Material Safety Data Sheet
GenCleanTM CMP-300
1. PRODUCT AND COMPANY IDENTIFICATION
GenCleanTM CMP-300
PRODUCT NAME:
Aqueous solution of Hydrofluoric Acid and Tetramethylammonium Hydroxide.
OTHER/GENERIC NAMES:
Electronics
PRODUCT USE:
General Chemical Corporation
MANUFACTURER:
90 East Halsey Road
Parsippany, NJ 07054
973-515-1840 800-631-8050
FOR MORE INFORMATION CALL: IN CASE OF EMERGENCY CALL:
(24 Hours/Day, 7 Days/Week)
(Monday-Friday, 9:00am-4:30pm)
2. COMPOSITION/INFORMATION ON INGREDIENTS
INGREDIENT NAME CAS NUMBER WEIGHT %
Tetramethylammonium hydroxide 75-59-2 1.44
Hydrofluoric acid 7664-39-3 0.47
Water 7732-18-5 Balance
Trace impurities and additional material names not listed above may also appear in Section 15 towards the end of the
MSDS. These materials may be listed for local "Right-To-Know" compliance and for other reasons.
This product is considered hazardous under the OSHA Hazard
OSHA Hazard Communication Standard:
Communication Standard.
3. HAZARDS IDENTIFICATION
EMERGENCY OVERVIEW: A colorless liquid with a slight odor. May cause irritation or
burns to skin and eyes. May be harmful if inhaled or swallowed. Not flammable.
POTENTIAL HEALTH HAZARDS
SKIN: May cause irritation or burns. Dilute solutions of hydrofluoric acid (2% or lower) can cause burns. Burns
may not be immediately painful or visible. HF will penetrate skin and attack underlying tissues and
bone. Large burns (over 25 square inches) may also cause hypocalcemia which, in rare instances, has
been fatal. Special medical treatment is required to treat hydrofluoric acid burns. The effects may be
delayed if initial first aid measures are inadequate.
Both liquid and vapor can cause irritation or corneal burns or conjunctivitis. Dilute solutions of
EYES:
hydrofluoric acid (2% or lower) can cause burns.
Mild exposure: Can irritate nose, throat and respiratory system.
INHALATION:
Severe exposure: Can cause nose and throat burns, lung inflammation and pulmonary
edema. Also depletes calcium levels in the body if not promptly treated, resulting in death due
to hypocalcemia.
MSDS Number: GC-6161 Page 1 of 7
Current Issue Date: February, 2003
MATERIAL SAFETY DATA SHEET
GenCleanTM CMP-300
Can cause severe mouth, throat and stomach burns. Can affect kidney function and be fatal if
INGESTION:
swallowed. Profound and possibly fatal hypocalcemia is likely to occur unless medical
treatment is promptly initiated.
DELAYED EFFECTS: Bone and joint changes in humans (fluorosis).
Ingredients found on one of the three OSHA designated carcinogen lists are listed below.
INGREDIENT NAME NTP STATUS IARC STATUS OSHA LIST
No ingredients listed in this section.
4. FIRST AID MEASURES
Immediately flush with water with sufficient volume until there is no evidence of the chemical on the affected
SKIN:
area. Remove contaminated clothing and wash before reuse. Get medical attention immediately.
Immediately flush with water for at least 15-20 minutes until no evidence of chemical remains. While
EYES:
flushing, forcibly hold the eyelids apart to ensure flushing of the entire eye surface. Get immediate medical
attention.
Remove to fresh air. If breathing has stopped, give artificial respiration taking care to avoid contact
INHALATION:
with this product. Get medical attention.
Do not induce vomiting. If person is conscious and able to swallow, have victim drink a large
INGESTION:
volume of water and milk. Get medical attention immediately.
Observe for potential hydrofluoric acid-type burns. Severe systemic effects may occur
ADVICE TO PHYSICIAN:
from large skin burns, significant inhalation or ingestion. Monitor for hypocalcemia.
Treat inhalation exposures as chemical pneumonia.
5. FIRE FIGHTING MEASURES
FLAMMABLE PROPERTIES
Not flammable
FLASH POINT:
Not applicable
FLASH POINT METHOD:
Not applicable
AUTOIGNITION TEMPERATURE:
Not applicable
UPPER FLAME LIMIT (volume % in air):
Not applicable
LOWER FLAME LIMIT (volume % in air):
Not applicable
FLAME PROPAGATION RATE (solids):
Not applicable
OSHA FLAMMABILITY CLASS:
EXTINGUISHING MEDIA:
Use water or suitable agent for surrounding fire.
UNUSUAL FIRE AND EXPLOSION HAZARDS:
None known.
