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MATERIAL SAFETY DATA SHEET
I PRODUCT IDENTIFICATION
Titanium Nitride Metal Nitride
Trade Name: Ch em ical Fam ily:
TiN 25583 -20-4
Molecu lar F orm ula: CAS #:
II HAZAR DOUS INGRED IENTS
Haz ardous C omp onents % OSHA/PEL ACGIH/TLV Sec. 302 Sec. 304 Sec. 313
Titanium Nitride 0-100 N/E N/E No No No
HM IS Ratings (0-4): Hea lth: 3 Flam mab ility: 2 Reactivity: 2 Protective Equipment: goggles, gloves, apron, respirator
III PHYSICAL DATA
2950 oC
N/A
Boiling Point: Melting Point:
5.22 g/cc N/A
Specific Gravity: Vapor Pressure:
N/A Essentially in solub le
Vapo r Density: Solubility in H 2O:
Yellow po wder or pieces, no od or. N/A
Appearance and Odor: % Vo latile:
IV FIRE AND EXPLOSION H AZARDS DATA
Flash Point: N/A Autoignition Temperature: N/A
Explosive Lim its: Lower: N/A Upper: N/A
Extingu ishing Media: Use extinguishing media suitable for surrounding material and type of fire.
Special Fire Fighting Procedures: Wear self-contained breathing apparatus and protective clothing to prevent contact with skin and
eyes. Fumes from fire are hazardous. Isolate runoff to prevent environmental pollution.
Unusual Fire & Explosion: May emit toxic fum es of titanium oxide a nd nitrogen o xide un der fire con ditions.
V HEALTH HAZARD INFORMATION
Effects of Exposure:
To the best of our knowledge the chemical, physical and toxicological properties of titanium nitride have not been
thoroug hly in vestigated and recorded yet.
Titanium com pound s are generally considered to be physiologically inert. There are no reported cases in the literature where
titanium as such has caused human intoxication. The dusts of titanium or most titanium compounds such as titanium oxide may be
placed in the nuisance category (Sax , Dangerou s Properties of Industrial Materials, eighth edition).
The details of the toxicity of nitrides as a group are unknown. However, many nitrides react with moisture to evolve
ammo nia. This ga s is an irritant to mucous m embranes.
Acute E ffects:
Inhalation: May cause irritation to the respiratory system an d m ucou s mem branes of the no se and throat. Am mo nia gas m ay cau se
irritation to the nose and throat, dyspnea, bronchial spasms, chest pain, pulmonary edema and pink frothy sputum.
Ingestion: Conside red to ha ve low toxicity by ingestion. A mm onia ga s may cause nausea, vo miting a nd burns.
Skin : May cause irritation. Am mo nia gas m ay cau se irritation and ch emical burns.
Eye: May cause m oderate irritation. Ammo nia gas m ay cau se severe irritation an d chem ical burns.
Chro nic Effects:
Inhalation: May cause pulmonary edema. Repeated or prolonged exposure to amm onia gas may cause swelling of mouth and throat
to the point of asphyxiation, permanent injury and death.
Ingestion: No chronic health effects recorded.
Skin : Repeated or prolonged exposure to ammonia gas may cause tissue damage.
Eye: Repeated or pro longed exp osure to amm onia ga s may cause irreversible dam age to the conjun ctiva, corne a and len s.
Routes of Entry: Inhalation, skin, eye.
Target Organs: May affect the respiratory system , skin and eyes.
Medical Conditions Generally Aggravated by Exposure: Persons with preexisting eye or skin conditions or impaired pu lmonary
function ma y be mo re susc eptible to the effects of this p roduct.
Carcino genicity: NTP: No IARC M onographs: No OSH A Regulated: No
EMERG ENCY AND FIRST AID PROCEDURES:
INHALATION: Remove victim to fresh air. If not breathing give artificial respiration. If breathing is difficult, give oxygen.
INGESTION: If swallowed, wash out mouth with water provided person is conscious. Call a physician.
SK IN: Wash with soap and water and a large volume of water. Seek medical assistance as necessary, especially if irritation develops
or persists.
EYE: Flush w ith copiou s amo unts of w ater for 15 minu tes. Consu lt a physician if irritation persists.
VI REACTIVITY DATA
Stability: Stable
Co nditio ns to Av oid: Moisture
Incompatibility (Material to Avoid): Strong o xidizing a gents, strong acids.
Haz ardous D ecomposition Produc ts: Thermal decomposition may produce oxides of titanium and nitrogen.
Hazardous Polymerization: Will not occur
VII SPILL OR LEAK PROC EDURES
Steps to Be Taken in Case Material Is Released or Spilled: Utilize recom me nde d protectiv e cloth ing and equip me nt. Spills shou ld
be sw ept up and placed in containers. Avoid generation of dust. If d ust is generated, use appropriate respira tory protection . Spill
area can be w ashed with w ater. Collect wash w ater for approved disposal. Keep from entering water or groun d water.
Waste Disposal Method: Dispose o f in accord ance w ith all Federal, State and Lo cal Env ironm ental Reg ulations.
VIII SPECIAL PROTECTION INFORMATION
Respiratory Protection (Specify Type): Wo rk am bient concentrations should b e m onito red and if th e reco mm end ed ex posure lim it
is exceeded, a NIOSH/MSHA approved dust respirator should be worn.
Ventilation: Use lo cal exhau st or oth er m eans to control airborne d ust.
Protective Gloves: Compatible chemical resistant gloves
Eye Protection: Chemical safety goggles
Other Protective Clothing or Equipment: Chemic ally resistant clo thing is recomm end ed to min imize skin contact.
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IX SPECIAL PRECAUTIONS
Precautions to Be Taken in Handling and Storage: Avoid breathing dust. Avoid getting is eyes or on skin. Wash thoroughly after
han dling . Store in a dry place aw ay fro m e xcessive h eat. Avoid contact with m oisture . Reseal con tainers imm ediately after use.
Store aw ay from food and b everag es.
Wo rk Practices: Imp lem ent en gineering and wo rk practice controls to re duc e and ma intain c onc entration o f exp osure at low levels.
Use good housekeeping and sanitation practices. Do not use tobacco or food in work area. Wash thoroughly before eating or
smoking. Do not blow dust off clothing or skin with compressed air. Maintain eyewash capable of sustained flushing, safety drench
shower and facilities for washing.
The abo ve inform ation is believ ed to be co rrect, but do es no t purp ort to b e all inclu sive an d sha ll be used only as a gu ide.
ESPI shall not be held liab le for any d am age resulting from h and ling o r from contact with the abov e pro duc t.
Issued by : S. Dierks
Date: May 1995
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