACCUMULATION: Not potentially bioaccumulable.
ECOTOXICITY: EC50 (Daphnia/24 hr): 40 mg/l
SECTION 13. DISPOSAL CONSIDERATIONS-------------------------------------------------------
Comply with applicable local, state or international regulations regarding the proper disposal of
this material and/or containers.
SECTION 14. TRANSPORTATION INFORMATION------------------------------------------------
HAZARD CLASSIFICATION: Flammable Liquid
SHIPPING NAME: Resin Solution
UN NUMBER: UN 1866
PACKING GROUP: III
SECTION 15. REGULATORY INFORMATION------------------------------------------------------
EUROPEAN INFORMATION
EINECS LISTED
EC Nos: Anisole 202-876-1
RISK & SAFETY PHRASES
R10 Flammable
S16 Keep away from sources of ignition. No smoking.
S24 Avoid contact with skin.
INDICATIONS OF DANGER
None
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street鈥ewton, MA 02464-1418鈥el:(617)965-5511鈥ax:(617)965-5818
MATERIAL SAFETY DATA SHEET PAGE 5
03 March 2005
CHEMICAL NAME: Organic Polymer Solution
TRADE NAME: 495 PMMA Series Resists in Anisole
Positive Radiation Sensitive Resists
PRODUCT #: See Table 1 鈥? Section 9
-----------------------------------------------------------------------------------------------------------------------------------------
US AND INTERNATIONAL INFORMATION
HAZARDOUS LISTINGS: All ingredients appear on the TSCA Inventory of
Chemical Substances, EINECS, Canadian DSL and the
Japan ENCS Listing.
SARA Title III: This product IS NOT subject to SARA Title III, Section
313 Reporting Requirements.
Calif. SCAQMD Rule 443.1 VOC's: See Table 1 鈥? Section 9
SECTION 16. ADDITIONAL PRECAUTIONS AND COMMENTS-------------------------------
National Fire Protection Association Hazard Ratings 鈥? NFPA:
1 Health Hazard Rating
2 Flammability Rating
0 Reactivity Rating
To the best of our knowledge, the above information is believed to be accurate but does
not claim to be all-inclusive and is intended to be used only as a guide. The supplier
makes no warranty of any kind, expressed or implied, concerning the use of this product
and shall not be held liable for any damage resulting from handling or from contact with
the above product. User assumes all risks incident to its use.
MSDS Revision Information:
A) Removed 鈥淣ANO鈥? name from trade name.
B) General update of MSDS. Added European Risk and Safety phrases to Section 15.
_____________________________________________________________________________________________________
MicroChem Corp. 1254 Chestnut Street鈥ewton, MA 02464-1418鈥el:(617)965-5511鈥ax:(617)965-5818
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