ELECTRONIC SPACE PRODUCTS INTERNATIONAL
1050 Benson Way, Ashland, OR 97520
Toll Free (800) 638-2581 * Fax (541) 488-8313
E-Mail: sales@espimetals.com
MATERIAL SAFETY DATA SHEET
I PRODUCT IDENTIFICATION
Tantalum Nitride Carbide
Trade Name: Ch em ical Fam ily:
TaN 12070 -06-3
Form ula: CAS #:
II HAZAR DOUS INGRED IENTS
Haz ardous C omp onents % OSHA/PEL ACGIH/TLV
5 m g/m 3 as Ta 5 m g/m 3 dust as Ta
Tantalum Nitride 0-100
III PHYSICAL DATA
5500 oC 38.80 oC
Boiling Point 760 mm Hg: Freezing/Melting Point:
No data Essentially 0
Vapo r Density: Vapor Pressure:
0 Insoluble
% V olatiles: Solubility in H 2O:
Black to grey powder, no odor 0
Appearance and Odor: Evap oration R ate:
IV FIRE AND EXPLOSION H AZARDS DATA
Flash Point (Method Used): N/A Autoignition Temperature: No Data
Flam mab le Limits: Upper: N/A Lower: N/A
Extingu ishing Media: Use water, carbon dioxide, dry chemical extinguishing agents, dry sand, or dry ground dolomite.
Special Fire Fighting Procedures: No special firefighting procedures needed, use normal procedures which include wearing
NIOSH/MSHA approved self-contained breathing apparatus, flame and chemical resistant clothing, hats, boots and gloves. If without
risk remove m aterial from fire area.
Unusual Fire and Explosion Hazards: May form explosive mixture with gases. May em it toxic fumes when involved in a fire.
V HEALTH HAZARD INFORMATION
Effects of Exposure:
To the best of our knowledge the chemical, physical and toxicological properties of tantalum nitride have not been
thoroughly investigated and reported.
Acute E ffects:
Inhalation: May cause respiratory irritation.
Ingestion: None known
Skin : Ma y cau se skin irritation on contact.
Eye: May cause irritation
Chro nic Effects: None known
Other: Details of toxicity are unknown.
Medical Conditions Generally Aggravated by Exposure: None known.
Target Organs: None known.
Most Likely Routes of Entry: Ingestion
Carcino genicity: NTP: No IARC: No OSHA: No
EMERG ENCY AND FIRST AID PROCEDURES:
EYE: Imm ediately flush eyes, including under eyelids, with large amounts of water for at least 15 minutes. Call a physician.
SK IN: Remove contaminated clothing, flood skin with large amounts of water. If irritation persists seek medical attention.
INGESTION: No data available, but one should obtain medical attention.
INHALATION: No specific information available, one should obtain medical attention.
VI REACTIVITY DATA
Stability: Stable
Co nditio ns to Av oid: Extrem ely resistant to chemical action except at elevated temp eratures.
Incompatibility (Material to Avoid): Flamm able gase s.
Haz ardous D ecomposition Produc ts: May emit irritating fum es.
Hazardous Polymerization: Will not occur.
VII SPILL OR LEAK PROC EDURES
Steps to Be Taken in Case Material Is Released or Spilled: Wearing full protective equipment, cover spill with dry sand or
vermiculite. Mix well and carefully transfer to a container.
Waste Disposal: In accord ance w ith Loca l, State and Federal W aste Dispo sal Regu lations.
VIII SPECIAL PROTECTION INFORMATION
Respiratory Protection: High efficiency particle respirator. Ventilation: Laboratory fume hood.
Protective Gloves: Rubber. Eye Protection: ANSI app roved safety goggles.
IX SPECIAL PRECAUTIONS
Handling and Storage: Keep container tightly closed. Store in a cool, dry, well-ventilated area. Wash thoroughly after use.
Other Precautions: Lab coat and apron, flame and chemical resistant coveralls, eyewash capable of sustained flushing, safety drench
shower and hygienic facilities for washing.
The abo ve inform ation is believ ed to be co rrect, but do es no t purp ort to b e all inclu sive an d sha ll be used only as a gu ide.
ESPI shall not be held liab le for any d am age resulting from h and ling o r from contact with the abov e pro duc t.
Issued by: S. Dierks
Date: November 2001
-Tantalum Nitride 2-
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