MSDS Number: GC-6161 Page 2 of 7
Current Issue Date: February, 2003
MATERIAL SAFETY DATA SHEET
GenCleanTM CMP-300
SPECIAL FIRE FIGHTING PRECAUTIONS/INSTRUCTIONS:
Wear NIOSH-approved, self-contained breathing apparatus and full protective clothing. Use water spray to keep
non-leaking, fire-exposed containers cool.
6. ACCIDENTAL RELEASE MEASURES
IN CASE OF SPILL OR OTHER RELEASE: (See section 8 for recommended personal protective equipment.)
Wear full protective equipment as described in Section 8. Contain spills and cautiously dilute with a large excess
of water. Neutralize carefully with alkali such as soda ash or lime. Provide good ventilation. Flush residue in
accordance with applicable disposal regulations. Attempt to keep unneutralized products out of sewer. Any
release to the environment of these products may be subject to Federal and/or State reporting requirements.
Check with appropriate agencies.
Spills and releases may have to be reported to Federal and/or local authorities. See Section 15 regarding
reporting requirements.
7. HANDLING AND STORAGE
NORMAL HANDLING: (See section 8 for recommended personal protective equipment.)
Do not breathe vapor or mist. Use only with adequate ventilation. Avoid all contact with skin, eyes and clothing,
even with dilute solutions. To prevent ignition of hydrogen gas which may be present from contact with metals,
smoking, flames and sparks should not be permitted in storage areas.
STORAGE RECOMMENDATIONS:
Store only in approved containers, avoiding glass and most metals. Store below 52潞C (125.6潞F), preferably below
38潞C (100.4潞F), in a well-ventilated area. Protect from physical damage and keep tightly closed. Flammable
hydrogen gas can be generated inside unlined metal storage containers.
8. EXPOSURE CONTROLS/PERSONAL PROTECTION
ENGINEERING CONTROLS:
Provide local exhaust.
PERSONAL PROTECTIVE EQUIPMENT
Wear rubber gloves and protective clothing to prevent skin contact.
SKIN PROTECTION:
Faceshield and goggles.
EYE PROTECTION:
Mist type respirator if mists are present.
RESPIRATORY
PROTECTION:
Eyewash and safety shower.
ADDITIONAL
RECOMMENDATIONS:
MSDS Number: GC-6161 Page 3 of 7
Current Issue Date: February, 2003
MATERIAL SAFETY DATA SHEET
GenCleanTM CMP-300
EXPOSURE GUIDELINES
INGREDIENT NAME ACGIH TLV OSHA PEL OTHER LIMIT
Hydrofluoric acid 3 ppm Ceiling (as F) 3 ppm TWA (as F) mg (F)/liter of urine
7 (post-shift)
4 (pre-shift)
1
= Limit established by General Chemical Corporation.
2
= Workplace Environmental Exposure Level (AIHA).
3
= Biological Exposure Index (ACGIH).
OTHER EXPOSURE LIMITS FOR POTENTIAL DECOMPOSITION PRODUCTS:
None
9. PHYSICAL AND CHEMICAL PROPERTIES
Colorless liquid.
APPEARANCE:
Liquid
PHYSICAL STATE:
Mixture
MOLECULAR WEIGHT:
Mixture
CHEMICAL FORMULA:
Slight
ODOR:
Not determined
SPECIFIC GRAVITY (water = 1.0):
100
SOLUBILITY IN WATER (weight %):
Estimated: 5.5
pH:
Not determined
BOILING POINT:
Not determined
MELTING POINT:
Not determined
VAPOR PRESSURE:
Not determined
VAPOR DENSITY (air = 1.0):
Not determined.
EVAPORATION RATE: COMPARED TO:
Not determined.
% VOLATILES:
Not flammable.
FLASH POINT:
(Flash point method and additional flammability data are found in Section 5.)
10. STABILITY AND REACTIVITY
NORMALLY STABLE? (CONDITIONS TO AVOID):
Stable under normal conditions.
INCOMPATIBILITIES:
For Hydrofluoric acid:
Glass, concrete and other silicon-bearing materials: yields silicon tetrafluoride gas. Pressure build-up from this
process has been known to blow up glass containers.
Carbonates, sulfides, and cyanides: yields toxic gases: carbon dioxide, hydrogen sulfide, and hydrogen cyanide.
Alkalis, some oxides, fluorine and other water-reactive materials: causes strong exothermic reactions that can be
violent.
Common metals: yields hydrogen gas, a fire and explosive hazard and a reactive hazard.
Corrosive to many materials, including rubber, leather, and certain organic materials.
For TMAH:
MSDS Number: GC-6161 Page 4 of 7
Current Issue Date: February, 2003
MATERIAL SAFETY DATA SHEET
GenCleanTM CMP-300
Strong acids and oxidizers.
HAZARDOUS DECOMPOSITION PRODUCTS:
HF (gas and mist), trimethylamine and methanol. In fire conditions: carbon monoxide and nitrogen oxides.
HAZARDOUS POLYMERIZATION:
Will not occur
11. TOXICOLOGICAL INFORMATION
IMMEDIATE (ACUTE) EFFECTS:
Hydrofluoric acid:
LCLo (inhl-human): 50 ppm/30 min
LC50 (inhl-rat): 1276 ppm/1 hr
LC50 (inhl-mouse): 342 ppm/1 hr
Tetramethylammonium hydroxide:
LDLo (subcutaneous-mouse): 19 mg/kg
LD50 (skin-guinea pig): 25 mg/kg
DELAYED (SUBCHRONIC AND CHRONIC) EFFECTS:
Effects of chronic exposure to hydrofluoric acid include systemic fluoride toxicity, osteosclerosis, and mottling of
the teeth. Hypocalcemia, metabolic acidosis, pulmonary edema, and death can occur from high-level chronic
exposure.
OTHER DATA:
None
12. ECOLOGICAL INFORMATION
Hydrofluoric acid:
60 ppm/*/fish/lethal/fresh water (* = time period not specified)
Tetramethylammonium hydroxide:
If neutralized, this material may be biodegradable. No specific information available. Acute aquatic testing on
a pH neutralized solution of this compound has been shown to be highly toxic to the ceriodaphnia dubia
(water flea).
13. DISPOSAL CONSIDERATIONS
RCRA
Is the unused product a RCRA hazardous If yes, the RCRA ID number is: Not applicable
waste if discarded? No
OTHER DISPOSAL CONSIDERATIONS:
If permitted by regulations, material may be neutralized with alkali.
MSDS Number: GC-6161 Page 5 of 7
Current Issue Date: February, 2003
MATERIAL SAFETY DATA SHEET
GenCleanTM CMP-300
The information offered in section 13 is for the product as shipped. Use and/or alterations to the product such as
mixing with other materials may significantly change the characteristics of the material and alter the RCRA
classification and the proper disposal method.
14. TRANSPORT INFORMATION
Not regulated
US DOT HAZARD CLASS:
US DOT ID NUMBER:
PROPER SHIPPING NAME:
For additional information on shipping regulations affecting this material, contact the information number found in
Section 1.
15. REGULATORY INFORMATION
TOXIC SUBSTANCES CONTROL ACT (TSCA)
All ingredients listed on the TSCA Inventory
TSCA INVENTORY STATUS:
OTHER TSCA ISSUES: None
SARA TITLE III/CERCLA
"Reportable Quantities" (RQs) and/or "Threshold Planning Quantities" (TPQs) exist for the following ingredients.
INGREDIENT NAME SARA/CERCLA RQ (lb) SARA EHS TPQ (lb)
Hydrofluoric acid 100 100
Spills or releases resulting in the loss of any ingredient at or above its RQ requires immediate notification
to the National Response Center [(800) 424-8802] and to your Local Emergency Planning Committee.
Immediate
SECTION 311 HAZARD CLASS:
SARA 313 TOXIC CHEMICALS:
The following ingredients are SARA 313 "Toxic Chemicals" and may be subject to annual reporting requirements.
CAS numbers and weight percents are found in Section 2.
INGREDIENT NAME COMMENT
Hydrofluoric acid None
STATE RIGHT-TO-KNOW
In addition to the ingredients found in Section 2, the following are listed for state right-to-know purposes.
INGREDIENT NAME WEIGHT % COMMENT
No ingredients listed in this section.
ADDITIONAL REGULATORY INFORMATION:
None listed
MSDS Number: GC-6161 Page 6 of 7
Current Issue Date: February, 2003
MATERIAL SAFETY DATA SHEET
GenCleanTM CMP-300
WHMIS CLASSIFICATION (CANADA):
Not determined
FOREIGN CHEMICAL CONTROL INVENTORY STATUS:
All ingredients listed on EINECS and Canadian DSL.
16. OTHER INFORMATION
February, 2003
CURRENT ISSUE DATE:
Not applicable
PREVIOUS ISSUE DATE:
CHANGES TO MSDS FROM PREVIOUS ISSUE DATE ARE DUE TO THE FOLLOWING:
New product 鈥? not applicable.
None
OTHER INFORMATION:
MSDS Number: GC-6161 Page 7 of 7
Current Issue Date: February, 2003
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